11/1/2011	8:34:39 AM	Main Vac valve closed
11/1/2011	8:34:46 AM	Main Vac valve opened
11/1/2011	8:38:13 AM	Recipe started at 8:38 AM
11/1/2011	8:38:13 AM	Helium valve closed
11/1/2011	8:38:13 AM	H2 valve closed
11/1/2011	8:38:13 AM	BCl3 valve closed
11/1/2011	8:38:13 AM	PH3 valve closed
11/1/2011	8:38:13 AM	SiCl4 pre valve closed
11/1/2011	8:38:13 AM	SiCl4 post valve closed
11/1/2011	8:38:13 AM	Main Vac valve closed
11/1/2011	8:38:13 AM	Bypass valve closed
11/1/2011	8:38:13 AM	Bubbler valve closed
11/1/2011	8:38:13 AM	Helium MFC set to  0.000000
11/1/2011	8:38:13 AM	H2 MFC set to  0.000000
11/1/2011	8:38:13 AM	BCl3 MFC set to  0.000000
11/1/2011	8:38:13 AM	PHl3 MFC set to  0.000000
11/1/2011	8:38:13 AM	SiCl4 MFC set to  0.000000
11/1/2011	8:38:13 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:38:13 AM	Tube furnace set to 0
11/1/2011	8:38:16 AM	Helium valve closed
11/1/2011	8:38:16 AM	BCl3 valve closed
11/1/2011	8:38:16 AM	PH3 valve closed
11/1/2011	8:38:16 AM	SiCl4 pre valve closed
11/1/2011	8:38:16 AM	SiCl4 post valve closed
11/1/2011	8:38:16 AM	Main Vac valve closed
11/1/2011	8:38:16 AM	Bypass valve closed
11/1/2011	8:38:16 AM	Bubbler valve closed
11/1/2011	8:38:16 AM	H2 valve opened
11/1/2011	8:38:16 AM	Helium MFC set to  0.000000
11/1/2011	8:38:16 AM	H2 MFC set to  500.000000
11/1/2011	8:38:16 AM	BCl3 MFC set to  0.000000
11/1/2011	8:38:16 AM	PHl3 MFC set to  0.000000
11/1/2011	8:38:16 AM	SiCl4 MFC set to  0.000000
11/1/2011	8:38:16 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:38:16 AM	Tube furnace set to 0
11/1/2011	8:39:24 AM	Helium valve closed
11/1/2011	8:39:24 AM	BCl3 valve closed
11/1/2011	8:39:24 AM	PH3 valve closed
11/1/2011	8:39:24 AM	SiCl4 pre valve closed
11/1/2011	8:39:24 AM	SiCl4 post valve closed
11/1/2011	8:39:24 AM	Main Vac valve closed
11/1/2011	8:39:24 AM	Bypass valve closed
11/1/2011	8:39:24 AM	H2 valve opened
11/1/2011	8:39:24 AM	Bubbler valve opened
11/1/2011	8:39:24 AM	Helium MFC set to  0.000000
11/1/2011	8:39:24 AM	H2 MFC set to  500.000000
11/1/2011	8:39:24 AM	BCl3 MFC set to  0.000000
11/1/2011	8:39:24 AM	PHl3 MFC set to  0.000000
11/1/2011	8:39:24 AM	SiCl4 MFC set to  0.000000
11/1/2011	8:39:24 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:39:25 AM	Tube furnace set to 0
11/1/2011	8:39:26 AM	Helium valve closed
11/1/2011	8:39:26 AM	BCl3 valve closed
11/1/2011	8:39:26 AM	PH3 valve closed
11/1/2011	8:39:26 AM	SiCl4 pre valve closed
11/1/2011	8:39:26 AM	SiCl4 post valve closed
11/1/2011	8:39:26 AM	Main Vac valve closed
11/1/2011	8:39:26 AM	Bypass valve closed
11/1/2011	8:39:26 AM	H2 valve opened
11/1/2011	8:39:26 AM	Bubbler valve opened
11/1/2011	8:39:26 AM	Helium MFC set to  0.000000
11/1/2011	8:39:26 AM	H2 MFC set to  500.000000
11/1/2011	8:39:26 AM	BCl3 MFC set to  0.000000
11/1/2011	8:39:26 AM	PHl3 MFC set to  0.000000
11/1/2011	8:39:26 AM	SiCl4 MFC set to  0.000000
11/1/2011	8:39:26 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:39:26 AM	Tube furnace set to 950
11/1/2011	8:54:26 AM	Helium valve closed
11/1/2011	8:54:26 AM	PH3 valve closed
11/1/2011	8:54:26 AM	SiCl4 pre valve closed
11/1/2011	8:54:26 AM	SiCl4 post valve closed
11/1/2011	8:54:26 AM	Main Vac valve closed
11/1/2011	8:54:26 AM	Bypass valve closed
11/1/2011	8:54:26 AM	H2 valve opened
11/1/2011	8:54:26 AM	BCl3 valve opened
11/1/2011	8:54:26 AM	Bubbler valve opened
11/1/2011	8:54:26 AM	Helium MFC set to  0.000000
11/1/2011	8:54:26 AM	H2 MFC set to  500.000000
11/1/2011	8:54:26 AM	BCl3 MFC set to  25.000000
11/1/2011	8:54:26 AM	PHl3 MFC set to  0.000000
11/1/2011	8:54:26 AM	SiCl4 MFC set to  0.000000
11/1/2011	8:54:26 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:54:26 AM	Tube furnace set to 950
11/1/2011	9:24:26 AM	Helium valve closed
11/1/2011	9:24:26 AM	BCl3 valve closed
11/1/2011	9:24:26 AM	PH3 valve closed
11/1/2011	9:24:26 AM	SiCl4 pre valve closed
11/1/2011	9:24:26 AM	SiCl4 post valve closed
11/1/2011	9:24:26 AM	Main Vac valve closed
11/1/2011	9:24:26 AM	Bypass valve closed
11/1/2011	9:24:26 AM	H2 valve opened
11/1/2011	9:24:26 AM	Bubbler valve opened
11/1/2011	9:24:26 AM	Helium MFC set to  0.000000
11/1/2011	9:24:26 AM	H2 MFC set to  500.000000
11/1/2011	9:24:26 AM	BCl3 MFC set to  0.000000
11/1/2011	9:24:26 AM	PHl3 MFC set to  0.000000
11/1/2011	9:24:26 AM	SiCl4 MFC set to  0.000000
11/1/2011	9:24:26 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:24:26 AM	Tube furnace set to 750
11/1/2011	9:29:26 AM	H2 valve closed
11/1/2011	9:29:26 AM	BCl3 valve closed
11/1/2011	9:29:26 AM	PH3 valve closed
11/1/2011	9:29:26 AM	SiCl4 pre valve closed
11/1/2011	9:29:26 AM	SiCl4 post valve closed
11/1/2011	9:29:26 AM	Main Vac valve closed
11/1/2011	9:29:26 AM	Bypass valve closed
11/1/2011	9:29:26 AM	Helium valve opened
11/1/2011	9:29:26 AM	Bubbler valve opened
11/1/2011	9:29:26 AM	Helium MFC set to  500.000000
11/1/2011	9:29:26 AM	H2 MFC set to  0.000000
11/1/2011	9:29:26 AM	BCl3 MFC set to  0.000000
11/1/2011	9:29:26 AM	PHl3 MFC set to  0.000000
11/1/2011	9:29:26 AM	SiCl4 MFC set to  0.000000
11/1/2011	9:29:26 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:29:26 AM	Tube furnace set to 0
11/1/2011	9:35:40 AM	Helium valve closed
11/1/2011	9:35:40 AM	H2 valve closed
11/1/2011	9:35:40 AM	BCl3 valve closed
11/1/2011	9:35:40 AM	PH3 valve closed
11/1/2011	9:35:40 AM	SiCl4 pre valve closed
11/1/2011	9:35:40 AM	SiCl4 post valve closed
11/1/2011	9:35:40 AM	Main Vac valve closed
11/1/2011	9:35:40 AM	Bypass valve closed
11/1/2011	9:35:40 AM	Bubbler valve closed
11/1/2011	9:35:40 AM	Helium MFC set to  0.000000
11/1/2011	9:35:40 AM	H2 MFC set to  0.000000
11/1/2011	9:35:40 AM	BCl3 MFC set to  0.000000
11/1/2011	9:35:40 AM	PHl3 MFC set to  0.000000
11/1/2011	9:35:40 AM	SiCl4 MFC set to  0.000000
11/1/2011	9:35:40 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:35:40 AM	Tube furnace set to 0
11/1/2011	9:35:41 AM	Run finished at 9:35 AM
11/1/2011	9:35:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	9:35:44 AM	Recipe started at 9:35 AM
11/1/2011	9:35:44 AM	Helium valve closed
11/1/2011	9:35:44 AM	H2 valve closed
11/1/2011	9:35:44 AM	BCl3 valve closed
11/1/2011	9:35:44 AM	PH3 valve closed
11/1/2011	9:35:44 AM	SiCl4 pre valve closed
11/1/2011	9:35:44 AM	SiCl4 post valve closed
11/1/2011	9:35:44 AM	Main Vac valve closed
11/1/2011	9:35:44 AM	Bypass valve closed
11/1/2011	9:35:44 AM	Bubbler valve closed
11/1/2011	9:35:44 AM	Helium MFC set to  0.000000
11/1/2011	9:35:44 AM	H2 MFC set to  0.000000
11/1/2011	9:35:44 AM	BCl3 MFC set to  0.000000
11/1/2011	9:35:44 AM	PHl3 MFC set to  0.000000
11/1/2011	9:35:44 AM	SiCl4 MFC set to  0.000000
11/1/2011	9:35:44 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:35:44 AM	Tube furnace set to 0
11/1/2011	9:35:47 AM	H2 valve closed
11/1/2011	9:35:47 AM	BCl3 valve closed
11/1/2011	9:35:47 AM	PH3 valve closed
11/1/2011	9:35:47 AM	SiCl4 pre valve closed
11/1/2011	9:35:47 AM	SiCl4 post valve closed
11/1/2011	9:35:47 AM	Main Vac valve closed
11/1/2011	9:35:47 AM	Bypass valve closed
11/1/2011	9:35:47 AM	Bubbler valve closed
11/1/2011	9:35:47 AM	Helium valve opened
11/1/2011	9:35:47 AM	Helium MFC set to  500.000000
11/1/2011	9:35:47 AM	H2 MFC set to  0.000000
11/1/2011	9:35:47 AM	BCl3 MFC set to  0.000000
11/1/2011	9:35:47 AM	PHl3 MFC set to  0.000000
11/1/2011	9:35:47 AM	SiCl4 MFC set to  0.000000
11/1/2011	9:35:47 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:35:48 AM	Tube furnace set to 0
11/1/2011	9:35:48 AM	Helium valve closed
11/1/2011	9:35:48 AM	H2 valve closed
11/1/2011	9:35:48 AM	BCl3 valve closed
11/1/2011	9:35:48 AM	PH3 valve closed
11/1/2011	9:35:48 AM	SiCl4 pre valve closed
11/1/2011	9:35:48 AM	SiCl4 post valve closed
11/1/2011	9:35:48 AM	Main Vac valve closed
11/1/2011	9:35:48 AM	Bypass valve closed
11/1/2011	9:35:48 AM	Bubbler valve closed
11/1/2011	9:35:48 AM	Helium MFC set to  0.000000
11/1/2011	9:35:48 AM	H2 MFC set to  0.000000
11/1/2011	9:35:48 AM	BCl3 MFC set to  0.000000
11/1/2011	9:35:48 AM	PHl3 MFC set to  0.000000
11/1/2011	9:35:48 AM	SiCl4 MFC set to  0.000000
11/1/2011	9:35:48 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:35:48 AM	Tube furnace set to 0
11/1/2011	9:35:49 AM	Run finished at 9:35 AM
11/1/2011	9:35:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	9:39:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	9:39:23 AM	Recipe started at 9:39 AM
11/1/2011	9:39:23 AM	Helium valve closed
11/1/2011	9:39:23 AM	H2 valve closed
11/1/2011	9:39:23 AM	BCl3 valve closed
11/1/2011	9:39:23 AM	PH3 valve closed
11/1/2011	9:39:23 AM	SiCl4 pre valve closed
11/1/2011	9:39:23 AM	SiCl4 post valve closed
11/1/2011	9:39:23 AM	Main Vac valve closed
11/1/2011	9:39:23 AM	Bubbler valve closed
11/1/2011	9:39:23 AM	Bypass valve opened
11/1/2011	9:39:23 AM	Helium MFC set to  0.000000
11/1/2011	9:39:23 AM	H2 MFC set to  0.000000
11/1/2011	9:39:23 AM	BCl3 MFC set to  0.000000
11/1/2011	9:39:23 AM	PHl3 MFC set to  0.000000
11/1/2011	9:39:23 AM	SiCl4 MFC set to  0.000000
11/1/2011	9:39:23 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:39:23 AM	Tube furnace set to 0
11/1/2011	9:40:24 AM	Helium valve closed
11/1/2011	9:40:24 AM	H2 valve closed
11/1/2011	9:40:24 AM	BCl3 valve closed
11/1/2011	9:40:24 AM	PH3 valve closed
11/1/2011	9:40:24 AM	SiCl4 pre valve closed
11/1/2011	9:40:24 AM	SiCl4 post valve closed
11/1/2011	9:40:24 AM	Main Vac valve closed
11/1/2011	9:40:24 AM	Bubbler valve closed
11/1/2011	9:40:24 AM	Bypass valve opened
11/1/2011	9:40:24 AM	Helium MFC set to  0.000000
11/1/2011	9:40:24 AM	H2 MFC set to  0.000000
11/1/2011	9:40:24 AM	BCl3 MFC set to  0.000000
11/1/2011	9:40:24 AM	PHl3 MFC set to  0.000000
11/1/2011	9:40:24 AM	SiCl4 MFC set to  0.000000
11/1/2011	9:40:24 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:40:24 AM	Tube furnace set to 0
11/1/2011	9:41:24 AM	Helium valve closed
11/1/2011	9:41:24 AM	H2 valve closed
11/1/2011	9:41:24 AM	BCl3 valve closed
11/1/2011	9:41:24 AM	PH3 valve closed
11/1/2011	9:41:24 AM	SiCl4 pre valve closed
11/1/2011	9:41:24 AM	SiCl4 post valve closed
11/1/2011	9:41:24 AM	Bypass valve closed
11/1/2011	9:41:24 AM	Bubbler valve closed
11/1/2011	9:41:24 AM	Main Vac valve opened
11/1/2011	9:41:24 AM	Helium MFC set to  0.000000
11/1/2011	9:41:24 AM	H2 MFC set to  0.000000
11/1/2011	9:41:24 AM	BCl3 MFC set to  0.000000
11/1/2011	9:41:24 AM	PHl3 MFC set to  0.000000
11/1/2011	9:41:24 AM	SiCl4 MFC set to  0.000000
11/1/2011	9:41:24 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:41:25 AM	Tube furnace set to 0
11/1/2011	9:41:26 AM	Run finished at 9:41 AM
11/1/2011	9:41:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	10:08:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	10:08:53 AM	Recipe started at 10:08 AM
11/1/2011	10:08:53 AM	Helium valve closed
11/1/2011	10:08:53 AM	H2 valve closed
11/1/2011	10:08:53 AM	BCl3 valve closed
11/1/2011	10:08:53 AM	PH3 valve closed
11/1/2011	10:08:53 AM	SiCl4 pre valve closed
11/1/2011	10:08:53 AM	SiCl4 post valve closed
11/1/2011	10:08:53 AM	Main Vac valve closed
11/1/2011	10:08:53 AM	Bypass valve closed
11/1/2011	10:08:53 AM	Bubbler valve closed
11/1/2011	10:08:53 AM	Helium MFC set to  0.000000
11/1/2011	10:08:53 AM	H2 MFC set to  0.000000
11/1/2011	10:08:53 AM	BCl3 MFC set to  0.000000
11/1/2011	10:08:53 AM	PHl3 MFC set to  0.000000
11/1/2011	10:08:53 AM	SiCl4 MFC set to  0.000000
11/1/2011	10:08:53 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:08:54 AM	Tube furnace set to 0
11/1/2011	10:08:57 AM	H2 valve closed
11/1/2011	10:08:57 AM	BCl3 valve closed
11/1/2011	10:08:57 AM	PH3 valve closed
11/1/2011	10:08:57 AM	SiCl4 pre valve closed
11/1/2011	10:08:57 AM	SiCl4 post valve closed
11/1/2011	10:08:57 AM	Main Vac valve closed
11/1/2011	10:08:57 AM	Bypass valve closed
11/1/2011	10:08:57 AM	Bubbler valve closed
11/1/2011	10:08:57 AM	Helium valve opened
11/1/2011	10:08:57 AM	Helium MFC set to  500.000000
11/1/2011	10:08:57 AM	H2 MFC set to  0.000000
11/1/2011	10:08:57 AM	BCl3 MFC set to  0.000000
11/1/2011	10:08:57 AM	PHl3 MFC set to  0.000000
11/1/2011	10:08:57 AM	SiCl4 MFC set to  0.000000
11/1/2011	10:08:57 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:08:57 AM	Tube furnace set to 0
11/1/2011	10:10:02 AM	Helium valve closed
11/1/2011	10:10:02 AM	H2 valve closed
11/1/2011	10:10:02 AM	BCl3 valve closed
11/1/2011	10:10:02 AM	PH3 valve closed
11/1/2011	10:10:02 AM	SiCl4 pre valve closed
11/1/2011	10:10:02 AM	SiCl4 post valve closed
11/1/2011	10:10:02 AM	Main Vac valve closed
11/1/2011	10:10:02 AM	Bypass valve closed
11/1/2011	10:10:02 AM	Bubbler valve closed
11/1/2011	10:10:02 AM	Helium MFC set to  0.000000
11/1/2011	10:10:02 AM	H2 MFC set to  0.000000
11/1/2011	10:10:02 AM	BCl3 MFC set to  0.000000
11/1/2011	10:10:02 AM	PHl3 MFC set to  0.000000
11/1/2011	10:10:02 AM	SiCl4 MFC set to  0.000000
11/1/2011	10:10:02 AM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:10:02 AM	Tube furnace set to 0
11/1/2011	10:10:03 AM	Run finished at 10:10 AM
11/1/2011	10:10:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	11:09:11 AM	Helium valve closed
11/1/2011	11:09:11 AM	H2 valve closed
11/1/2011	11:09:11 AM	BCl3 valve closed
11/1/2011	11:09:11 AM	PH3 valve closed
11/1/2011	11:09:11 AM	SiCl4 pre valve closed
11/1/2011	11:09:11 AM	SiCl4 post valve closed
11/1/2011	11:09:11 AM	Main Vac valve closed
11/1/2011	11:09:11 AM	Bubbler valve closed
11/1/2011	11:09:11 AM	Bypass valve closed
11/1/2011	11:09:11 AM	Helium MFC set to  0.000000
11/1/2011	11:09:11 AM	H2 MFC set to  0.000000
11/1/2011	11:09:11 AM	BCl3 MFC set to  0.000000
11/1/2011	11:09:11 AM	PHl3 MFC set to  0.000000
11/1/2011	11:09:11 AM	SiCl4 MFC set to  0.000000
11/1/2011	11:09:11 AM	Bypass solenoid MFC set to  760.000000
11/1/2011	11:09:11 AM	Tube furnace set to 0
11/1/2011	11:09:11 AM	Baratron reads 976.108766 Torr.  Emergency exit.
11/1/2011	11:51:37 AM	Program exited cleanly
11/1/2011	11:51:39 AM	Program started normally
11/1/2011	11:51:40 AM	Helium valve closed
11/1/2011	11:51:40 AM	H2 valve closed
11/1/2011	11:51:40 AM	BCl3 valve closed
11/1/2011	11:51:40 AM	PH3 valve closed
11/1/2011	11:51:40 AM	SiCl4 pre valve closed
11/1/2011	11:51:40 AM	SiCl4 post valve closed
11/1/2011	11:51:40 AM	Main Vac valve closed
11/1/2011	11:51:40 AM	Bypass valve closed
11/1/2011	11:51:40 AM	Bubbler valve closed
11/1/2011	11:51:40 AM	Helium MFC set to  0.000000
11/1/2011	11:51:40 AM	H2 MFC set to  0.000000
11/1/2011	11:51:40 AM	BCl3 MFC set to  0.000000
11/1/2011	11:51:40 AM	PHl3 MFC set to  0.000000
11/1/2011	11:51:40 AM	SiCl4 MFC set to  0.000000
11/1/2011	11:51:40 AM	Bypass solenoid MFC set to  760.000000
11/1/2011	11:51:40 AM	Tube furnace set to 0
11/1/2011	11:51:41 AM	Bypass valve opened
11/1/2011	11:52:51 AM	Bypass valve closed
11/1/2011	11:52:51 AM	Main Vac valve opened
11/1/2011	11:53:13 AM	Main Vac valve closed
11/1/2011	12:05:52 PM	Bypass valve opened
11/1/2011	12:09:25 PM	Bypass valve closed
11/1/2011	12:09:26 PM	Main Vac valve opened
11/1/2011	12:09:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	12:09:34 PM	Recipe started at 12:09 PM
11/1/2011	12:09:34 PM	Helium valve closed
11/1/2011	12:09:34 PM	H2 valve closed
11/1/2011	12:09:34 PM	BCl3 valve closed
11/1/2011	12:09:34 PM	PH3 valve closed
11/1/2011	12:09:34 PM	SiCl4 pre valve closed
11/1/2011	12:09:34 PM	SiCl4 post valve closed
11/1/2011	12:09:34 PM	Main Vac valve closed
11/1/2011	12:09:34 PM	Bypass valve closed
11/1/2011	12:09:34 PM	Bubbler valve closed
11/1/2011	12:09:34 PM	Helium MFC set to  0.000000
11/1/2011	12:09:34 PM	H2 MFC set to  0.000000
11/1/2011	12:09:34 PM	BCl3 MFC set to  0.000000
11/1/2011	12:09:34 PM	PHl3 MFC set to  0.000000
11/1/2011	12:09:34 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:09:34 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:09:34 PM	Tube furnace set to 0
11/1/2011	12:09:37 PM	H2 valve closed
11/1/2011	12:09:37 PM	BCl3 valve closed
11/1/2011	12:09:37 PM	PH3 valve closed
11/1/2011	12:09:37 PM	SiCl4 pre valve closed
11/1/2011	12:09:37 PM	SiCl4 post valve closed
11/1/2011	12:09:37 PM	Main Vac valve closed
11/1/2011	12:09:37 PM	Bypass valve closed
11/1/2011	12:09:37 PM	Bubbler valve closed
11/1/2011	12:09:37 PM	Helium valve opened
11/1/2011	12:09:37 PM	Helium MFC set to  500.000000
11/1/2011	12:09:37 PM	H2 MFC set to  0.000000
11/1/2011	12:09:37 PM	BCl3 MFC set to  0.000000
11/1/2011	12:09:37 PM	PHl3 MFC set to  0.000000
11/1/2011	12:09:37 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:09:37 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:09:38 PM	Tube furnace set to 0
11/1/2011	12:10:41 PM	Run aborted at 12:10 PM
11/1/2011	12:10:41 PM	Helium valve closed
11/1/2011	12:10:41 PM	H2 valve closed
11/1/2011	12:10:41 PM	BCl3 valve closed
11/1/2011	12:10:41 PM	PH3 valve closed
11/1/2011	12:10:41 PM	SiCl4 pre valve closed
11/1/2011	12:10:41 PM	SiCl4 post valve closed
11/1/2011	12:10:41 PM	Bypass valve closed
11/1/2011	12:10:41 PM	Main Vac valve closed
11/1/2011	12:10:41 PM	Bubbler valve closed
11/1/2011	12:10:41 PM	Helium MFC set to  0.000000
11/1/2011	12:10:41 PM	H2 MFC set to  0.000000
11/1/2011	12:10:41 PM	BCl3 MFC set to  0.000000
11/1/2011	12:10:41 PM	PHl3 MFC set to  0.000000
11/1/2011	12:10:41 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:10:41 PM	Tube furnace set to 0
11/1/2011	12:10:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	12:10:45 PM	Tube furnace set to 100
11/1/2011	12:10:46 PM	Bypass valve opened
11/1/2011	12:12:02 PM	Bypass valve closed
11/1/2011	12:12:03 PM	Main Vac valve opened
11/1/2011	12:17:51 PM	Main Vac valve closed
11/1/2011	12:17:57 PM	Main Vac valve opened
11/1/2011	12:18:19 PM	Recipe started at 12:18 PM
11/1/2011	12:18:19 PM	Helium valve closed
11/1/2011	12:18:19 PM	H2 valve closed
11/1/2011	12:18:19 PM	BCl3 valve closed
11/1/2011	12:18:19 PM	PH3 valve closed
11/1/2011	12:18:19 PM	SiCl4 pre valve closed
11/1/2011	12:18:19 PM	SiCl4 post valve closed
11/1/2011	12:18:19 PM	Bypass valve closed
11/1/2011	12:18:19 PM	Bubbler valve closed
11/1/2011	12:18:19 PM	Main Vac valve opened
11/1/2011	12:18:19 PM	Helium MFC set to  0.000000
11/1/2011	12:18:19 PM	H2 MFC set to  0.000000
11/1/2011	12:18:19 PM	BCl3 MFC set to  0.000000
11/1/2011	12:18:19 PM	PHl3 MFC set to  0.000000
11/1/2011	12:18:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:18:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:18:19 PM	Tube furnace set to 150
11/1/2011	12:18:25 PM	H2 valve closed
11/1/2011	12:18:25 PM	BCl3 valve closed
11/1/2011	12:18:25 PM	PH3 valve closed
11/1/2011	12:18:25 PM	SiCl4 pre valve closed
11/1/2011	12:18:25 PM	SiCl4 post valve closed
11/1/2011	12:18:25 PM	Bypass valve closed
11/1/2011	12:18:25 PM	Bubbler valve closed
11/1/2011	12:18:25 PM	Helium valve opened
11/1/2011	12:18:25 PM	Main Vac valve opened
11/1/2011	12:18:25 PM	Helium MFC set to  20.000000
11/1/2011	12:18:25 PM	H2 MFC set to  0.000000
11/1/2011	12:18:25 PM	BCl3 MFC set to  0.000000
11/1/2011	12:18:25 PM	PHl3 MFC set to  0.000000
11/1/2011	12:18:25 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:18:25 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:18:26 PM	Tube furnace set to 150
11/1/2011	12:18:56 PM	Helium valve closed
11/1/2011	12:18:56 PM	H2 valve closed
11/1/2011	12:18:56 PM	BCl3 valve closed
11/1/2011	12:18:56 PM	PH3 valve closed
11/1/2011	12:18:56 PM	SiCl4 pre valve closed
11/1/2011	12:18:56 PM	SiCl4 post valve closed
11/1/2011	12:18:56 PM	Bypass valve closed
11/1/2011	12:18:56 PM	Bubbler valve closed
11/1/2011	12:18:56 PM	Main Vac valve opened
11/1/2011	12:18:56 PM	Helium MFC set to  0.000000
11/1/2011	12:18:56 PM	H2 MFC set to  0.000000
11/1/2011	12:18:56 PM	BCl3 MFC set to  0.000000
11/1/2011	12:18:56 PM	PHl3 MFC set to  0.000000
11/1/2011	12:18:56 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:18:56 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:18:56 PM	Tube furnace set to 150
11/1/2011	12:19:26 PM	H2 valve closed
11/1/2011	12:19:26 PM	BCl3 valve closed
11/1/2011	12:19:26 PM	PH3 valve closed
11/1/2011	12:19:26 PM	SiCl4 pre valve closed
11/1/2011	12:19:26 PM	SiCl4 post valve closed
11/1/2011	12:19:26 PM	Bypass valve closed
11/1/2011	12:19:26 PM	Bubbler valve closed
11/1/2011	12:19:26 PM	Helium valve opened
11/1/2011	12:19:26 PM	Main Vac valve opened
11/1/2011	12:19:26 PM	Helium MFC set to  20.000000
11/1/2011	12:19:26 PM	H2 MFC set to  0.000000
11/1/2011	12:19:26 PM	BCl3 MFC set to  0.000000
11/1/2011	12:19:26 PM	PHl3 MFC set to  0.000000
11/1/2011	12:19:26 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:19:26 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:19:26 PM	Tube furnace set to 150
11/1/2011	12:19:56 PM	Helium valve closed
11/1/2011	12:19:56 PM	H2 valve closed
11/1/2011	12:19:56 PM	BCl3 valve closed
11/1/2011	12:19:56 PM	PH3 valve closed
11/1/2011	12:19:56 PM	SiCl4 pre valve closed
11/1/2011	12:19:56 PM	SiCl4 post valve closed
11/1/2011	12:19:56 PM	Bypass valve closed
11/1/2011	12:19:56 PM	Bubbler valve closed
11/1/2011	12:19:56 PM	Main Vac valve opened
11/1/2011	12:19:56 PM	Helium MFC set to  0.000000
11/1/2011	12:19:56 PM	H2 MFC set to  0.000000
11/1/2011	12:19:56 PM	BCl3 MFC set to  0.000000
11/1/2011	12:19:56 PM	PHl3 MFC set to  0.000000
11/1/2011	12:19:56 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:19:56 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:19:56 PM	Tube furnace set to 150
11/1/2011	12:20:26 PM	H2 valve closed
11/1/2011	12:20:26 PM	BCl3 valve closed
11/1/2011	12:20:26 PM	PH3 valve closed
11/1/2011	12:20:26 PM	SiCl4 pre valve closed
11/1/2011	12:20:26 PM	SiCl4 post valve closed
11/1/2011	12:20:26 PM	Bypass valve closed
11/1/2011	12:20:26 PM	Bubbler valve closed
11/1/2011	12:20:26 PM	Helium valve opened
11/1/2011	12:20:26 PM	Main Vac valve opened
11/1/2011	12:20:26 PM	Helium MFC set to  20.000000
11/1/2011	12:20:26 PM	H2 MFC set to  0.000000
11/1/2011	12:20:26 PM	BCl3 MFC set to  0.000000
11/1/2011	12:20:26 PM	PHl3 MFC set to  0.000000
11/1/2011	12:20:26 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:20:26 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:20:26 PM	Tube furnace set to 150
11/1/2011	12:20:56 PM	Helium valve closed
11/1/2011	12:20:56 PM	H2 valve closed
11/1/2011	12:20:56 PM	BCl3 valve closed
11/1/2011	12:20:56 PM	PH3 valve closed
11/1/2011	12:20:56 PM	SiCl4 pre valve closed
11/1/2011	12:20:56 PM	SiCl4 post valve closed
11/1/2011	12:20:56 PM	Bypass valve closed
11/1/2011	12:20:56 PM	Bubbler valve closed
11/1/2011	12:20:56 PM	Main Vac valve opened
11/1/2011	12:20:56 PM	Helium MFC set to  0.000000
11/1/2011	12:20:56 PM	H2 MFC set to  0.000000
11/1/2011	12:20:56 PM	BCl3 MFC set to  0.000000
11/1/2011	12:20:56 PM	PHl3 MFC set to  0.000000
11/1/2011	12:20:56 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:20:56 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:20:56 PM	Tube furnace set to 150
11/1/2011	12:21:27 PM	H2 valve closed
11/1/2011	12:21:27 PM	BCl3 valve closed
11/1/2011	12:21:27 PM	PH3 valve closed
11/1/2011	12:21:27 PM	SiCl4 pre valve closed
11/1/2011	12:21:27 PM	SiCl4 post valve closed
11/1/2011	12:21:27 PM	Bypass valve closed
11/1/2011	12:21:27 PM	Bubbler valve closed
11/1/2011	12:21:27 PM	Helium valve opened
11/1/2011	12:21:27 PM	Main Vac valve opened
11/1/2011	12:21:27 PM	Helium MFC set to  20.000000
11/1/2011	12:21:27 PM	H2 MFC set to  0.000000
11/1/2011	12:21:27 PM	BCl3 MFC set to  0.000000
11/1/2011	12:21:27 PM	PHl3 MFC set to  0.000000
11/1/2011	12:21:27 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:21:27 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:21:27 PM	Tube furnace set to 150
11/1/2011	12:21:57 PM	Helium valve closed
11/1/2011	12:21:57 PM	H2 valve closed
11/1/2011	12:21:57 PM	BCl3 valve closed
11/1/2011	12:21:57 PM	PH3 valve closed
11/1/2011	12:21:57 PM	SiCl4 pre valve closed
11/1/2011	12:21:57 PM	SiCl4 post valve closed
11/1/2011	12:21:57 PM	Bypass valve closed
11/1/2011	12:21:57 PM	Bubbler valve closed
11/1/2011	12:21:57 PM	Main Vac valve opened
11/1/2011	12:21:57 PM	Helium MFC set to  0.000000
11/1/2011	12:21:57 PM	H2 MFC set to  0.000000
11/1/2011	12:21:57 PM	BCl3 MFC set to  0.000000
11/1/2011	12:21:57 PM	PHl3 MFC set to  0.000000
11/1/2011	12:21:57 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:21:57 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:21:57 PM	Tube furnace set to 150
11/1/2011	12:22:27 PM	H2 valve closed
11/1/2011	12:22:27 PM	BCl3 valve closed
11/1/2011	12:22:27 PM	PH3 valve closed
11/1/2011	12:22:27 PM	SiCl4 pre valve closed
11/1/2011	12:22:27 PM	SiCl4 post valve closed
11/1/2011	12:22:27 PM	Bypass valve closed
11/1/2011	12:22:27 PM	Bubbler valve closed
11/1/2011	12:22:27 PM	Helium valve opened
11/1/2011	12:22:27 PM	Main Vac valve opened
11/1/2011	12:22:27 PM	Helium MFC set to  20.000000
11/1/2011	12:22:27 PM	H2 MFC set to  0.000000
11/1/2011	12:22:27 PM	BCl3 MFC set to  0.000000
11/1/2011	12:22:27 PM	PHl3 MFC set to  0.000000
11/1/2011	12:22:27 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:22:27 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:22:27 PM	Tube furnace set to 150
11/1/2011	12:22:57 PM	Helium valve closed
11/1/2011	12:22:57 PM	H2 valve closed
11/1/2011	12:22:57 PM	BCl3 valve closed
11/1/2011	12:22:57 PM	PH3 valve closed
11/1/2011	12:22:57 PM	SiCl4 pre valve closed
11/1/2011	12:22:57 PM	SiCl4 post valve closed
11/1/2011	12:22:57 PM	Bypass valve closed
11/1/2011	12:22:57 PM	Bubbler valve closed
11/1/2011	12:22:57 PM	Main Vac valve opened
11/1/2011	12:22:57 PM	Helium MFC set to  0.000000
11/1/2011	12:22:57 PM	H2 MFC set to  0.000000
11/1/2011	12:22:57 PM	BCl3 MFC set to  0.000000
11/1/2011	12:22:57 PM	PHl3 MFC set to  0.000000
11/1/2011	12:22:57 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:22:57 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:22:57 PM	Tube furnace set to 150
11/1/2011	12:23:27 PM	H2 valve closed
11/1/2011	12:23:27 PM	BCl3 valve closed
11/1/2011	12:23:27 PM	PH3 valve closed
11/1/2011	12:23:27 PM	SiCl4 pre valve closed
11/1/2011	12:23:27 PM	SiCl4 post valve closed
11/1/2011	12:23:27 PM	Bypass valve closed
11/1/2011	12:23:27 PM	Bubbler valve closed
11/1/2011	12:23:27 PM	Helium valve opened
11/1/2011	12:23:27 PM	Main Vac valve opened
11/1/2011	12:23:27 PM	Helium MFC set to  20.000000
11/1/2011	12:23:27 PM	H2 MFC set to  0.000000
11/1/2011	12:23:27 PM	BCl3 MFC set to  0.000000
11/1/2011	12:23:27 PM	PHl3 MFC set to  0.000000
11/1/2011	12:23:27 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:23:27 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:23:27 PM	Tube furnace set to 150
11/1/2011	12:23:57 PM	Helium valve closed
11/1/2011	12:23:57 PM	H2 valve closed
11/1/2011	12:23:57 PM	BCl3 valve closed
11/1/2011	12:23:58 PM	PH3 valve closed
11/1/2011	12:23:58 PM	SiCl4 pre valve closed
11/1/2011	12:23:58 PM	SiCl4 post valve closed
11/1/2011	12:23:58 PM	Bypass valve closed
11/1/2011	12:23:58 PM	Bubbler valve closed
11/1/2011	12:23:58 PM	Main Vac valve opened
11/1/2011	12:23:58 PM	Helium MFC set to  0.000000
11/1/2011	12:23:58 PM	H2 MFC set to  0.000000
11/1/2011	12:23:58 PM	BCl3 MFC set to  0.000000
11/1/2011	12:23:58 PM	PHl3 MFC set to  0.000000
11/1/2011	12:23:58 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:23:58 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:23:58 PM	Tube furnace set to 150
11/1/2011	12:24:28 PM	H2 valve closed
11/1/2011	12:24:28 PM	BCl3 valve closed
11/1/2011	12:24:28 PM	PH3 valve closed
11/1/2011	12:24:28 PM	SiCl4 pre valve closed
11/1/2011	12:24:28 PM	SiCl4 post valve closed
11/1/2011	12:24:28 PM	Bypass valve closed
11/1/2011	12:24:28 PM	Bubbler valve closed
11/1/2011	12:24:28 PM	Helium valve opened
11/1/2011	12:24:28 PM	Main Vac valve opened
11/1/2011	12:24:28 PM	Helium MFC set to  20.000000
11/1/2011	12:24:28 PM	H2 MFC set to  0.000000
11/1/2011	12:24:28 PM	BCl3 MFC set to  0.000000
11/1/2011	12:24:28 PM	PHl3 MFC set to  0.000000
11/1/2011	12:24:28 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:24:28 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:24:28 PM	Tube furnace set to 150
11/1/2011	12:24:58 PM	Helium valve closed
11/1/2011	12:24:58 PM	H2 valve closed
11/1/2011	12:24:58 PM	BCl3 valve closed
11/1/2011	12:24:58 PM	PH3 valve closed
11/1/2011	12:24:58 PM	SiCl4 pre valve closed
11/1/2011	12:24:58 PM	SiCl4 post valve closed
11/1/2011	12:24:58 PM	Bypass valve closed
11/1/2011	12:24:58 PM	Bubbler valve closed
11/1/2011	12:24:58 PM	Main Vac valve opened
11/1/2011	12:24:58 PM	Helium MFC set to  0.000000
11/1/2011	12:24:58 PM	H2 MFC set to  0.000000
11/1/2011	12:24:58 PM	BCl3 MFC set to  0.000000
11/1/2011	12:24:58 PM	PHl3 MFC set to  0.000000
11/1/2011	12:24:58 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:24:58 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:24:58 PM	Tube furnace set to 150
11/1/2011	12:25:28 PM	H2 valve closed
11/1/2011	12:25:28 PM	BCl3 valve closed
11/1/2011	12:25:28 PM	PH3 valve closed
11/1/2011	12:25:28 PM	SiCl4 pre valve closed
11/1/2011	12:25:28 PM	SiCl4 post valve closed
11/1/2011	12:25:28 PM	Bypass valve closed
11/1/2011	12:25:28 PM	Bubbler valve closed
11/1/2011	12:25:28 PM	Helium valve opened
11/1/2011	12:25:28 PM	Main Vac valve opened
11/1/2011	12:25:28 PM	Helium MFC set to  20.000000
11/1/2011	12:25:28 PM	H2 MFC set to  0.000000
11/1/2011	12:25:28 PM	BCl3 MFC set to  0.000000
11/1/2011	12:25:28 PM	PHl3 MFC set to  0.000000
11/1/2011	12:25:28 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:25:28 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:25:28 PM	Tube furnace set to 150
11/1/2011	12:25:58 PM	Helium valve closed
11/1/2011	12:25:58 PM	H2 valve closed
11/1/2011	12:25:58 PM	BCl3 valve closed
11/1/2011	12:25:58 PM	PH3 valve closed
11/1/2011	12:25:58 PM	SiCl4 pre valve closed
11/1/2011	12:25:58 PM	SiCl4 post valve closed
11/1/2011	12:25:58 PM	Bypass valve closed
11/1/2011	12:25:58 PM	Bubbler valve closed
11/1/2011	12:25:58 PM	Main Vac valve opened
11/1/2011	12:25:58 PM	Helium MFC set to  0.000000
11/1/2011	12:25:58 PM	H2 MFC set to  0.000000
11/1/2011	12:25:58 PM	BCl3 MFC set to  0.000000
11/1/2011	12:25:58 PM	PHl3 MFC set to  0.000000
11/1/2011	12:25:58 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:25:58 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:25:58 PM	Tube furnace set to 150
11/1/2011	12:26:28 PM	H2 valve closed
11/1/2011	12:26:28 PM	BCl3 valve closed
11/1/2011	12:26:28 PM	PH3 valve closed
11/1/2011	12:26:28 PM	SiCl4 pre valve closed
11/1/2011	12:26:28 PM	SiCl4 post valve closed
11/1/2011	12:26:28 PM	Bypass valve closed
11/1/2011	12:26:28 PM	Bubbler valve closed
11/1/2011	12:26:28 PM	Helium valve opened
11/1/2011	12:26:28 PM	Main Vac valve opened
11/1/2011	12:26:28 PM	Helium MFC set to  20.000000
11/1/2011	12:26:28 PM	H2 MFC set to  0.000000
11/1/2011	12:26:28 PM	BCl3 MFC set to  0.000000
11/1/2011	12:26:28 PM	PHl3 MFC set to  0.000000
11/1/2011	12:26:28 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:26:28 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:26:29 PM	Tube furnace set to 150
11/1/2011	12:26:59 PM	Helium valve closed
11/1/2011	12:26:59 PM	H2 valve closed
11/1/2011	12:26:59 PM	BCl3 valve closed
11/1/2011	12:26:59 PM	PH3 valve closed
11/1/2011	12:26:59 PM	SiCl4 pre valve closed
11/1/2011	12:26:59 PM	SiCl4 post valve closed
11/1/2011	12:26:59 PM	Bypass valve closed
11/1/2011	12:26:59 PM	Bubbler valve closed
11/1/2011	12:26:59 PM	Main Vac valve opened
11/1/2011	12:26:59 PM	Helium MFC set to  0.000000
11/1/2011	12:26:59 PM	H2 MFC set to  0.000000
11/1/2011	12:26:59 PM	BCl3 MFC set to  0.000000
11/1/2011	12:26:59 PM	PHl3 MFC set to  0.000000
11/1/2011	12:26:59 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:26:59 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:26:59 PM	Tube furnace set to 150
11/1/2011	12:27:29 PM	H2 valve closed
11/1/2011	12:27:29 PM	BCl3 valve closed
11/1/2011	12:27:29 PM	PH3 valve closed
11/1/2011	12:27:29 PM	SiCl4 pre valve closed
11/1/2011	12:27:29 PM	SiCl4 post valve closed
11/1/2011	12:27:29 PM	Bypass valve closed
11/1/2011	12:27:29 PM	Bubbler valve closed
11/1/2011	12:27:29 PM	Helium valve opened
11/1/2011	12:27:29 PM	Main Vac valve opened
11/1/2011	12:27:29 PM	Helium MFC set to  20.000000
11/1/2011	12:27:29 PM	H2 MFC set to  0.000000
11/1/2011	12:27:29 PM	BCl3 MFC set to  0.000000
11/1/2011	12:27:29 PM	PHl3 MFC set to  0.000000
11/1/2011	12:27:29 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:27:29 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:27:29 PM	Tube furnace set to 150
11/1/2011	12:27:59 PM	Helium valve closed
11/1/2011	12:27:59 PM	H2 valve closed
11/1/2011	12:27:59 PM	BCl3 valve closed
11/1/2011	12:27:59 PM	PH3 valve closed
11/1/2011	12:27:59 PM	SiCl4 pre valve closed
11/1/2011	12:27:59 PM	SiCl4 post valve closed
11/1/2011	12:27:59 PM	Bypass valve closed
11/1/2011	12:27:59 PM	Bubbler valve closed
11/1/2011	12:27:59 PM	Main Vac valve opened
11/1/2011	12:27:59 PM	Helium MFC set to  0.000000
11/1/2011	12:27:59 PM	H2 MFC set to  0.000000
11/1/2011	12:27:59 PM	BCl3 MFC set to  0.000000
11/1/2011	12:27:59 PM	PHl3 MFC set to  0.000000
11/1/2011	12:27:59 PM	SiCl4 MFC set to  0.000000
11/1/2011	12:27:59 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	12:27:59 PM	Tube furnace set to 150
11/1/2011	12:28:00 PM	Run finished at 12:28 PM
11/1/2011	1:18:08 PM	Main Vac valve closed
11/1/2011	1:18:16 PM	Main Vac valve opened
11/1/2011	1:22:21 PM	Recipe started at 1:22 PM
11/1/2011	1:22:21 PM	Helium valve closed
11/1/2011	1:22:21 PM	H2 valve closed
11/1/2011	1:22:21 PM	BCl3 valve closed
11/1/2011	1:22:21 PM	PH3 valve closed
11/1/2011	1:22:21 PM	SiCl4 pre valve closed
11/1/2011	1:22:21 PM	SiCl4 post valve closed
11/1/2011	1:22:21 PM	Main Vac valve closed
11/1/2011	1:22:21 PM	Bypass valve closed
11/1/2011	1:22:21 PM	Bubbler valve closed
11/1/2011	1:22:21 PM	Helium MFC set to  0.000000
11/1/2011	1:22:21 PM	H2 MFC set to  0.000000
11/1/2011	1:22:21 PM	BCl3 MFC set to  0.000000
11/1/2011	1:22:21 PM	PHl3 MFC set to  0.000000
11/1/2011	1:22:21 PM	SiCl4 MFC set to  0.000000
11/1/2011	1:22:21 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	1:22:21 PM	Tube furnace set to 0
11/1/2011	1:22:24 PM	Helium valve closed
11/1/2011	1:22:24 PM	BCl3 valve closed
11/1/2011	1:22:24 PM	PH3 valve closed
11/1/2011	1:22:24 PM	SiCl4 pre valve closed
11/1/2011	1:22:24 PM	SiCl4 post valve closed
11/1/2011	1:22:24 PM	Main Vac valve closed
11/1/2011	1:22:24 PM	Bypass valve closed
11/1/2011	1:22:24 PM	Bubbler valve closed
11/1/2011	1:22:24 PM	H2 valve opened
11/1/2011	1:22:24 PM	Helium MFC set to  0.000000
11/1/2011	1:22:24 PM	H2 MFC set to  500.000000
11/1/2011	1:22:24 PM	BCl3 MFC set to  0.000000
11/1/2011	1:22:24 PM	PHl3 MFC set to  0.000000
11/1/2011	1:22:24 PM	SiCl4 MFC set to  0.000000
11/1/2011	1:22:24 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	1:22:25 PM	Tube furnace set to 0
11/1/2011	1:23:28 PM	Helium valve closed
11/1/2011	1:23:28 PM	BCl3 valve closed
11/1/2011	1:23:28 PM	PH3 valve closed
11/1/2011	1:23:28 PM	SiCl4 pre valve closed
11/1/2011	1:23:28 PM	SiCl4 post valve closed
11/1/2011	1:23:28 PM	Main Vac valve closed
11/1/2011	1:23:28 PM	Bypass valve closed
11/1/2011	1:23:28 PM	H2 valve opened
11/1/2011	1:23:28 PM	Bubbler valve opened
11/1/2011	1:23:28 PM	Helium MFC set to  0.000000
11/1/2011	1:23:28 PM	H2 MFC set to  500.000000
11/1/2011	1:23:28 PM	BCl3 MFC set to  0.000000
11/1/2011	1:23:28 PM	PHl3 MFC set to  0.000000
11/1/2011	1:23:28 PM	SiCl4 MFC set to  0.000000
11/1/2011	1:23:28 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	1:23:28 PM	Tube furnace set to 0
11/1/2011	1:23:29 PM	Helium valve closed
11/1/2011	1:23:29 PM	BCl3 valve closed
11/1/2011	1:23:29 PM	PH3 valve closed
11/1/2011	1:23:29 PM	SiCl4 pre valve closed
11/1/2011	1:23:29 PM	SiCl4 post valve closed
11/1/2011	1:23:29 PM	Main Vac valve closed
11/1/2011	1:23:29 PM	Bypass valve closed
11/1/2011	1:23:29 PM	H2 valve opened
11/1/2011	1:23:29 PM	Bubbler valve opened
11/1/2011	1:23:29 PM	Helium MFC set to  0.000000
11/1/2011	1:23:29 PM	H2 MFC set to  500.000000
11/1/2011	1:23:29 PM	BCl3 MFC set to  0.000000
11/1/2011	1:23:29 PM	PHl3 MFC set to  0.000000
11/1/2011	1:23:29 PM	SiCl4 MFC set to  0.000000
11/1/2011	1:23:29 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	1:23:30 PM	Tube furnace set to 1030
11/1/2011	1:43:29 PM	Helium valve closed
11/1/2011	1:43:29 PM	PH3 valve closed
11/1/2011	1:43:29 PM	Main Vac valve closed
11/1/2011	1:43:29 PM	Bypass valve closed
11/1/2011	1:43:29 PM	H2 valve opened
11/1/2011	1:43:29 PM	BCl3 valve opened
11/1/2011	1:43:29 PM	SiCl4 pre valve opened
11/1/2011	1:43:29 PM	SiCl4 post valve opened
11/1/2011	1:43:29 PM	Bubbler valve opened
11/1/2011	1:43:29 PM	Helium MFC set to  0.000000
11/1/2011	1:43:29 PM	H2 MFC set to  500.000000
11/1/2011	1:43:29 PM	BCl3 MFC set to  2.200000
11/1/2011	1:43:29 PM	PHl3 MFC set to  0.000000
11/1/2011	1:43:30 PM	SiCl4 MFC set to  50.000000
11/1/2011	1:43:30 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	1:43:30 PM	Tube furnace set to 1030
11/1/2011	2:03:30 PM	Helium valve closed
11/1/2011	2:03:30 PM	BCl3 valve closed
11/1/2011	2:03:30 PM	PH3 valve closed
11/1/2011	2:03:30 PM	SiCl4 pre valve closed
11/1/2011	2:03:30 PM	SiCl4 post valve closed
11/1/2011	2:03:30 PM	Main Vac valve closed
11/1/2011	2:03:30 PM	Bypass valve closed
11/1/2011	2:03:30 PM	H2 valve opened
11/1/2011	2:03:30 PM	Bubbler valve opened
11/1/2011	2:03:30 PM	Helium MFC set to  0.000000
11/1/2011	2:03:30 PM	H2 MFC set to  500.000000
11/1/2011	2:03:30 PM	BCl3 MFC set to  0.000000
11/1/2011	2:03:30 PM	PHl3 MFC set to  0.000000
11/1/2011	2:03:30 PM	SiCl4 MFC set to  0.000000
11/1/2011	2:03:30 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	2:03:30 PM	Tube furnace set to 950
11/1/2011	2:08:30 PM	Helium valve closed
11/1/2011	2:08:30 PM	BCl3 valve closed
11/1/2011	2:08:30 PM	PH3 valve closed
11/1/2011	2:08:30 PM	SiCl4 pre valve closed
11/1/2011	2:08:30 PM	SiCl4 post valve closed
11/1/2011	2:08:30 PM	Main Vac valve closed
11/1/2011	2:08:30 PM	Bypass valve closed
11/1/2011	2:08:30 PM	H2 valve opened
11/1/2011	2:08:30 PM	Bubbler valve opened
11/1/2011	2:08:30 PM	Helium MFC set to  0.000000
11/1/2011	2:08:30 PM	H2 MFC set to  500.000000
11/1/2011	2:08:30 PM	BCl3 MFC set to  0.000000
11/1/2011	2:08:30 PM	PHl3 MFC set to  0.000000
11/1/2011	2:08:30 PM	SiCl4 MFC set to  0.000000
11/1/2011	2:08:30 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	2:08:30 PM	Tube furnace set to 900
11/1/2011	2:11:30 PM	Helium valve closed
11/1/2011	2:11:30 PM	BCl3 valve closed
11/1/2011	2:11:30 PM	PH3 valve closed
11/1/2011	2:11:30 PM	SiCl4 pre valve closed
11/1/2011	2:11:30 PM	SiCl4 post valve closed
11/1/2011	2:11:30 PM	Main Vac valve closed
11/1/2011	2:11:30 PM	Bypass valve closed
11/1/2011	2:11:30 PM	H2 valve opened
11/1/2011	2:11:30 PM	Bubbler valve opened
11/1/2011	2:11:30 PM	Helium MFC set to  0.000000
11/1/2011	2:11:30 PM	H2 MFC set to  500.000000
11/1/2011	2:11:30 PM	BCl3 MFC set to  0.000000
11/1/2011	2:11:30 PM	PHl3 MFC set to  0.000000
11/1/2011	2:11:30 PM	SiCl4 MFC set to  0.000000
11/1/2011	2:11:30 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	2:11:30 PM	Tube furnace set to 850
11/1/2011	2:14:30 PM	Helium valve closed
11/1/2011	2:14:30 PM	BCl3 valve closed
11/1/2011	2:14:30 PM	PH3 valve closed
11/1/2011	2:14:30 PM	SiCl4 pre valve closed
11/1/2011	2:14:30 PM	SiCl4 post valve closed
11/1/2011	2:14:30 PM	Main Vac valve closed
11/1/2011	2:14:30 PM	Bypass valve closed
11/1/2011	2:14:30 PM	H2 valve opened
11/1/2011	2:14:30 PM	Bubbler valve opened
11/1/2011	2:14:30 PM	Helium MFC set to  0.000000
11/1/2011	2:14:30 PM	H2 MFC set to  500.000000
11/1/2011	2:14:30 PM	BCl3 MFC set to  0.000000
11/1/2011	2:14:30 PM	PHl3 MFC set to  0.000000
11/1/2011	2:14:30 PM	SiCl4 MFC set to  0.000000
11/1/2011	2:14:30 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	2:14:30 PM	Tube furnace set to 800
11/1/2011	2:17:30 PM	Helium valve closed
11/1/2011	2:17:30 PM	BCl3 valve closed
11/1/2011	2:17:30 PM	PH3 valve closed
11/1/2011	2:17:30 PM	SiCl4 pre valve closed
11/1/2011	2:17:30 PM	SiCl4 post valve closed
11/1/2011	2:17:30 PM	Main Vac valve closed
11/1/2011	2:17:30 PM	Bypass valve closed
11/1/2011	2:17:30 PM	H2 valve opened
11/1/2011	2:17:30 PM	Bubbler valve opened
11/1/2011	2:17:30 PM	Helium MFC set to  0.000000
11/1/2011	2:17:30 PM	H2 MFC set to  500.000000
11/1/2011	2:17:30 PM	BCl3 MFC set to  0.000000
11/1/2011	2:17:30 PM	PHl3 MFC set to  0.000000
11/1/2011	2:17:30 PM	SiCl4 MFC set to  0.000000
11/1/2011	2:17:30 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	2:17:31 PM	Tube furnace set to 750
11/1/2011	2:20:31 PM	H2 valve closed
11/1/2011	2:20:31 PM	BCl3 valve closed
11/1/2011	2:20:31 PM	PH3 valve closed
11/1/2011	2:20:31 PM	SiCl4 pre valve closed
11/1/2011	2:20:31 PM	SiCl4 post valve closed
11/1/2011	2:20:31 PM	Main Vac valve closed
11/1/2011	2:20:31 PM	Bypass valve closed
11/1/2011	2:20:31 PM	Helium valve opened
11/1/2011	2:20:31 PM	Bubbler valve opened
11/1/2011	2:20:31 PM	Helium MFC set to  500.000000
11/1/2011	2:20:31 PM	H2 MFC set to  0.000000
11/1/2011	2:20:31 PM	BCl3 MFC set to  0.000000
11/1/2011	2:20:31 PM	PHl3 MFC set to  0.000000
11/1/2011	2:20:31 PM	SiCl4 MFC set to  0.000000
11/1/2011	2:20:31 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	2:20:31 PM	Tube furnace set to 0
11/1/2011	2:40:31 PM	Helium valve closed
11/1/2011	2:40:31 PM	H2 valve closed
11/1/2011	2:40:31 PM	BCl3 valve closed
11/1/2011	2:40:31 PM	PH3 valve closed
11/1/2011	2:40:31 PM	SiCl4 pre valve closed
11/1/2011	2:40:31 PM	SiCl4 post valve closed
11/1/2011	2:40:31 PM	Main Vac valve closed
11/1/2011	2:40:31 PM	Bypass valve closed
11/1/2011	2:40:31 PM	Bubbler valve closed
11/1/2011	2:40:31 PM	Helium MFC set to  0.000000
11/1/2011	2:40:31 PM	H2 MFC set to  0.000000
11/1/2011	2:40:31 PM	BCl3 MFC set to  0.000000
11/1/2011	2:40:31 PM	PHl3 MFC set to  0.000000
11/1/2011	2:40:31 PM	SiCl4 MFC set to  0.000000
11/1/2011	2:40:31 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	2:40:31 PM	Tube furnace set to 0
11/1/2011	2:40:32 PM	Run finished at 2:40 PM
11/1/2011	2:52:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	2:52:59 PM	Recipe started at 2:52 PM
11/1/2011	2:52:59 PM	Helium valve closed
11/1/2011	2:52:59 PM	H2 valve closed
11/1/2011	2:52:59 PM	BCl3 valve closed
11/1/2011	2:52:59 PM	PH3 valve closed
11/1/2011	2:52:59 PM	SiCl4 pre valve closed
11/1/2011	2:52:59 PM	SiCl4 post valve closed
11/1/2011	2:52:59 PM	Main Vac valve closed
11/1/2011	2:52:59 PM	Bubbler valve closed
11/1/2011	2:52:59 PM	Bypass valve opened
11/1/2011	2:52:59 PM	Helium MFC set to  0.000000
11/1/2011	2:52:59 PM	H2 MFC set to  0.000000
11/1/2011	2:52:59 PM	BCl3 MFC set to  0.000000
11/1/2011	2:52:59 PM	PHl3 MFC set to  0.000000
11/1/2011	2:52:59 PM	SiCl4 MFC set to  0.000000
11/1/2011	2:52:59 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	2:52:59 PM	Tube furnace set to 0
11/1/2011	2:53:55 PM	Helium valve closed
11/1/2011	2:53:55 PM	H2 valve closed
11/1/2011	2:53:55 PM	BCl3 valve closed
11/1/2011	2:53:55 PM	PH3 valve closed
11/1/2011	2:53:55 PM	SiCl4 pre valve closed
11/1/2011	2:53:55 PM	SiCl4 post valve closed
11/1/2011	2:53:55 PM	Main Vac valve closed
11/1/2011	2:53:55 PM	Bubbler valve closed
11/1/2011	2:53:55 PM	Bypass valve opened
11/1/2011	2:53:55 PM	Helium MFC set to  0.000000
11/1/2011	2:53:55 PM	H2 MFC set to  0.000000
11/1/2011	2:53:55 PM	BCl3 MFC set to  0.000000
11/1/2011	2:53:55 PM	PHl3 MFC set to  0.000000
11/1/2011	2:53:55 PM	SiCl4 MFC set to  0.000000
11/1/2011	2:53:55 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	2:53:55 PM	Tube furnace set to 0
11/1/2011	2:54:55 PM	Helium valve closed
11/1/2011	2:54:55 PM	H2 valve closed
11/1/2011	2:54:55 PM	BCl3 valve closed
11/1/2011	2:54:55 PM	PH3 valve closed
11/1/2011	2:54:55 PM	SiCl4 pre valve closed
11/1/2011	2:54:55 PM	SiCl4 post valve closed
11/1/2011	2:54:55 PM	Bypass valve closed
11/1/2011	2:54:55 PM	Bubbler valve closed
11/1/2011	2:54:55 PM	Main Vac valve opened
11/1/2011	2:54:55 PM	Helium MFC set to  0.000000
11/1/2011	2:54:55 PM	H2 MFC set to  0.000000
11/1/2011	2:54:55 PM	BCl3 MFC set to  0.000000
11/1/2011	2:54:55 PM	PHl3 MFC set to  0.000000
11/1/2011	2:54:55 PM	SiCl4 MFC set to  0.000000
11/1/2011	2:54:55 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	2:54:55 PM	Tube furnace set to 0
11/1/2011	2:54:56 PM	Run finished at 2:54 PM
11/1/2011	2:54:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	3:26:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	3:26:29 PM	Recipe started at 3:26 PM
11/1/2011	3:26:29 PM	Helium valve closed
11/1/2011	3:26:29 PM	H2 valve closed
11/1/2011	3:26:29 PM	BCl3 valve closed
11/1/2011	3:26:29 PM	PH3 valve closed
11/1/2011	3:26:29 PM	SiCl4 pre valve closed
11/1/2011	3:26:29 PM	SiCl4 post valve closed
11/1/2011	3:26:29 PM	Main Vac valve closed
11/1/2011	3:26:29 PM	Bypass valve closed
11/1/2011	3:26:29 PM	Bubbler valve closed
11/1/2011	3:26:29 PM	Helium MFC set to  0.000000
11/1/2011	3:26:29 PM	H2 MFC set to  0.000000
11/1/2011	3:26:29 PM	BCl3 MFC set to  0.000000
11/1/2011	3:26:29 PM	PHl3 MFC set to  0.000000
11/1/2011	3:26:29 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:26:29 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:26:29 PM	Tube furnace set to 0
11/1/2011	3:26:32 PM	H2 valve closed
11/1/2011	3:26:32 PM	BCl3 valve closed
11/1/2011	3:26:32 PM	PH3 valve closed
11/1/2011	3:26:32 PM	SiCl4 pre valve closed
11/1/2011	3:26:32 PM	SiCl4 post valve closed
11/1/2011	3:26:32 PM	Main Vac valve closed
11/1/2011	3:26:32 PM	Bypass valve closed
11/1/2011	3:26:32 PM	Bubbler valve closed
11/1/2011	3:26:32 PM	Helium valve opened
11/1/2011	3:26:32 PM	Helium MFC set to  500.000000
11/1/2011	3:26:32 PM	H2 MFC set to  0.000000
11/1/2011	3:26:32 PM	BCl3 MFC set to  0.000000
11/1/2011	3:26:32 PM	PHl3 MFC set to  0.000000
11/1/2011	3:26:32 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:26:32 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:26:32 PM	Tube furnace set to 0
11/1/2011	3:27:15 PM	Helium valve closed
11/1/2011	3:27:15 PM	H2 valve closed
11/1/2011	3:27:15 PM	BCl3 valve closed
11/1/2011	3:27:15 PM	PH3 valve closed
11/1/2011	3:27:15 PM	SiCl4 pre valve closed
11/1/2011	3:27:15 PM	SiCl4 post valve closed
11/1/2011	3:27:15 PM	Main Vac valve closed
11/1/2011	3:27:15 PM	Bypass valve closed
11/1/2011	3:27:15 PM	Bubbler valve closed
11/1/2011	3:27:15 PM	Helium MFC set to  0.000000
11/1/2011	3:27:15 PM	H2 MFC set to  0.000000
11/1/2011	3:27:15 PM	BCl3 MFC set to  0.000000
11/1/2011	3:27:15 PM	PHl3 MFC set to  0.000000
11/1/2011	3:27:15 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:27:15 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:27:15 PM	Tube furnace set to 0
11/1/2011	3:27:16 PM	Run finished at 3:27 PM
11/1/2011	3:27:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	3:32:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	3:32:11 PM	Recipe started at 3:32 PM
11/1/2011	3:32:11 PM	Helium valve closed
11/1/2011	3:32:11 PM	H2 valve closed
11/1/2011	3:32:11 PM	BCl3 valve closed
11/1/2011	3:32:11 PM	PH3 valve closed
11/1/2011	3:32:11 PM	SiCl4 pre valve closed
11/1/2011	3:32:11 PM	SiCl4 post valve closed
11/1/2011	3:32:11 PM	Main Vac valve closed
11/1/2011	3:32:11 PM	Bubbler valve closed
11/1/2011	3:32:11 PM	Bypass valve opened
11/1/2011	3:32:11 PM	Helium MFC set to  0.000000
11/1/2011	3:32:11 PM	H2 MFC set to  0.000000
11/1/2011	3:32:11 PM	BCl3 MFC set to  0.000000
11/1/2011	3:32:11 PM	PHl3 MFC set to  0.000000
11/1/2011	3:32:11 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:32:11 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:32:11 PM	Tube furnace set to 0
11/1/2011	3:33:18 PM	Helium valve closed
11/1/2011	3:33:18 PM	H2 valve closed
11/1/2011	3:33:18 PM	BCl3 valve closed
11/1/2011	3:33:18 PM	PH3 valve closed
11/1/2011	3:33:18 PM	SiCl4 pre valve closed
11/1/2011	3:33:18 PM	SiCl4 post valve closed
11/1/2011	3:33:18 PM	Main Vac valve closed
11/1/2011	3:33:18 PM	Bubbler valve closed
11/1/2011	3:33:18 PM	Bypass valve opened
11/1/2011	3:33:18 PM	Helium MFC set to  0.000000
11/1/2011	3:33:18 PM	H2 MFC set to  0.000000
11/1/2011	3:33:18 PM	BCl3 MFC set to  0.000000
11/1/2011	3:33:18 PM	PHl3 MFC set to  0.000000
11/1/2011	3:33:18 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:33:18 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:33:18 PM	Tube furnace set to 0
11/1/2011	3:34:18 PM	Helium valve closed
11/1/2011	3:34:18 PM	H2 valve closed
11/1/2011	3:34:18 PM	BCl3 valve closed
11/1/2011	3:34:18 PM	PH3 valve closed
11/1/2011	3:34:18 PM	SiCl4 pre valve closed
11/1/2011	3:34:18 PM	SiCl4 post valve closed
11/1/2011	3:34:18 PM	Bypass valve closed
11/1/2011	3:34:18 PM	Bubbler valve closed
11/1/2011	3:34:18 PM	Main Vac valve opened
11/1/2011	3:34:18 PM	Helium MFC set to  0.000000
11/1/2011	3:34:18 PM	H2 MFC set to  0.000000
11/1/2011	3:34:18 PM	BCl3 MFC set to  0.000000
11/1/2011	3:34:18 PM	PHl3 MFC set to  0.000000
11/1/2011	3:34:18 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:34:18 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:34:18 PM	Tube furnace set to 0
11/1/2011	3:34:19 PM	Run finished at 3:34 PM
11/1/2011	3:34:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	3:35:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	3:35:32 PM	Recipe started at 3:35 PM
11/1/2011	3:35:32 PM	Helium valve closed
11/1/2011	3:35:32 PM	H2 valve closed
11/1/2011	3:35:32 PM	BCl3 valve closed
11/1/2011	3:35:32 PM	PH3 valve closed
11/1/2011	3:35:32 PM	SiCl4 pre valve closed
11/1/2011	3:35:32 PM	SiCl4 post valve closed
11/1/2011	3:35:32 PM	Main Vac valve closed
11/1/2011	3:35:32 PM	Bypass valve closed
11/1/2011	3:35:32 PM	Bubbler valve closed
11/1/2011	3:35:32 PM	Helium MFC set to  0.000000
11/1/2011	3:35:32 PM	H2 MFC set to  0.000000
11/1/2011	3:35:32 PM	BCl3 MFC set to  0.000000
11/1/2011	3:35:32 PM	PHl3 MFC set to  0.000000
11/1/2011	3:35:32 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:35:32 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:35:33 PM	Tube furnace set to 0
11/1/2011	3:35:36 PM	H2 valve closed
11/1/2011	3:35:36 PM	BCl3 valve closed
11/1/2011	3:35:36 PM	PH3 valve closed
11/1/2011	3:35:36 PM	SiCl4 pre valve closed
11/1/2011	3:35:36 PM	SiCl4 post valve closed
11/1/2011	3:35:36 PM	Main Vac valve closed
11/1/2011	3:35:36 PM	Bypass valve closed
11/1/2011	3:35:36 PM	Bubbler valve closed
11/1/2011	3:35:36 PM	Helium valve opened
11/1/2011	3:35:36 PM	Helium MFC set to  500.000000
11/1/2011	3:35:36 PM	H2 MFC set to  0.000000
11/1/2011	3:35:36 PM	BCl3 MFC set to  0.000000
11/1/2011	3:35:36 PM	PHl3 MFC set to  0.000000
11/1/2011	3:35:36 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:35:36 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:35:36 PM	Tube furnace set to 0
11/1/2011	3:36:38 PM	Run aborted at 3:36 PM
11/1/2011	3:36:38 PM	Helium valve closed
11/1/2011	3:36:38 PM	H2 valve closed
11/1/2011	3:36:38 PM	BCl3 valve closed
11/1/2011	3:36:38 PM	PH3 valve closed
11/1/2011	3:36:38 PM	SiCl4 pre valve closed
11/1/2011	3:36:38 PM	SiCl4 post valve closed
11/1/2011	3:36:38 PM	Bypass valve closed
11/1/2011	3:36:38 PM	Main Vac valve closed
11/1/2011	3:36:38 PM	Bubbler valve closed
11/1/2011	3:36:38 PM	Helium MFC set to  0.000000
11/1/2011	3:36:38 PM	H2 MFC set to  0.000000
11/1/2011	3:36:38 PM	BCl3 MFC set to  0.000000
11/1/2011	3:36:38 PM	PHl3 MFC set to  0.000000
11/1/2011	3:36:38 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:36:39 PM	Tube furnace set to 0
11/1/2011	3:36:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	3:36:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	3:36:41 PM	Recipe started at 3:36 PM
11/1/2011	3:36:41 PM	Helium valve closed
11/1/2011	3:36:41 PM	H2 valve closed
11/1/2011	3:36:41 PM	BCl3 valve closed
11/1/2011	3:36:41 PM	PH3 valve closed
11/1/2011	3:36:41 PM	SiCl4 pre valve closed
11/1/2011	3:36:41 PM	SiCl4 post valve closed
11/1/2011	3:36:41 PM	Main Vac valve closed
11/1/2011	3:36:41 PM	Bubbler valve closed
11/1/2011	3:36:41 PM	Bypass valve opened
11/1/2011	3:36:41 PM	Helium MFC set to  0.000000
11/1/2011	3:36:41 PM	H2 MFC set to  0.000000
11/1/2011	3:36:41 PM	BCl3 MFC set to  0.000000
11/1/2011	3:36:41 PM	PHl3 MFC set to  0.000000
11/1/2011	3:36:41 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:36:41 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:36:42 PM	Tube furnace set to 0
11/1/2011	3:37:35 PM	Helium valve closed
11/1/2011	3:37:35 PM	H2 valve closed
11/1/2011	3:37:35 PM	BCl3 valve closed
11/1/2011	3:37:35 PM	PH3 valve closed
11/1/2011	3:37:35 PM	SiCl4 pre valve closed
11/1/2011	3:37:35 PM	SiCl4 post valve closed
11/1/2011	3:37:35 PM	Main Vac valve closed
11/1/2011	3:37:35 PM	Bubbler valve closed
11/1/2011	3:37:35 PM	Bypass valve opened
11/1/2011	3:37:35 PM	Helium MFC set to  0.000000
11/1/2011	3:37:35 PM	H2 MFC set to  0.000000
11/1/2011	3:37:35 PM	BCl3 MFC set to  0.000000
11/1/2011	3:37:35 PM	PHl3 MFC set to  0.000000
11/1/2011	3:37:35 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:37:35 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:37:35 PM	Tube furnace set to 0
11/1/2011	3:38:35 PM	Helium valve closed
11/1/2011	3:38:35 PM	H2 valve closed
11/1/2011	3:38:35 PM	BCl3 valve closed
11/1/2011	3:38:35 PM	PH3 valve closed
11/1/2011	3:38:35 PM	SiCl4 pre valve closed
11/1/2011	3:38:35 PM	SiCl4 post valve closed
11/1/2011	3:38:35 PM	Bypass valve closed
11/1/2011	3:38:35 PM	Bubbler valve closed
11/1/2011	3:38:35 PM	Main Vac valve opened
11/1/2011	3:38:35 PM	Helium MFC set to  0.000000
11/1/2011	3:38:35 PM	H2 MFC set to  0.000000
11/1/2011	3:38:35 PM	BCl3 MFC set to  0.000000
11/1/2011	3:38:35 PM	PHl3 MFC set to  0.000000
11/1/2011	3:38:35 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:38:35 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:38:35 PM	Tube furnace set to 0
11/1/2011	3:38:36 PM	Run finished at 3:38 PM
11/1/2011	3:38:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	3:40:58 PM	Main Vac valve closed
11/1/2011	3:41:03 PM	Main Vac valve opened
11/1/2011	3:41:40 PM	Recipe started at 3:41 PM
11/1/2011	3:41:40 PM	Helium valve closed
11/1/2011	3:41:40 PM	H2 valve closed
11/1/2011	3:41:40 PM	BCl3 valve closed
11/1/2011	3:41:40 PM	PH3 valve closed
11/1/2011	3:41:40 PM	SiCl4 pre valve closed
11/1/2011	3:41:40 PM	SiCl4 post valve closed
11/1/2011	3:41:40 PM	Bypass valve closed
11/1/2011	3:41:40 PM	Bubbler valve closed
11/1/2011	3:41:40 PM	Main Vac valve opened
11/1/2011	3:41:40 PM	Helium MFC set to  0.000000
11/1/2011	3:41:40 PM	H2 MFC set to  0.000000
11/1/2011	3:41:40 PM	BCl3 MFC set to  0.000000
11/1/2011	3:41:40 PM	PHl3 MFC set to  0.000000
11/1/2011	3:41:40 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:41:40 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:41:40 PM	Tube furnace set to 150
11/1/2011	3:42:10 PM	H2 valve closed
11/1/2011	3:42:10 PM	BCl3 valve closed
11/1/2011	3:42:10 PM	PH3 valve closed
11/1/2011	3:42:10 PM	SiCl4 pre valve closed
11/1/2011	3:42:10 PM	SiCl4 post valve closed
11/1/2011	3:42:10 PM	Bypass valve closed
11/1/2011	3:42:10 PM	Bubbler valve closed
11/1/2011	3:42:10 PM	Helium valve opened
11/1/2011	3:42:10 PM	Main Vac valve opened
11/1/2011	3:42:10 PM	Helium MFC set to  20.000000
11/1/2011	3:42:10 PM	H2 MFC set to  0.000000
11/1/2011	3:42:10 PM	BCl3 MFC set to  0.000000
11/1/2011	3:42:10 PM	PHl3 MFC set to  0.000000
11/1/2011	3:42:10 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:42:10 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:42:10 PM	Tube furnace set to 150
11/1/2011	3:42:40 PM	Helium valve closed
11/1/2011	3:42:40 PM	H2 valve closed
11/1/2011	3:42:40 PM	BCl3 valve closed
11/1/2011	3:42:40 PM	PH3 valve closed
11/1/2011	3:42:40 PM	SiCl4 pre valve closed
11/1/2011	3:42:40 PM	SiCl4 post valve closed
11/1/2011	3:42:40 PM	Bypass valve closed
11/1/2011	3:42:40 PM	Bubbler valve closed
11/1/2011	3:42:40 PM	Main Vac valve opened
11/1/2011	3:42:40 PM	Helium MFC set to  0.000000
11/1/2011	3:42:40 PM	H2 MFC set to  0.000000
11/1/2011	3:42:40 PM	BCl3 MFC set to  0.000000
11/1/2011	3:42:40 PM	PHl3 MFC set to  0.000000
11/1/2011	3:42:40 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:42:40 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:42:40 PM	Tube furnace set to 150
11/1/2011	3:43:10 PM	H2 valve closed
11/1/2011	3:43:10 PM	BCl3 valve closed
11/1/2011	3:43:10 PM	PH3 valve closed
11/1/2011	3:43:10 PM	SiCl4 pre valve closed
11/1/2011	3:43:10 PM	SiCl4 post valve closed
11/1/2011	3:43:10 PM	Bypass valve closed
11/1/2011	3:43:10 PM	Bubbler valve closed
11/1/2011	3:43:10 PM	Helium valve opened
11/1/2011	3:43:10 PM	Main Vac valve opened
11/1/2011	3:43:10 PM	Helium MFC set to  20.000000
11/1/2011	3:43:10 PM	H2 MFC set to  0.000000
11/1/2011	3:43:10 PM	BCl3 MFC set to  0.000000
11/1/2011	3:43:10 PM	PHl3 MFC set to  0.000000
11/1/2011	3:43:10 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:43:10 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:43:11 PM	Tube furnace set to 150
11/1/2011	3:43:41 PM	Helium valve closed
11/1/2011	3:43:41 PM	H2 valve closed
11/1/2011	3:43:41 PM	BCl3 valve closed
11/1/2011	3:43:41 PM	PH3 valve closed
11/1/2011	3:43:41 PM	SiCl4 pre valve closed
11/1/2011	3:43:41 PM	SiCl4 post valve closed
11/1/2011	3:43:41 PM	Bypass valve closed
11/1/2011	3:43:41 PM	Bubbler valve closed
11/1/2011	3:43:41 PM	Main Vac valve opened
11/1/2011	3:43:41 PM	Helium MFC set to  0.000000
11/1/2011	3:43:41 PM	H2 MFC set to  0.000000
11/1/2011	3:43:41 PM	BCl3 MFC set to  0.000000
11/1/2011	3:43:41 PM	PHl3 MFC set to  0.000000
11/1/2011	3:43:41 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:43:41 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:43:41 PM	Tube furnace set to 150
11/1/2011	3:44:11 PM	H2 valve closed
11/1/2011	3:44:11 PM	BCl3 valve closed
11/1/2011	3:44:11 PM	PH3 valve closed
11/1/2011	3:44:11 PM	SiCl4 pre valve closed
11/1/2011	3:44:11 PM	SiCl4 post valve closed
11/1/2011	3:44:11 PM	Bypass valve closed
11/1/2011	3:44:11 PM	Bubbler valve closed
11/1/2011	3:44:11 PM	Helium valve opened
11/1/2011	3:44:11 PM	Main Vac valve opened
11/1/2011	3:44:11 PM	Helium MFC set to  20.000000
11/1/2011	3:44:11 PM	H2 MFC set to  0.000000
11/1/2011	3:44:11 PM	BCl3 MFC set to  0.000000
11/1/2011	3:44:11 PM	PHl3 MFC set to  0.000000
11/1/2011	3:44:11 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:44:11 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:44:11 PM	Tube furnace set to 150
11/1/2011	3:44:41 PM	Helium valve closed
11/1/2011	3:44:41 PM	H2 valve closed
11/1/2011	3:44:41 PM	BCl3 valve closed
11/1/2011	3:44:41 PM	PH3 valve closed
11/1/2011	3:44:41 PM	SiCl4 pre valve closed
11/1/2011	3:44:41 PM	SiCl4 post valve closed
11/1/2011	3:44:41 PM	Bypass valve closed
11/1/2011	3:44:41 PM	Bubbler valve closed
11/1/2011	3:44:41 PM	Main Vac valve opened
11/1/2011	3:44:41 PM	Helium MFC set to  0.000000
11/1/2011	3:44:41 PM	H2 MFC set to  0.000000
11/1/2011	3:44:41 PM	BCl3 MFC set to  0.000000
11/1/2011	3:44:41 PM	PHl3 MFC set to  0.000000
11/1/2011	3:44:41 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:44:41 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:44:41 PM	Tube furnace set to 150
11/1/2011	3:45:11 PM	H2 valve closed
11/1/2011	3:45:11 PM	BCl3 valve closed
11/1/2011	3:45:11 PM	PH3 valve closed
11/1/2011	3:45:11 PM	SiCl4 pre valve closed
11/1/2011	3:45:11 PM	SiCl4 post valve closed
11/1/2011	3:45:11 PM	Bypass valve closed
11/1/2011	3:45:11 PM	Bubbler valve closed
11/1/2011	3:45:11 PM	Helium valve opened
11/1/2011	3:45:11 PM	Main Vac valve opened
11/1/2011	3:45:11 PM	Helium MFC set to  20.000000
11/1/2011	3:45:11 PM	H2 MFC set to  0.000000
11/1/2011	3:45:11 PM	BCl3 MFC set to  0.000000
11/1/2011	3:45:11 PM	PHl3 MFC set to  0.000000
11/1/2011	3:45:11 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:45:11 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:45:11 PM	Tube furnace set to 150
11/1/2011	3:45:41 PM	Helium valve closed
11/1/2011	3:45:41 PM	H2 valve closed
11/1/2011	3:45:41 PM	BCl3 valve closed
11/1/2011	3:45:41 PM	PH3 valve closed
11/1/2011	3:45:41 PM	SiCl4 pre valve closed
11/1/2011	3:45:41 PM	SiCl4 post valve closed
11/1/2011	3:45:41 PM	Bypass valve closed
11/1/2011	3:45:41 PM	Bubbler valve closed
11/1/2011	3:45:41 PM	Main Vac valve opened
11/1/2011	3:45:41 PM	Helium MFC set to  0.000000
11/1/2011	3:45:41 PM	H2 MFC set to  0.000000
11/1/2011	3:45:41 PM	BCl3 MFC set to  0.000000
11/1/2011	3:45:41 PM	PHl3 MFC set to  0.000000
11/1/2011	3:45:41 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:45:41 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:45:42 PM	Tube furnace set to 150
11/1/2011	3:46:12 PM	H2 valve closed
11/1/2011	3:46:12 PM	BCl3 valve closed
11/1/2011	3:46:12 PM	PH3 valve closed
11/1/2011	3:46:12 PM	SiCl4 pre valve closed
11/1/2011	3:46:12 PM	SiCl4 post valve closed
11/1/2011	3:46:12 PM	Bypass valve closed
11/1/2011	3:46:12 PM	Bubbler valve closed
11/1/2011	3:46:12 PM	Helium valve opened
11/1/2011	3:46:12 PM	Main Vac valve opened
11/1/2011	3:46:12 PM	Helium MFC set to  20.000000
11/1/2011	3:46:12 PM	H2 MFC set to  0.000000
11/1/2011	3:46:12 PM	BCl3 MFC set to  0.000000
11/1/2011	3:46:12 PM	PHl3 MFC set to  0.000000
11/1/2011	3:46:12 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:46:12 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:46:12 PM	Tube furnace set to 150
11/1/2011	3:46:42 PM	Helium valve closed
11/1/2011	3:46:42 PM	H2 valve closed
11/1/2011	3:46:42 PM	BCl3 valve closed
11/1/2011	3:46:42 PM	PH3 valve closed
11/1/2011	3:46:42 PM	SiCl4 pre valve closed
11/1/2011	3:46:42 PM	SiCl4 post valve closed
11/1/2011	3:46:42 PM	Bypass valve closed
11/1/2011	3:46:42 PM	Bubbler valve closed
11/1/2011	3:46:42 PM	Main Vac valve opened
11/1/2011	3:46:42 PM	Helium MFC set to  0.000000
11/1/2011	3:46:42 PM	H2 MFC set to  0.000000
11/1/2011	3:46:42 PM	BCl3 MFC set to  0.000000
11/1/2011	3:46:42 PM	PHl3 MFC set to  0.000000
11/1/2011	3:46:42 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:46:42 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:46:42 PM	Tube furnace set to 150
11/1/2011	3:47:12 PM	H2 valve closed
11/1/2011	3:47:12 PM	BCl3 valve closed
11/1/2011	3:47:12 PM	PH3 valve closed
11/1/2011	3:47:12 PM	SiCl4 pre valve closed
11/1/2011	3:47:12 PM	SiCl4 post valve closed
11/1/2011	3:47:12 PM	Bypass valve closed
11/1/2011	3:47:12 PM	Bubbler valve closed
11/1/2011	3:47:12 PM	Helium valve opened
11/1/2011	3:47:12 PM	Main Vac valve opened
11/1/2011	3:47:12 PM	Helium MFC set to  20.000000
11/1/2011	3:47:12 PM	H2 MFC set to  0.000000
11/1/2011	3:47:12 PM	BCl3 MFC set to  0.000000
11/1/2011	3:47:12 PM	PHl3 MFC set to  0.000000
11/1/2011	3:47:12 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:47:12 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:47:12 PM	Tube furnace set to 150
11/1/2011	3:47:42 PM	Helium valve closed
11/1/2011	3:47:42 PM	H2 valve closed
11/1/2011	3:47:42 PM	BCl3 valve closed
11/1/2011	3:47:42 PM	PH3 valve closed
11/1/2011	3:47:42 PM	SiCl4 pre valve closed
11/1/2011	3:47:42 PM	SiCl4 post valve closed
11/1/2011	3:47:42 PM	Bypass valve closed
11/1/2011	3:47:42 PM	Bubbler valve closed
11/1/2011	3:47:42 PM	Main Vac valve opened
11/1/2011	3:47:42 PM	Helium MFC set to  0.000000
11/1/2011	3:47:42 PM	H2 MFC set to  0.000000
11/1/2011	3:47:42 PM	BCl3 MFC set to  0.000000
11/1/2011	3:47:42 PM	PHl3 MFC set to  0.000000
11/1/2011	3:47:42 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:47:42 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:47:42 PM	Tube furnace set to 150
11/1/2011	3:48:12 PM	H2 valve closed
11/1/2011	3:48:12 PM	BCl3 valve closed
11/1/2011	3:48:12 PM	PH3 valve closed
11/1/2011	3:48:12 PM	SiCl4 pre valve closed
11/1/2011	3:48:12 PM	SiCl4 post valve closed
11/1/2011	3:48:12 PM	Bypass valve closed
11/1/2011	3:48:12 PM	Bubbler valve closed
11/1/2011	3:48:12 PM	Helium valve opened
11/1/2011	3:48:12 PM	Main Vac valve opened
11/1/2011	3:48:12 PM	Helium MFC set to  20.000000
11/1/2011	3:48:12 PM	H2 MFC set to  0.000000
11/1/2011	3:48:12 PM	BCl3 MFC set to  0.000000
11/1/2011	3:48:12 PM	PHl3 MFC set to  0.000000
11/1/2011	3:48:12 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:48:12 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:48:13 PM	Tube furnace set to 150
11/1/2011	3:48:43 PM	Helium valve closed
11/1/2011	3:48:43 PM	H2 valve closed
11/1/2011	3:48:43 PM	BCl3 valve closed
11/1/2011	3:48:43 PM	PH3 valve closed
11/1/2011	3:48:43 PM	SiCl4 pre valve closed
11/1/2011	3:48:43 PM	SiCl4 post valve closed
11/1/2011	3:48:43 PM	Bypass valve closed
11/1/2011	3:48:43 PM	Bubbler valve closed
11/1/2011	3:48:43 PM	Main Vac valve opened
11/1/2011	3:48:43 PM	Helium MFC set to  0.000000
11/1/2011	3:48:43 PM	H2 MFC set to  0.000000
11/1/2011	3:48:43 PM	BCl3 MFC set to  0.000000
11/1/2011	3:48:43 PM	PHl3 MFC set to  0.000000
11/1/2011	3:48:43 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:48:43 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:48:43 PM	Tube furnace set to 150
11/1/2011	3:49:13 PM	H2 valve closed
11/1/2011	3:49:13 PM	BCl3 valve closed
11/1/2011	3:49:13 PM	PH3 valve closed
11/1/2011	3:49:13 PM	SiCl4 pre valve closed
11/1/2011	3:49:13 PM	SiCl4 post valve closed
11/1/2011	3:49:13 PM	Bypass valve closed
11/1/2011	3:49:13 PM	Bubbler valve closed
11/1/2011	3:49:13 PM	Helium valve opened
11/1/2011	3:49:13 PM	Main Vac valve opened
11/1/2011	3:49:13 PM	Helium MFC set to  20.000000
11/1/2011	3:49:13 PM	H2 MFC set to  0.000000
11/1/2011	3:49:13 PM	BCl3 MFC set to  0.000000
11/1/2011	3:49:13 PM	PHl3 MFC set to  0.000000
11/1/2011	3:49:13 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:49:13 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:49:13 PM	Tube furnace set to 150
11/1/2011	3:49:43 PM	Helium valve closed
11/1/2011	3:49:43 PM	H2 valve closed
11/1/2011	3:49:43 PM	BCl3 valve closed
11/1/2011	3:49:43 PM	PH3 valve closed
11/1/2011	3:49:43 PM	SiCl4 pre valve closed
11/1/2011	3:49:43 PM	SiCl4 post valve closed
11/1/2011	3:49:43 PM	Bypass valve closed
11/1/2011	3:49:43 PM	Bubbler valve closed
11/1/2011	3:49:43 PM	Main Vac valve opened
11/1/2011	3:49:43 PM	Helium MFC set to  0.000000
11/1/2011	3:49:43 PM	H2 MFC set to  0.000000
11/1/2011	3:49:43 PM	BCl3 MFC set to  0.000000
11/1/2011	3:49:43 PM	PHl3 MFC set to  0.000000
11/1/2011	3:49:43 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:49:43 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:49:43 PM	Tube furnace set to 150
11/1/2011	3:50:13 PM	H2 valve closed
11/1/2011	3:50:13 PM	BCl3 valve closed
11/1/2011	3:50:13 PM	PH3 valve closed
11/1/2011	3:50:13 PM	SiCl4 pre valve closed
11/1/2011	3:50:13 PM	SiCl4 post valve closed
11/1/2011	3:50:13 PM	Bypass valve closed
11/1/2011	3:50:13 PM	Bubbler valve closed
11/1/2011	3:50:13 PM	Helium valve opened
11/1/2011	3:50:13 PM	Main Vac valve opened
11/1/2011	3:50:13 PM	Helium MFC set to  20.000000
11/1/2011	3:50:13 PM	H2 MFC set to  0.000000
11/1/2011	3:50:13 PM	BCl3 MFC set to  0.000000
11/1/2011	3:50:13 PM	PHl3 MFC set to  0.000000
11/1/2011	3:50:13 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:50:13 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:50:13 PM	Tube furnace set to 150
11/1/2011	3:50:43 PM	Helium valve closed
11/1/2011	3:50:43 PM	H2 valve closed
11/1/2011	3:50:43 PM	BCl3 valve closed
11/1/2011	3:50:43 PM	PH3 valve closed
11/1/2011	3:50:43 PM	SiCl4 pre valve closed
11/1/2011	3:50:43 PM	SiCl4 post valve closed
11/1/2011	3:50:43 PM	Bypass valve closed
11/1/2011	3:50:43 PM	Bubbler valve closed
11/1/2011	3:50:43 PM	Main Vac valve opened
11/1/2011	3:50:43 PM	Helium MFC set to  0.000000
11/1/2011	3:50:43 PM	H2 MFC set to  0.000000
11/1/2011	3:50:43 PM	BCl3 MFC set to  0.000000
11/1/2011	3:50:43 PM	PHl3 MFC set to  0.000000
11/1/2011	3:50:43 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:50:43 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:50:44 PM	Tube furnace set to 150
11/1/2011	3:51:14 PM	H2 valve closed
11/1/2011	3:51:14 PM	BCl3 valve closed
11/1/2011	3:51:14 PM	PH3 valve closed
11/1/2011	3:51:14 PM	SiCl4 pre valve closed
11/1/2011	3:51:14 PM	SiCl4 post valve closed
11/1/2011	3:51:14 PM	Bypass valve closed
11/1/2011	3:51:14 PM	Bubbler valve closed
11/1/2011	3:51:14 PM	Helium valve opened
11/1/2011	3:51:14 PM	Main Vac valve opened
11/1/2011	3:51:14 PM	Helium MFC set to  20.000000
11/1/2011	3:51:14 PM	H2 MFC set to  0.000000
11/1/2011	3:51:14 PM	BCl3 MFC set to  0.000000
11/1/2011	3:51:14 PM	PHl3 MFC set to  0.000000
11/1/2011	3:51:14 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:51:14 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:51:14 PM	Tube furnace set to 150
11/1/2011	3:51:44 PM	Helium valve closed
11/1/2011	3:51:44 PM	H2 valve closed
11/1/2011	3:51:44 PM	BCl3 valve closed
11/1/2011	3:51:44 PM	PH3 valve closed
11/1/2011	3:51:44 PM	SiCl4 pre valve closed
11/1/2011	3:51:44 PM	SiCl4 post valve closed
11/1/2011	3:51:44 PM	Bypass valve closed
11/1/2011	3:51:44 PM	Bubbler valve closed
11/1/2011	3:51:44 PM	Main Vac valve opened
11/1/2011	3:51:44 PM	Helium MFC set to  0.000000
11/1/2011	3:51:44 PM	H2 MFC set to  0.000000
11/1/2011	3:51:44 PM	BCl3 MFC set to  0.000000
11/1/2011	3:51:44 PM	PHl3 MFC set to  0.000000
11/1/2011	3:51:44 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:51:44 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:51:44 PM	Tube furnace set to 150
11/1/2011	3:51:45 PM	Run finished at 3:51 PM
11/1/2011	3:58:35 PM	Main Vac valve closed
11/1/2011	3:58:45 PM	Main Vac valve opened
11/1/2011	3:58:52 PM	H2 MFC set to  10.000000
11/1/2011	3:58:54 PM	H2 valve opened
11/1/2011	3:59:04 PM	H2 MFC set to  50.000000
11/1/2011	3:59:15 PM	H2 valve closed
11/1/2011	3:59:43 PM	H2 MFC set to  0.000000
11/1/2011	3:59:51 PM	Recipe started at 3:59 PM
11/1/2011	3:59:51 PM	Helium valve closed
11/1/2011	3:59:51 PM	H2 valve closed
11/1/2011	3:59:51 PM	BCl3 valve closed
11/1/2011	3:59:51 PM	PH3 valve closed
11/1/2011	3:59:51 PM	SiCl4 pre valve closed
11/1/2011	3:59:51 PM	SiCl4 post valve closed
11/1/2011	3:59:51 PM	Bypass valve closed
11/1/2011	3:59:51 PM	Bubbler valve closed
11/1/2011	3:59:51 PM	Main Vac valve opened
11/1/2011	3:59:51 PM	Helium MFC set to  0.000000
11/1/2011	3:59:51 PM	H2 MFC set to  0.000000
11/1/2011	3:59:51 PM	BCl3 MFC set to  0.000000
11/1/2011	3:59:51 PM	PHl3 MFC set to  0.000000
11/1/2011	3:59:51 PM	SiCl4 MFC set to  0.000000
11/1/2011	3:59:51 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	3:59:52 PM	Tube furnace set to 150
11/1/2011	4:00:22 PM	H2 valve closed
11/1/2011	4:00:22 PM	BCl3 valve closed
11/1/2011	4:00:22 PM	PH3 valve closed
11/1/2011	4:00:22 PM	SiCl4 pre valve closed
11/1/2011	4:00:22 PM	SiCl4 post valve closed
11/1/2011	4:00:22 PM	Bypass valve closed
11/1/2011	4:00:22 PM	Bubbler valve closed
11/1/2011	4:00:22 PM	Helium valve opened
11/1/2011	4:00:22 PM	Main Vac valve opened
11/1/2011	4:00:22 PM	Helium MFC set to  20.000000
11/1/2011	4:00:22 PM	H2 MFC set to  0.000000
11/1/2011	4:00:22 PM	BCl3 MFC set to  0.000000
11/1/2011	4:00:22 PM	PHl3 MFC set to  0.000000
11/1/2011	4:00:22 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:00:22 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:00:22 PM	Tube furnace set to 150
11/1/2011	4:00:52 PM	Helium valve closed
11/1/2011	4:00:52 PM	H2 valve closed
11/1/2011	4:00:52 PM	BCl3 valve closed
11/1/2011	4:00:52 PM	PH3 valve closed
11/1/2011	4:00:52 PM	SiCl4 pre valve closed
11/1/2011	4:00:52 PM	SiCl4 post valve closed
11/1/2011	4:00:52 PM	Bypass valve closed
11/1/2011	4:00:52 PM	Bubbler valve closed
11/1/2011	4:00:52 PM	Main Vac valve opened
11/1/2011	4:00:52 PM	Helium MFC set to  0.000000
11/1/2011	4:00:52 PM	H2 MFC set to  0.000000
11/1/2011	4:00:52 PM	BCl3 MFC set to  0.000000
11/1/2011	4:00:52 PM	PHl3 MFC set to  0.000000
11/1/2011	4:00:52 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:00:52 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:00:52 PM	Tube furnace set to 150
11/1/2011	4:01:22 PM	H2 valve closed
11/1/2011	4:01:22 PM	BCl3 valve closed
11/1/2011	4:01:22 PM	PH3 valve closed
11/1/2011	4:01:22 PM	SiCl4 pre valve closed
11/1/2011	4:01:22 PM	SiCl4 post valve closed
11/1/2011	4:01:22 PM	Bypass valve closed
11/1/2011	4:01:22 PM	Bubbler valve closed
11/1/2011	4:01:22 PM	Helium valve opened
11/1/2011	4:01:22 PM	Main Vac valve opened
11/1/2011	4:01:22 PM	Helium MFC set to  20.000000
11/1/2011	4:01:22 PM	H2 MFC set to  0.000000
11/1/2011	4:01:22 PM	BCl3 MFC set to  0.000000
11/1/2011	4:01:22 PM	PHl3 MFC set to  0.000000
11/1/2011	4:01:22 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:01:22 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:01:22 PM	Tube furnace set to 150
11/1/2011	4:01:52 PM	Helium valve closed
11/1/2011	4:01:52 PM	H2 valve closed
11/1/2011	4:01:52 PM	BCl3 valve closed
11/1/2011	4:01:52 PM	PH3 valve closed
11/1/2011	4:01:52 PM	SiCl4 pre valve closed
11/1/2011	4:01:52 PM	SiCl4 post valve closed
11/1/2011	4:01:52 PM	Bypass valve closed
11/1/2011	4:01:52 PM	Bubbler valve closed
11/1/2011	4:01:52 PM	Main Vac valve opened
11/1/2011	4:01:52 PM	Helium MFC set to  0.000000
11/1/2011	4:01:52 PM	H2 MFC set to  0.000000
11/1/2011	4:01:52 PM	BCl3 MFC set to  0.000000
11/1/2011	4:01:52 PM	PHl3 MFC set to  0.000000
11/1/2011	4:01:52 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:01:52 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:01:52 PM	Tube furnace set to 150
11/1/2011	4:02:22 PM	H2 valve closed
11/1/2011	4:02:22 PM	BCl3 valve closed
11/1/2011	4:02:22 PM	PH3 valve closed
11/1/2011	4:02:22 PM	SiCl4 pre valve closed
11/1/2011	4:02:22 PM	SiCl4 post valve closed
11/1/2011	4:02:22 PM	Bypass valve closed
11/1/2011	4:02:22 PM	Bubbler valve closed
11/1/2011	4:02:22 PM	Helium valve opened
11/1/2011	4:02:22 PM	Main Vac valve opened
11/1/2011	4:02:22 PM	Helium MFC set to  20.000000
11/1/2011	4:02:22 PM	H2 MFC set to  0.000000
11/1/2011	4:02:22 PM	BCl3 MFC set to  0.000000
11/1/2011	4:02:22 PM	PHl3 MFC set to  0.000000
11/1/2011	4:02:22 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:02:22 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:02:22 PM	Tube furnace set to 150
11/1/2011	4:02:53 PM	Helium valve closed
11/1/2011	4:02:53 PM	H2 valve closed
11/1/2011	4:02:53 PM	BCl3 valve closed
11/1/2011	4:02:53 PM	PH3 valve closed
11/1/2011	4:02:53 PM	SiCl4 pre valve closed
11/1/2011	4:02:53 PM	SiCl4 post valve closed
11/1/2011	4:02:53 PM	Bypass valve closed
11/1/2011	4:02:53 PM	Bubbler valve closed
11/1/2011	4:02:53 PM	Main Vac valve opened
11/1/2011	4:02:53 PM	Helium MFC set to  0.000000
11/1/2011	4:02:53 PM	H2 MFC set to  0.000000
11/1/2011	4:02:53 PM	BCl3 MFC set to  0.000000
11/1/2011	4:02:53 PM	PHl3 MFC set to  0.000000
11/1/2011	4:02:53 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:02:53 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:02:53 PM	Tube furnace set to 150
11/1/2011	4:03:23 PM	H2 valve closed
11/1/2011	4:03:23 PM	BCl3 valve closed
11/1/2011	4:03:23 PM	PH3 valve closed
11/1/2011	4:03:23 PM	SiCl4 pre valve closed
11/1/2011	4:03:23 PM	SiCl4 post valve closed
11/1/2011	4:03:23 PM	Bypass valve closed
11/1/2011	4:03:23 PM	Bubbler valve closed
11/1/2011	4:03:23 PM	Helium valve opened
11/1/2011	4:03:23 PM	Main Vac valve opened
11/1/2011	4:03:23 PM	Helium MFC set to  20.000000
11/1/2011	4:03:23 PM	H2 MFC set to  0.000000
11/1/2011	4:03:23 PM	BCl3 MFC set to  0.000000
11/1/2011	4:03:23 PM	PHl3 MFC set to  0.000000
11/1/2011	4:03:23 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:03:23 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:03:23 PM	Tube furnace set to 150
11/1/2011	4:03:53 PM	Helium valve closed
11/1/2011	4:03:53 PM	H2 valve closed
11/1/2011	4:03:53 PM	BCl3 valve closed
11/1/2011	4:03:53 PM	PH3 valve closed
11/1/2011	4:03:53 PM	SiCl4 pre valve closed
11/1/2011	4:03:53 PM	SiCl4 post valve closed
11/1/2011	4:03:53 PM	Bypass valve closed
11/1/2011	4:03:53 PM	Bubbler valve closed
11/1/2011	4:03:53 PM	Main Vac valve opened
11/1/2011	4:03:53 PM	Helium MFC set to  0.000000
11/1/2011	4:03:53 PM	H2 MFC set to  0.000000
11/1/2011	4:03:53 PM	BCl3 MFC set to  0.000000
11/1/2011	4:03:53 PM	PHl3 MFC set to  0.000000
11/1/2011	4:03:53 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:03:53 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:03:53 PM	Tube furnace set to 150
11/1/2011	4:04:23 PM	H2 valve closed
11/1/2011	4:04:23 PM	BCl3 valve closed
11/1/2011	4:04:23 PM	PH3 valve closed
11/1/2011	4:04:23 PM	SiCl4 pre valve closed
11/1/2011	4:04:23 PM	SiCl4 post valve closed
11/1/2011	4:04:23 PM	Bypass valve closed
11/1/2011	4:04:23 PM	Bubbler valve closed
11/1/2011	4:04:23 PM	Helium valve opened
11/1/2011	4:04:23 PM	Main Vac valve opened
11/1/2011	4:04:23 PM	Helium MFC set to  20.000000
11/1/2011	4:04:23 PM	H2 MFC set to  0.000000
11/1/2011	4:04:23 PM	BCl3 MFC set to  0.000000
11/1/2011	4:04:23 PM	PHl3 MFC set to  0.000000
11/1/2011	4:04:23 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:04:23 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:04:23 PM	Tube furnace set to 150
11/1/2011	4:04:53 PM	Helium valve closed
11/1/2011	4:04:53 PM	H2 valve closed
11/1/2011	4:04:53 PM	BCl3 valve closed
11/1/2011	4:04:53 PM	PH3 valve closed
11/1/2011	4:04:53 PM	SiCl4 pre valve closed
11/1/2011	4:04:53 PM	SiCl4 post valve closed
11/1/2011	4:04:53 PM	Bypass valve closed
11/1/2011	4:04:53 PM	Bubbler valve closed
11/1/2011	4:04:53 PM	Main Vac valve opened
11/1/2011	4:04:53 PM	Helium MFC set to  0.000000
11/1/2011	4:04:53 PM	H2 MFC set to  0.000000
11/1/2011	4:04:53 PM	BCl3 MFC set to  0.000000
11/1/2011	4:04:53 PM	PHl3 MFC set to  0.000000
11/1/2011	4:04:53 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:04:53 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:04:54 PM	Tube furnace set to 150
11/1/2011	4:05:24 PM	H2 valve closed
11/1/2011	4:05:24 PM	BCl3 valve closed
11/1/2011	4:05:24 PM	PH3 valve closed
11/1/2011	4:05:24 PM	SiCl4 pre valve closed
11/1/2011	4:05:24 PM	SiCl4 post valve closed
11/1/2011	4:05:24 PM	Bypass valve closed
11/1/2011	4:05:24 PM	Bubbler valve closed
11/1/2011	4:05:24 PM	Helium valve opened
11/1/2011	4:05:24 PM	Main Vac valve opened
11/1/2011	4:05:24 PM	Helium MFC set to  20.000000
11/1/2011	4:05:24 PM	H2 MFC set to  0.000000
11/1/2011	4:05:24 PM	BCl3 MFC set to  0.000000
11/1/2011	4:05:24 PM	PHl3 MFC set to  0.000000
11/1/2011	4:05:24 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:05:24 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:05:24 PM	Tube furnace set to 150
11/1/2011	4:05:54 PM	Helium valve closed
11/1/2011	4:05:54 PM	H2 valve closed
11/1/2011	4:05:54 PM	BCl3 valve closed
11/1/2011	4:05:54 PM	PH3 valve closed
11/1/2011	4:05:54 PM	SiCl4 pre valve closed
11/1/2011	4:05:54 PM	SiCl4 post valve closed
11/1/2011	4:05:54 PM	Bypass valve closed
11/1/2011	4:05:54 PM	Bubbler valve closed
11/1/2011	4:05:54 PM	Main Vac valve opened
11/1/2011	4:05:54 PM	Helium MFC set to  0.000000
11/1/2011	4:05:54 PM	H2 MFC set to  0.000000
11/1/2011	4:05:54 PM	BCl3 MFC set to  0.000000
11/1/2011	4:05:54 PM	PHl3 MFC set to  0.000000
11/1/2011	4:05:54 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:05:54 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:05:54 PM	Tube furnace set to 150
11/1/2011	4:06:24 PM	H2 valve closed
11/1/2011	4:06:24 PM	BCl3 valve closed
11/1/2011	4:06:24 PM	PH3 valve closed
11/1/2011	4:06:24 PM	SiCl4 pre valve closed
11/1/2011	4:06:24 PM	SiCl4 post valve closed
11/1/2011	4:06:24 PM	Bypass valve closed
11/1/2011	4:06:24 PM	Bubbler valve closed
11/1/2011	4:06:24 PM	Helium valve opened
11/1/2011	4:06:24 PM	Main Vac valve opened
11/1/2011	4:06:24 PM	Helium MFC set to  20.000000
11/1/2011	4:06:24 PM	H2 MFC set to  0.000000
11/1/2011	4:06:24 PM	BCl3 MFC set to  0.000000
11/1/2011	4:06:24 PM	PHl3 MFC set to  0.000000
11/1/2011	4:06:24 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:06:24 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:06:24 PM	Tube furnace set to 150
11/1/2011	4:06:54 PM	Helium valve closed
11/1/2011	4:06:54 PM	H2 valve closed
11/1/2011	4:06:54 PM	BCl3 valve closed
11/1/2011	4:06:54 PM	PH3 valve closed
11/1/2011	4:06:54 PM	SiCl4 pre valve closed
11/1/2011	4:06:54 PM	SiCl4 post valve closed
11/1/2011	4:06:54 PM	Bypass valve closed
11/1/2011	4:06:54 PM	Bubbler valve closed
11/1/2011	4:06:54 PM	Main Vac valve opened
11/1/2011	4:06:54 PM	Helium MFC set to  0.000000
11/1/2011	4:06:54 PM	H2 MFC set to  0.000000
11/1/2011	4:06:54 PM	BCl3 MFC set to  0.000000
11/1/2011	4:06:54 PM	PHl3 MFC set to  0.000000
11/1/2011	4:06:54 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:06:54 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:06:54 PM	Tube furnace set to 150
11/1/2011	4:07:24 PM	H2 valve closed
11/1/2011	4:07:24 PM	BCl3 valve closed
11/1/2011	4:07:24 PM	PH3 valve closed
11/1/2011	4:07:24 PM	SiCl4 pre valve closed
11/1/2011	4:07:24 PM	SiCl4 post valve closed
11/1/2011	4:07:24 PM	Bypass valve closed
11/1/2011	4:07:24 PM	Bubbler valve closed
11/1/2011	4:07:24 PM	Helium valve opened
11/1/2011	4:07:24 PM	Main Vac valve opened
11/1/2011	4:07:24 PM	Helium MFC set to  20.000000
11/1/2011	4:07:24 PM	H2 MFC set to  0.000000
11/1/2011	4:07:24 PM	BCl3 MFC set to  0.000000
11/1/2011	4:07:24 PM	PHl3 MFC set to  0.000000
11/1/2011	4:07:24 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:07:24 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:07:25 PM	Tube furnace set to 150
11/1/2011	4:07:55 PM	Helium valve closed
11/1/2011	4:07:55 PM	H2 valve closed
11/1/2011	4:07:55 PM	BCl3 valve closed
11/1/2011	4:07:55 PM	PH3 valve closed
11/1/2011	4:07:55 PM	SiCl4 pre valve closed
11/1/2011	4:07:55 PM	SiCl4 post valve closed
11/1/2011	4:07:55 PM	Bypass valve closed
11/1/2011	4:07:55 PM	Bubbler valve closed
11/1/2011	4:07:55 PM	Main Vac valve opened
11/1/2011	4:07:55 PM	Helium MFC set to  0.000000
11/1/2011	4:07:55 PM	H2 MFC set to  0.000000
11/1/2011	4:07:55 PM	BCl3 MFC set to  0.000000
11/1/2011	4:07:55 PM	PHl3 MFC set to  0.000000
11/1/2011	4:07:55 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:07:55 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:07:55 PM	Tube furnace set to 150
11/1/2011	4:08:25 PM	H2 valve closed
11/1/2011	4:08:25 PM	BCl3 valve closed
11/1/2011	4:08:25 PM	PH3 valve closed
11/1/2011	4:08:25 PM	SiCl4 pre valve closed
11/1/2011	4:08:25 PM	SiCl4 post valve closed
11/1/2011	4:08:25 PM	Bypass valve closed
11/1/2011	4:08:25 PM	Bubbler valve closed
11/1/2011	4:08:25 PM	Helium valve opened
11/1/2011	4:08:25 PM	Main Vac valve opened
11/1/2011	4:08:25 PM	Helium MFC set to  20.000000
11/1/2011	4:08:25 PM	H2 MFC set to  0.000000
11/1/2011	4:08:25 PM	BCl3 MFC set to  0.000000
11/1/2011	4:08:25 PM	PHl3 MFC set to  0.000000
11/1/2011	4:08:25 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:08:25 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:08:25 PM	Tube furnace set to 150
11/1/2011	4:08:55 PM	Helium valve closed
11/1/2011	4:08:55 PM	H2 valve closed
11/1/2011	4:08:55 PM	BCl3 valve closed
11/1/2011	4:08:55 PM	PH3 valve closed
11/1/2011	4:08:55 PM	SiCl4 pre valve closed
11/1/2011	4:08:55 PM	SiCl4 post valve closed
11/1/2011	4:08:55 PM	Bypass valve closed
11/1/2011	4:08:55 PM	Bubbler valve closed
11/1/2011	4:08:55 PM	Main Vac valve opened
11/1/2011	4:08:55 PM	Helium MFC set to  0.000000
11/1/2011	4:08:55 PM	H2 MFC set to  0.000000
11/1/2011	4:08:55 PM	BCl3 MFC set to  0.000000
11/1/2011	4:08:55 PM	PHl3 MFC set to  0.000000
11/1/2011	4:08:55 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:08:55 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:08:55 PM	Tube furnace set to 150
11/1/2011	4:09:25 PM	H2 valve closed
11/1/2011	4:09:25 PM	BCl3 valve closed
11/1/2011	4:09:25 PM	PH3 valve closed
11/1/2011	4:09:25 PM	SiCl4 pre valve closed
11/1/2011	4:09:25 PM	SiCl4 post valve closed
11/1/2011	4:09:25 PM	Bypass valve closed
11/1/2011	4:09:25 PM	Bubbler valve closed
11/1/2011	4:09:25 PM	Helium valve opened
11/1/2011	4:09:25 PM	Main Vac valve opened
11/1/2011	4:09:25 PM	Helium MFC set to  20.000000
11/1/2011	4:09:25 PM	H2 MFC set to  0.000000
11/1/2011	4:09:25 PM	BCl3 MFC set to  0.000000
11/1/2011	4:09:25 PM	PHl3 MFC set to  0.000000
11/1/2011	4:09:25 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:09:25 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:09:26 PM	Tube furnace set to 150
11/1/2011	4:09:56 PM	Helium valve closed
11/1/2011	4:09:56 PM	H2 valve closed
11/1/2011	4:09:56 PM	BCl3 valve closed
11/1/2011	4:09:56 PM	PH3 valve closed
11/1/2011	4:09:56 PM	SiCl4 pre valve closed
11/1/2011	4:09:56 PM	SiCl4 post valve closed
11/1/2011	4:09:56 PM	Bypass valve closed
11/1/2011	4:09:56 PM	Bubbler valve closed
11/1/2011	4:09:56 PM	Main Vac valve opened
11/1/2011	4:09:56 PM	Helium MFC set to  0.000000
11/1/2011	4:09:56 PM	H2 MFC set to  0.000000
11/1/2011	4:09:56 PM	BCl3 MFC set to  0.000000
11/1/2011	4:09:56 PM	PHl3 MFC set to  0.000000
11/1/2011	4:09:56 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:09:56 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:09:56 PM	Tube furnace set to 150
11/1/2011	4:09:57 PM	Run finished at 4:09 PM
11/1/2011	4:38:09 PM	Recipe started at 4:38 PM
11/1/2011	4:38:09 PM	Helium valve closed
11/1/2011	4:38:09 PM	H2 valve closed
11/1/2011	4:38:09 PM	BCl3 valve closed
11/1/2011	4:38:09 PM	PH3 valve closed
11/1/2011	4:38:09 PM	SiCl4 pre valve closed
11/1/2011	4:38:09 PM	SiCl4 post valve closed
11/1/2011	4:38:09 PM	Main Vac valve closed
11/1/2011	4:38:09 PM	Bypass valve closed
11/1/2011	4:38:09 PM	Bubbler valve closed
11/1/2011	4:38:09 PM	Helium MFC set to  0.000000
11/1/2011	4:38:09 PM	H2 MFC set to  0.000000
11/1/2011	4:38:09 PM	BCl3 MFC set to  0.000000
11/1/2011	4:38:09 PM	PHl3 MFC set to  0.000000
11/1/2011	4:38:09 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:38:09 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:38:09 PM	Tube furnace set to 0
11/1/2011	4:38:12 PM	Helium valve closed
11/1/2011	4:38:12 PM	BCl3 valve closed
11/1/2011	4:38:12 PM	PH3 valve closed
11/1/2011	4:38:12 PM	SiCl4 pre valve closed
11/1/2011	4:38:12 PM	SiCl4 post valve closed
11/1/2011	4:38:12 PM	Main Vac valve closed
11/1/2011	4:38:12 PM	Bypass valve closed
11/1/2011	4:38:12 PM	Bubbler valve closed
11/1/2011	4:38:12 PM	H2 valve opened
11/1/2011	4:38:12 PM	Helium MFC set to  0.000000
11/1/2011	4:38:12 PM	H2 MFC set to  500.000000
11/1/2011	4:38:12 PM	BCl3 MFC set to  0.000000
11/1/2011	4:38:12 PM	PHl3 MFC set to  0.000000
11/1/2011	4:38:12 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:38:12 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:38:12 PM	Tube furnace set to 0
11/1/2011	4:39:17 PM	Helium valve closed
11/1/2011	4:39:17 PM	BCl3 valve closed
11/1/2011	4:39:17 PM	PH3 valve closed
11/1/2011	4:39:17 PM	SiCl4 pre valve closed
11/1/2011	4:39:17 PM	SiCl4 post valve closed
11/1/2011	4:39:17 PM	Main Vac valve closed
11/1/2011	4:39:17 PM	Bypass valve closed
11/1/2011	4:39:17 PM	H2 valve opened
11/1/2011	4:39:17 PM	Bubbler valve opened
11/1/2011	4:39:17 PM	Helium MFC set to  0.000000
11/1/2011	4:39:17 PM	H2 MFC set to  500.000000
11/1/2011	4:39:17 PM	BCl3 MFC set to  0.000000
11/1/2011	4:39:17 PM	PHl3 MFC set to  0.000000
11/1/2011	4:39:17 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:39:17 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:39:17 PM	Tube furnace set to 0
11/1/2011	4:39:18 PM	Helium valve closed
11/1/2011	4:39:18 PM	BCl3 valve closed
11/1/2011	4:39:18 PM	PH3 valve closed
11/1/2011	4:39:18 PM	SiCl4 pre valve closed
11/1/2011	4:39:18 PM	SiCl4 post valve closed
11/1/2011	4:39:18 PM	Main Vac valve closed
11/1/2011	4:39:18 PM	Bypass valve closed
11/1/2011	4:39:18 PM	H2 valve opened
11/1/2011	4:39:18 PM	Bubbler valve opened
11/1/2011	4:39:18 PM	Helium MFC set to  0.000000
11/1/2011	4:39:18 PM	H2 MFC set to  500.000000
11/1/2011	4:39:18 PM	BCl3 MFC set to  0.000000
11/1/2011	4:39:18 PM	PHl3 MFC set to  0.000000
11/1/2011	4:39:18 PM	SiCl4 MFC set to  0.000000
11/1/2011	4:39:18 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:39:19 PM	Tube furnace set to 1000
11/1/2011	4:59:19 PM	Helium valve closed
11/1/2011	4:59:19 PM	BCl3 valve closed
11/1/2011	4:59:19 PM	PH3 valve closed
11/1/2011	4:59:19 PM	Main Vac valve closed
11/1/2011	4:59:19 PM	Bypass valve closed
11/1/2011	4:59:19 PM	H2 valve opened
11/1/2011	4:59:19 PM	SiCl4 pre valve opened
11/1/2011	4:59:19 PM	SiCl4 post valve opened
11/1/2011	4:59:19 PM	Bubbler valve opened
11/1/2011	4:59:19 PM	Helium MFC set to  0.000000
11/1/2011	4:59:19 PM	H2 MFC set to  500.000000
11/1/2011	4:59:19 PM	BCl3 MFC set to  0.000000
11/1/2011	4:59:19 PM	PHl3 MFC set to  0.000000
11/1/2011	4:59:19 PM	SiCl4 MFC set to  50.000000
11/1/2011	4:59:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	4:59:19 PM	Tube furnace set to 1000
11/1/2011	5:19:19 PM	Helium valve closed
11/1/2011	5:19:19 PM	BCl3 valve closed
11/1/2011	5:19:19 PM	PH3 valve closed
11/1/2011	5:19:19 PM	SiCl4 pre valve closed
11/1/2011	5:19:19 PM	SiCl4 post valve closed
11/1/2011	5:19:19 PM	Main Vac valve closed
11/1/2011	5:19:19 PM	Bypass valve closed
11/1/2011	5:19:19 PM	H2 valve opened
11/1/2011	5:19:19 PM	Bubbler valve opened
11/1/2011	5:19:19 PM	Helium MFC set to  0.000000
11/1/2011	5:19:19 PM	H2 MFC set to  500.000000
11/1/2011	5:19:19 PM	BCl3 MFC set to  0.000000
11/1/2011	5:19:19 PM	PHl3 MFC set to  0.000000
11/1/2011	5:19:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	5:19:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	5:19:19 PM	Tube furnace set to 950
11/1/2011	5:22:19 PM	H2 valve closed
11/1/2011	5:22:19 PM	BCl3 valve closed
11/1/2011	5:22:19 PM	PH3 valve closed
11/1/2011	5:22:19 PM	SiCl4 pre valve closed
11/1/2011	5:22:19 PM	SiCl4 post valve closed
11/1/2011	5:22:19 PM	Main Vac valve closed
11/1/2011	5:22:19 PM	Bypass valve closed
11/1/2011	5:22:19 PM	Helium valve opened
11/1/2011	5:22:19 PM	Bubbler valve opened
11/1/2011	5:22:19 PM	Helium MFC set to  500.000000
11/1/2011	5:22:19 PM	H2 MFC set to  0.000000
11/1/2011	5:22:19 PM	BCl3 MFC set to  0.000000
11/1/2011	5:22:19 PM	PHl3 MFC set to  0.000000
11/1/2011	5:22:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	5:22:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	5:22:19 PM	Tube furnace set to 900
11/1/2011	5:25:19 PM	H2 valve closed
11/1/2011	5:25:19 PM	BCl3 valve closed
11/1/2011	5:25:19 PM	PH3 valve closed
11/1/2011	5:25:19 PM	SiCl4 pre valve closed
11/1/2011	5:25:19 PM	SiCl4 post valve closed
11/1/2011	5:25:19 PM	Main Vac valve closed
11/1/2011	5:25:19 PM	Bypass valve closed
11/1/2011	5:25:19 PM	Helium valve opened
11/1/2011	5:25:19 PM	Bubbler valve opened
11/1/2011	5:25:19 PM	Helium MFC set to  500.000000
11/1/2011	5:25:19 PM	H2 MFC set to  0.000000
11/1/2011	5:25:19 PM	BCl3 MFC set to  0.000000
11/1/2011	5:25:19 PM	PHl3 MFC set to  0.000000
11/1/2011	5:25:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	5:25:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	5:25:19 PM	Tube furnace set to 850
11/1/2011	5:28:19 PM	H2 valve closed
11/1/2011	5:28:19 PM	BCl3 valve closed
11/1/2011	5:28:19 PM	PH3 valve closed
11/1/2011	5:28:19 PM	SiCl4 pre valve closed
11/1/2011	5:28:19 PM	SiCl4 post valve closed
11/1/2011	5:28:19 PM	Main Vac valve closed
11/1/2011	5:28:19 PM	Bypass valve closed
11/1/2011	5:28:19 PM	Helium valve opened
11/1/2011	5:28:19 PM	Bubbler valve opened
11/1/2011	5:28:19 PM	Helium MFC set to  500.000000
11/1/2011	5:28:19 PM	H2 MFC set to  0.000000
11/1/2011	5:28:19 PM	BCl3 MFC set to  0.000000
11/1/2011	5:28:19 PM	PHl3 MFC set to  0.000000
11/1/2011	5:28:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	5:28:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	5:28:19 PM	Tube furnace set to 800
11/1/2011	5:31:19 PM	H2 valve closed
11/1/2011	5:31:19 PM	BCl3 valve closed
11/1/2011	5:31:19 PM	PH3 valve closed
11/1/2011	5:31:19 PM	SiCl4 pre valve closed
11/1/2011	5:31:19 PM	SiCl4 post valve closed
11/1/2011	5:31:19 PM	Main Vac valve closed
11/1/2011	5:31:19 PM	Bypass valve closed
11/1/2011	5:31:19 PM	Helium valve opened
11/1/2011	5:31:19 PM	Bubbler valve opened
11/1/2011	5:31:19 PM	Helium MFC set to  500.000000
11/1/2011	5:31:19 PM	H2 MFC set to  0.000000
11/1/2011	5:31:19 PM	BCl3 MFC set to  0.000000
11/1/2011	5:31:19 PM	PHl3 MFC set to  0.000000
11/1/2011	5:31:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	5:31:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	5:31:20 PM	Tube furnace set to 750
11/1/2011	5:34:20 PM	H2 valve closed
11/1/2011	5:34:20 PM	BCl3 valve closed
11/1/2011	5:34:20 PM	PH3 valve closed
11/1/2011	5:34:20 PM	SiCl4 pre valve closed
11/1/2011	5:34:20 PM	SiCl4 post valve closed
11/1/2011	5:34:20 PM	Main Vac valve closed
11/1/2011	5:34:20 PM	Bypass valve closed
11/1/2011	5:34:20 PM	Helium valve opened
11/1/2011	5:34:20 PM	Bubbler valve opened
11/1/2011	5:34:20 PM	Helium MFC set to  500.000000
11/1/2011	5:34:20 PM	H2 MFC set to  0.000000
11/1/2011	5:34:20 PM	BCl3 MFC set to  0.000000
11/1/2011	5:34:20 PM	PHl3 MFC set to  0.000000
11/1/2011	5:34:20 PM	SiCl4 MFC set to  0.000000
11/1/2011	5:34:20 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	5:34:20 PM	Tube furnace set to 0
11/1/2011	5:39:52 PM	Helium valve closed
11/1/2011	5:39:52 PM	H2 valve closed
11/1/2011	5:39:52 PM	BCl3 valve closed
11/1/2011	5:39:52 PM	PH3 valve closed
11/1/2011	5:39:52 PM	SiCl4 pre valve closed
11/1/2011	5:39:52 PM	SiCl4 post valve closed
11/1/2011	5:39:52 PM	Main Vac valve closed
11/1/2011	5:39:52 PM	Bubbler valve closed
11/1/2011	5:39:52 PM	Bypass valve closed
11/1/2011	5:39:52 PM	Helium MFC set to  0.000000
11/1/2011	5:39:52 PM	H2 MFC set to  0.000000
11/1/2011	5:39:52 PM	BCl3 MFC set to  0.000000
11/1/2011	5:39:52 PM	PHl3 MFC set to  0.000000
11/1/2011	5:39:52 PM	SiCl4 MFC set to  0.000000
11/1/2011	5:39:52 PM	Bypass solenoid MFC set to  760.000000
11/1/2011	5:39:52 PM	Tube furnace set to 0
11/1/2011	5:39:52 PM	Baratron reads 739.276665 Torr and NaOH valve is open.  Emergency exit.
11/1/2011	5:42:47 PM	Run aborted at 5:42 PM
11/1/2011	5:42:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	5:42:49 PM	Recipe started at 5:42 PM
11/1/2011	5:42:49 PM	Helium valve closed
11/1/2011	5:42:49 PM	H2 valve closed
11/1/2011	5:42:49 PM	BCl3 valve closed
11/1/2011	5:42:49 PM	PH3 valve closed
11/1/2011	5:42:49 PM	SiCl4 pre valve closed
11/1/2011	5:42:49 PM	SiCl4 post valve closed
11/1/2011	5:42:49 PM	Main Vac valve closed
11/1/2011	5:42:49 PM	Bubbler valve closed
11/1/2011	5:42:49 PM	Bypass valve opened
11/1/2011	5:42:49 PM	Helium MFC set to  0.000000
11/1/2011	5:42:49 PM	H2 MFC set to  0.000000
11/1/2011	5:42:49 PM	BCl3 MFC set to  0.000000
11/1/2011	5:42:49 PM	PHl3 MFC set to  0.000000
11/1/2011	5:42:49 PM	SiCl4 MFC set to  0.000000
11/1/2011	5:42:49 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	5:42:50 PM	Tube furnace set to 0
11/1/2011	5:43:48 PM	Helium valve closed
11/1/2011	5:43:48 PM	H2 valve closed
11/1/2011	5:43:48 PM	BCl3 valve closed
11/1/2011	5:43:48 PM	PH3 valve closed
11/1/2011	5:43:48 PM	SiCl4 pre valve closed
11/1/2011	5:43:48 PM	SiCl4 post valve closed
11/1/2011	5:43:48 PM	Main Vac valve closed
11/1/2011	5:43:48 PM	Bubbler valve closed
11/1/2011	5:43:48 PM	Bypass valve opened
11/1/2011	5:43:48 PM	Helium MFC set to  0.000000
11/1/2011	5:43:48 PM	H2 MFC set to  0.000000
11/1/2011	5:43:48 PM	BCl3 MFC set to  0.000000
11/1/2011	5:43:48 PM	PHl3 MFC set to  0.000000
11/1/2011	5:43:48 PM	SiCl4 MFC set to  0.000000
11/1/2011	5:43:48 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	5:43:48 PM	Tube furnace set to 0
11/1/2011	5:44:48 PM	Helium valve closed
11/1/2011	5:44:48 PM	H2 valve closed
11/1/2011	5:44:48 PM	BCl3 valve closed
11/1/2011	5:44:48 PM	PH3 valve closed
11/1/2011	5:44:48 PM	SiCl4 pre valve closed
11/1/2011	5:44:48 PM	SiCl4 post valve closed
11/1/2011	5:44:48 PM	Bypass valve closed
11/1/2011	5:44:48 PM	Bubbler valve closed
11/1/2011	5:44:48 PM	Main Vac valve opened
11/1/2011	5:44:48 PM	Helium MFC set to  0.000000
11/1/2011	5:44:48 PM	H2 MFC set to  0.000000
11/1/2011	5:44:48 PM	BCl3 MFC set to  0.000000
11/1/2011	5:44:48 PM	PHl3 MFC set to  0.000000
11/1/2011	5:44:48 PM	SiCl4 MFC set to  0.000000
11/1/2011	5:44:48 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	5:44:49 PM	Tube furnace set to 0
11/1/2011	5:44:50 PM	Run finished at 5:44 PM
11/1/2011	5:44:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	6:02:14 PM	Recipe started at 6:02 PM
11/1/2011	6:02:14 PM	Helium valve closed
11/1/2011	6:02:14 PM	H2 valve closed
11/1/2011	6:02:14 PM	BCl3 valve closed
11/1/2011	6:02:14 PM	PH3 valve closed
11/1/2011	6:02:14 PM	SiCl4 pre valve closed
11/1/2011	6:02:14 PM	SiCl4 post valve closed
11/1/2011	6:02:14 PM	Bypass valve closed
11/1/2011	6:02:14 PM	Bubbler valve closed
11/1/2011	6:02:14 PM	Main Vac valve opened
11/1/2011	6:02:14 PM	Helium MFC set to  0.000000
11/1/2011	6:02:14 PM	H2 MFC set to  0.000000
11/1/2011	6:02:14 PM	BCl3 MFC set to  0.000000
11/1/2011	6:02:14 PM	PHl3 MFC set to  0.000000
11/1/2011	6:02:14 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:02:14 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:02:14 PM	Tube furnace set to 150
11/1/2011	6:02:18 PM	H2 valve closed
11/1/2011	6:02:18 PM	BCl3 valve closed
11/1/2011	6:02:18 PM	PH3 valve closed
11/1/2011	6:02:18 PM	SiCl4 pre valve closed
11/1/2011	6:02:18 PM	SiCl4 post valve closed
11/1/2011	6:02:18 PM	Bypass valve closed
11/1/2011	6:02:18 PM	Bubbler valve closed
11/1/2011	6:02:18 PM	Helium valve opened
11/1/2011	6:02:18 PM	Main Vac valve opened
11/1/2011	6:02:18 PM	Helium MFC set to  20.000000
11/1/2011	6:02:18 PM	H2 MFC set to  0.000000
11/1/2011	6:02:18 PM	BCl3 MFC set to  0.000000
11/1/2011	6:02:18 PM	PHl3 MFC set to  0.000000
11/1/2011	6:02:18 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:02:18 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:02:18 PM	Tube furnace set to 150
11/1/2011	6:02:48 PM	Helium valve closed
11/1/2011	6:02:48 PM	H2 valve closed
11/1/2011	6:02:48 PM	BCl3 valve closed
11/1/2011	6:02:48 PM	PH3 valve closed
11/1/2011	6:02:48 PM	SiCl4 pre valve closed
11/1/2011	6:02:48 PM	SiCl4 post valve closed
11/1/2011	6:02:48 PM	Bypass valve closed
11/1/2011	6:02:48 PM	Bubbler valve closed
11/1/2011	6:02:48 PM	Main Vac valve opened
11/1/2011	6:02:48 PM	Helium MFC set to  0.000000
11/1/2011	6:02:48 PM	H2 MFC set to  0.000000
11/1/2011	6:02:48 PM	BCl3 MFC set to  0.000000
11/1/2011	6:02:48 PM	PHl3 MFC set to  0.000000
11/1/2011	6:02:48 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:02:48 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:02:49 PM	Tube furnace set to 150
11/1/2011	6:03:19 PM	H2 valve closed
11/1/2011	6:03:19 PM	BCl3 valve closed
11/1/2011	6:03:19 PM	PH3 valve closed
11/1/2011	6:03:19 PM	SiCl4 pre valve closed
11/1/2011	6:03:19 PM	SiCl4 post valve closed
11/1/2011	6:03:19 PM	Bypass valve closed
11/1/2011	6:03:19 PM	Bubbler valve closed
11/1/2011	6:03:19 PM	Helium valve opened
11/1/2011	6:03:19 PM	Main Vac valve opened
11/1/2011	6:03:19 PM	Helium MFC set to  20.000000
11/1/2011	6:03:19 PM	H2 MFC set to  0.000000
11/1/2011	6:03:19 PM	BCl3 MFC set to  0.000000
11/1/2011	6:03:19 PM	PHl3 MFC set to  0.000000
11/1/2011	6:03:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:03:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:03:19 PM	Tube furnace set to 150
11/1/2011	6:03:49 PM	Helium valve closed
11/1/2011	6:03:49 PM	H2 valve closed
11/1/2011	6:03:49 PM	BCl3 valve closed
11/1/2011	6:03:49 PM	PH3 valve closed
11/1/2011	6:03:49 PM	SiCl4 pre valve closed
11/1/2011	6:03:49 PM	SiCl4 post valve closed
11/1/2011	6:03:49 PM	Bypass valve closed
11/1/2011	6:03:49 PM	Bubbler valve closed
11/1/2011	6:03:49 PM	Main Vac valve opened
11/1/2011	6:03:49 PM	Helium MFC set to  0.000000
11/1/2011	6:03:49 PM	H2 MFC set to  0.000000
11/1/2011	6:03:49 PM	BCl3 MFC set to  0.000000
11/1/2011	6:03:49 PM	PHl3 MFC set to  0.000000
11/1/2011	6:03:49 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:03:49 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:03:49 PM	Tube furnace set to 150
11/1/2011	6:04:19 PM	H2 valve closed
11/1/2011	6:04:19 PM	BCl3 valve closed
11/1/2011	6:04:19 PM	PH3 valve closed
11/1/2011	6:04:19 PM	SiCl4 pre valve closed
11/1/2011	6:04:19 PM	SiCl4 post valve closed
11/1/2011	6:04:19 PM	Bypass valve closed
11/1/2011	6:04:19 PM	Bubbler valve closed
11/1/2011	6:04:19 PM	Helium valve opened
11/1/2011	6:04:19 PM	Main Vac valve opened
11/1/2011	6:04:19 PM	Helium MFC set to  20.000000
11/1/2011	6:04:19 PM	H2 MFC set to  0.000000
11/1/2011	6:04:19 PM	BCl3 MFC set to  0.000000
11/1/2011	6:04:19 PM	PHl3 MFC set to  0.000000
11/1/2011	6:04:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:04:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:04:19 PM	Tube furnace set to 150
11/1/2011	6:04:49 PM	Helium valve closed
11/1/2011	6:04:49 PM	H2 valve closed
11/1/2011	6:04:49 PM	BCl3 valve closed
11/1/2011	6:04:49 PM	PH3 valve closed
11/1/2011	6:04:49 PM	SiCl4 pre valve closed
11/1/2011	6:04:49 PM	SiCl4 post valve closed
11/1/2011	6:04:49 PM	Bypass valve closed
11/1/2011	6:04:49 PM	Bubbler valve closed
11/1/2011	6:04:49 PM	Main Vac valve opened
11/1/2011	6:04:49 PM	Helium MFC set to  0.000000
11/1/2011	6:04:49 PM	H2 MFC set to  0.000000
11/1/2011	6:04:49 PM	BCl3 MFC set to  0.000000
11/1/2011	6:04:49 PM	PHl3 MFC set to  0.000000
11/1/2011	6:04:49 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:04:49 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:04:49 PM	Tube furnace set to 150
11/1/2011	6:05:19 PM	H2 valve closed
11/1/2011	6:05:19 PM	BCl3 valve closed
11/1/2011	6:05:19 PM	PH3 valve closed
11/1/2011	6:05:19 PM	SiCl4 pre valve closed
11/1/2011	6:05:19 PM	SiCl4 post valve closed
11/1/2011	6:05:19 PM	Bypass valve closed
11/1/2011	6:05:19 PM	Bubbler valve closed
11/1/2011	6:05:19 PM	Helium valve opened
11/1/2011	6:05:19 PM	Main Vac valve opened
11/1/2011	6:05:19 PM	Helium MFC set to  20.000000
11/1/2011	6:05:19 PM	H2 MFC set to  0.000000
11/1/2011	6:05:19 PM	BCl3 MFC set to  0.000000
11/1/2011	6:05:19 PM	PHl3 MFC set to  0.000000
11/1/2011	6:05:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:05:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:05:20 PM	Tube furnace set to 150
11/1/2011	6:05:50 PM	Helium valve closed
11/1/2011	6:05:50 PM	H2 valve closed
11/1/2011	6:05:50 PM	BCl3 valve closed
11/1/2011	6:05:50 PM	PH3 valve closed
11/1/2011	6:05:50 PM	SiCl4 pre valve closed
11/1/2011	6:05:50 PM	SiCl4 post valve closed
11/1/2011	6:05:50 PM	Bypass valve closed
11/1/2011	6:05:50 PM	Bubbler valve closed
11/1/2011	6:05:50 PM	Main Vac valve opened
11/1/2011	6:05:50 PM	Helium MFC set to  0.000000
11/1/2011	6:05:50 PM	H2 MFC set to  0.000000
11/1/2011	6:05:50 PM	BCl3 MFC set to  0.000000
11/1/2011	6:05:50 PM	PHl3 MFC set to  0.000000
11/1/2011	6:05:50 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:05:50 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:05:50 PM	Tube furnace set to 150
11/1/2011	6:06:20 PM	H2 valve closed
11/1/2011	6:06:20 PM	BCl3 valve closed
11/1/2011	6:06:20 PM	PH3 valve closed
11/1/2011	6:06:20 PM	SiCl4 pre valve closed
11/1/2011	6:06:20 PM	SiCl4 post valve closed
11/1/2011	6:06:20 PM	Bypass valve closed
11/1/2011	6:06:20 PM	Bubbler valve closed
11/1/2011	6:06:20 PM	Helium valve opened
11/1/2011	6:06:20 PM	Main Vac valve opened
11/1/2011	6:06:20 PM	Helium MFC set to  20.000000
11/1/2011	6:06:20 PM	H2 MFC set to  0.000000
11/1/2011	6:06:20 PM	BCl3 MFC set to  0.000000
11/1/2011	6:06:20 PM	PHl3 MFC set to  0.000000
11/1/2011	6:06:20 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:06:20 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:06:20 PM	Tube furnace set to 150
11/1/2011	6:06:50 PM	Helium valve closed
11/1/2011	6:06:50 PM	H2 valve closed
11/1/2011	6:06:50 PM	BCl3 valve closed
11/1/2011	6:06:50 PM	PH3 valve closed
11/1/2011	6:06:50 PM	SiCl4 pre valve closed
11/1/2011	6:06:50 PM	SiCl4 post valve closed
11/1/2011	6:06:50 PM	Bypass valve closed
11/1/2011	6:06:50 PM	Bubbler valve closed
11/1/2011	6:06:50 PM	Main Vac valve opened
11/1/2011	6:06:50 PM	Helium MFC set to  0.000000
11/1/2011	6:06:50 PM	H2 MFC set to  0.000000
11/1/2011	6:06:50 PM	BCl3 MFC set to  0.000000
11/1/2011	6:06:50 PM	PHl3 MFC set to  0.000000
11/1/2011	6:06:50 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:06:50 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:06:50 PM	Tube furnace set to 150
11/1/2011	6:07:19 PM	Run aborted at 6:07 PM
11/1/2011	6:07:19 PM	Helium valve closed
11/1/2011	6:07:19 PM	H2 valve closed
11/1/2011	6:07:19 PM	BCl3 valve closed
11/1/2011	6:07:19 PM	PH3 valve closed
11/1/2011	6:07:19 PM	SiCl4 pre valve closed
11/1/2011	6:07:19 PM	SiCl4 post valve closed
11/1/2011	6:07:19 PM	Bypass valve closed
11/1/2011	6:07:19 PM	Main Vac valve closed
11/1/2011	6:07:19 PM	Bubbler valve closed
11/1/2011	6:07:19 PM	Helium MFC set to  0.000000
11/1/2011	6:07:19 PM	H2 MFC set to  0.000000
11/1/2011	6:07:19 PM	BCl3 MFC set to  0.000000
11/1/2011	6:07:19 PM	PHl3 MFC set to  0.000000
11/1/2011	6:07:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:07:19 PM	Tube furnace set to 0
11/1/2011	6:07:31 PM	Main Vac valve opened
11/1/2011	6:07:36 PM	Main Vac valve closed
11/1/2011	6:07:39 PM	Helium MFC set to  500.000000
11/1/2011	6:07:41 PM	Helium valve opened
11/1/2011	6:08:07 PM	Helium valve closed
11/1/2011	6:08:08 PM	Bypass valve opened
11/1/2011	6:09:12 PM	Bypass valve closed
11/1/2011	6:09:12 PM	Main Vac valve opened
11/1/2011	6:09:43 PM	Helium MFC set to  10.000000
11/1/2011	6:09:45 PM	Helium valve opened
11/1/2011	6:10:58 PM	Helium valve closed
11/1/2011	6:11:39 PM	Main Vac valve closed
11/1/2011	6:11:52 PM	Main Vac valve opened
11/1/2011	6:11:56 PM	Helium valve opened
11/1/2011	6:14:16 PM	Helium valve closed
11/1/2011	6:14:57 PM	Recipe started at 6:14 PM
11/1/2011	6:14:57 PM	Helium valve closed
11/1/2011	6:14:57 PM	H2 valve closed
11/1/2011	6:14:57 PM	BCl3 valve closed
11/1/2011	6:14:57 PM	PH3 valve closed
11/1/2011	6:14:57 PM	SiCl4 pre valve closed
11/1/2011	6:14:57 PM	SiCl4 post valve closed
11/1/2011	6:14:57 PM	Main Vac valve closed
11/1/2011	6:14:57 PM	Bypass valve closed
11/1/2011	6:14:57 PM	Bubbler valve closed
11/1/2011	6:14:57 PM	Helium MFC set to  0.000000
11/1/2011	6:14:57 PM	H2 MFC set to  0.000000
11/1/2011	6:14:57 PM	BCl3 MFC set to  0.000000
11/1/2011	6:14:57 PM	PHl3 MFC set to  0.000000
11/1/2011	6:14:57 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:14:57 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:14:57 PM	Tube furnace set to 0
11/1/2011	6:15:00 PM	Helium valve closed
11/1/2011	6:15:00 PM	BCl3 valve closed
11/1/2011	6:15:00 PM	PH3 valve closed
11/1/2011	6:15:00 PM	SiCl4 pre valve closed
11/1/2011	6:15:00 PM	SiCl4 post valve closed
11/1/2011	6:15:00 PM	Main Vac valve closed
11/1/2011	6:15:00 PM	Bypass valve closed
11/1/2011	6:15:00 PM	Bubbler valve closed
11/1/2011	6:15:00 PM	H2 valve opened
11/1/2011	6:15:00 PM	Helium MFC set to  0.000000
11/1/2011	6:15:00 PM	H2 MFC set to  500.000000
11/1/2011	6:15:00 PM	BCl3 MFC set to  0.000000
11/1/2011	6:15:00 PM	PHl3 MFC set to  0.000000
11/1/2011	6:15:00 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:15:00 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:15:00 PM	Tube furnace set to 0
11/1/2011	6:16:02 PM	Helium valve closed
11/1/2011	6:16:02 PM	BCl3 valve closed
11/1/2011	6:16:02 PM	PH3 valve closed
11/1/2011	6:16:02 PM	SiCl4 pre valve closed
11/1/2011	6:16:02 PM	SiCl4 post valve closed
11/1/2011	6:16:02 PM	Main Vac valve closed
11/1/2011	6:16:02 PM	Bypass valve closed
11/1/2011	6:16:02 PM	H2 valve opened
11/1/2011	6:16:02 PM	Bubbler valve opened
11/1/2011	6:16:02 PM	Helium MFC set to  0.000000
11/1/2011	6:16:02 PM	H2 MFC set to  500.000000
11/1/2011	6:16:02 PM	BCl3 MFC set to  0.000000
11/1/2011	6:16:02 PM	PHl3 MFC set to  0.000000
11/1/2011	6:16:02 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:16:02 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:16:02 PM	Tube furnace set to 0
11/1/2011	6:16:03 PM	Helium valve closed
11/1/2011	6:16:03 PM	BCl3 valve closed
11/1/2011	6:16:03 PM	PH3 valve closed
11/1/2011	6:16:03 PM	SiCl4 pre valve closed
11/1/2011	6:16:03 PM	SiCl4 post valve closed
11/1/2011	6:16:03 PM	Main Vac valve closed
11/1/2011	6:16:03 PM	Bypass valve closed
11/1/2011	6:16:03 PM	H2 valve opened
11/1/2011	6:16:03 PM	Bubbler valve opened
11/1/2011	6:16:03 PM	Helium MFC set to  0.000000
11/1/2011	6:16:03 PM	H2 MFC set to  500.000000
11/1/2011	6:16:03 PM	BCl3 MFC set to  0.000000
11/1/2011	6:16:03 PM	PHl3 MFC set to  0.000000
11/1/2011	6:16:03 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:16:03 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:16:03 PM	Tube furnace set to 1020
11/1/2011	6:36:03 PM	Helium valve closed
11/1/2011	6:36:03 PM	BCl3 valve closed
11/1/2011	6:36:03 PM	PH3 valve closed
11/1/2011	6:36:03 PM	Main Vac valve closed
11/1/2011	6:36:03 PM	Bypass valve closed
11/1/2011	6:36:03 PM	H2 valve opened
11/1/2011	6:36:03 PM	SiCl4 pre valve opened
11/1/2011	6:36:03 PM	SiCl4 post valve opened
11/1/2011	6:36:03 PM	Bubbler valve opened
11/1/2011	6:36:03 PM	Helium MFC set to  0.000000
11/1/2011	6:36:03 PM	H2 MFC set to  500.000000
11/1/2011	6:36:03 PM	BCl3 MFC set to  0.000000
11/1/2011	6:36:03 PM	PHl3 MFC set to  0.000000
11/1/2011	6:36:03 PM	SiCl4 MFC set to  50.000000
11/1/2011	6:36:03 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:36:03 PM	Tube furnace set to 1020
11/1/2011	6:56:03 PM	Helium valve closed
11/1/2011	6:56:03 PM	BCl3 valve closed
11/1/2011	6:56:03 PM	PH3 valve closed
11/1/2011	6:56:03 PM	SiCl4 pre valve closed
11/1/2011	6:56:03 PM	SiCl4 post valve closed
11/1/2011	6:56:03 PM	Main Vac valve closed
11/1/2011	6:56:03 PM	Bypass valve closed
11/1/2011	6:56:03 PM	H2 valve opened
11/1/2011	6:56:03 PM	Bubbler valve opened
11/1/2011	6:56:03 PM	Helium MFC set to  0.000000
11/1/2011	6:56:03 PM	H2 MFC set to  500.000000
11/1/2011	6:56:03 PM	BCl3 MFC set to  0.000000
11/1/2011	6:56:03 PM	PHl3 MFC set to  0.000000
11/1/2011	6:56:03 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:56:03 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:56:03 PM	Tube furnace set to 950
11/1/2011	6:59:03 PM	H2 valve closed
11/1/2011	6:59:03 PM	BCl3 valve closed
11/1/2011	6:59:03 PM	PH3 valve closed
11/1/2011	6:59:03 PM	SiCl4 pre valve closed
11/1/2011	6:59:03 PM	SiCl4 post valve closed
11/1/2011	6:59:03 PM	Main Vac valve closed
11/1/2011	6:59:03 PM	Bypass valve closed
11/1/2011	6:59:03 PM	Helium valve opened
11/1/2011	6:59:03 PM	Bubbler valve opened
11/1/2011	6:59:03 PM	Helium MFC set to  500.000000
11/1/2011	6:59:03 PM	H2 MFC set to  0.000000
11/1/2011	6:59:03 PM	BCl3 MFC set to  0.000000
11/1/2011	6:59:03 PM	PHl3 MFC set to  0.000000
11/1/2011	6:59:03 PM	SiCl4 MFC set to  0.000000
11/1/2011	6:59:03 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	6:59:03 PM	Tube furnace set to 900
11/1/2011	7:02:03 PM	H2 valve closed
11/1/2011	7:02:03 PM	BCl3 valve closed
11/1/2011	7:02:03 PM	PH3 valve closed
11/1/2011	7:02:03 PM	SiCl4 pre valve closed
11/1/2011	7:02:03 PM	SiCl4 post valve closed
11/1/2011	7:02:03 PM	Main Vac valve closed
11/1/2011	7:02:03 PM	Bypass valve closed
11/1/2011	7:02:03 PM	Helium valve opened
11/1/2011	7:02:03 PM	Bubbler valve opened
11/1/2011	7:02:03 PM	Helium MFC set to  500.000000
11/1/2011	7:02:03 PM	H2 MFC set to  0.000000
11/1/2011	7:02:03 PM	BCl3 MFC set to  0.000000
11/1/2011	7:02:04 PM	PHl3 MFC set to  0.000000
11/1/2011	7:02:04 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:02:04 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:02:04 PM	Tube furnace set to 850
11/1/2011	7:05:04 PM	H2 valve closed
11/1/2011	7:05:04 PM	BCl3 valve closed
11/1/2011	7:05:04 PM	PH3 valve closed
11/1/2011	7:05:04 PM	SiCl4 pre valve closed
11/1/2011	7:05:04 PM	SiCl4 post valve closed
11/1/2011	7:05:04 PM	Main Vac valve closed
11/1/2011	7:05:04 PM	Bypass valve closed
11/1/2011	7:05:04 PM	Helium valve opened
11/1/2011	7:05:04 PM	Bubbler valve opened
11/1/2011	7:05:04 PM	Helium MFC set to  500.000000
11/1/2011	7:05:04 PM	H2 MFC set to  0.000000
11/1/2011	7:05:04 PM	BCl3 MFC set to  0.000000
11/1/2011	7:05:04 PM	PHl3 MFC set to  0.000000
11/1/2011	7:05:04 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:05:04 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:05:04 PM	Tube furnace set to 800
11/1/2011	7:08:04 PM	H2 valve closed
11/1/2011	7:08:04 PM	BCl3 valve closed
11/1/2011	7:08:04 PM	PH3 valve closed
11/1/2011	7:08:04 PM	SiCl4 pre valve closed
11/1/2011	7:08:04 PM	SiCl4 post valve closed
11/1/2011	7:08:04 PM	Main Vac valve closed
11/1/2011	7:08:04 PM	Bypass valve closed
11/1/2011	7:08:04 PM	Helium valve opened
11/1/2011	7:08:04 PM	Bubbler valve opened
11/1/2011	7:08:04 PM	Helium MFC set to  500.000000
11/1/2011	7:08:04 PM	H2 MFC set to  0.000000
11/1/2011	7:08:04 PM	BCl3 MFC set to  0.000000
11/1/2011	7:08:04 PM	PHl3 MFC set to  0.000000
11/1/2011	7:08:04 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:08:04 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:08:04 PM	Tube furnace set to 750
11/1/2011	7:11:04 PM	H2 valve closed
11/1/2011	7:11:04 PM	BCl3 valve closed
11/1/2011	7:11:04 PM	PH3 valve closed
11/1/2011	7:11:04 PM	SiCl4 pre valve closed
11/1/2011	7:11:04 PM	SiCl4 post valve closed
11/1/2011	7:11:04 PM	Main Vac valve closed
11/1/2011	7:11:04 PM	Bypass valve closed
11/1/2011	7:11:04 PM	Helium valve opened
11/1/2011	7:11:04 PM	Bubbler valve opened
11/1/2011	7:11:04 PM	Helium MFC set to  500.000000
11/1/2011	7:11:04 PM	H2 MFC set to  0.000000
11/1/2011	7:11:04 PM	BCl3 MFC set to  0.000000
11/1/2011	7:11:04 PM	PHl3 MFC set to  0.000000
11/1/2011	7:11:04 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:11:04 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:11:04 PM	Tube furnace set to 0
11/1/2011	7:19:45 PM	Helium valve closed
11/1/2011	7:19:45 PM	H2 valve closed
11/1/2011	7:19:45 PM	BCl3 valve closed
11/1/2011	7:19:45 PM	PH3 valve closed
11/1/2011	7:19:45 PM	SiCl4 pre valve closed
11/1/2011	7:19:45 PM	SiCl4 post valve closed
11/1/2011	7:19:45 PM	Main Vac valve closed
11/1/2011	7:19:45 PM	Bubbler valve closed
11/1/2011	7:19:45 PM	Bypass valve closed
11/1/2011	7:19:45 PM	Helium MFC set to  0.000000
11/1/2011	7:19:45 PM	H2 MFC set to  0.000000
11/1/2011	7:19:45 PM	BCl3 MFC set to  0.000000
11/1/2011	7:19:45 PM	PHl3 MFC set to  0.000000
11/1/2011	7:19:45 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:19:45 PM	Bypass solenoid MFC set to  760.000000
11/1/2011	7:19:45 PM	Tube furnace set to 0
11/1/2011	7:19:45 PM	Baratron reads 741.318321 Torr and NaOH valve is open.  Emergency exit.
11/1/2011	7:23:04 PM	Run aborted at 7:23 PM
11/1/2011	7:23:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	7:23:07 PM	Recipe started at 7:23 PM
11/1/2011	7:23:07 PM	Helium valve closed
11/1/2011	7:23:07 PM	H2 valve closed
11/1/2011	7:23:07 PM	BCl3 valve closed
11/1/2011	7:23:07 PM	PH3 valve closed
11/1/2011	7:23:07 PM	SiCl4 pre valve closed
11/1/2011	7:23:07 PM	SiCl4 post valve closed
11/1/2011	7:23:07 PM	Main Vac valve closed
11/1/2011	7:23:07 PM	Bubbler valve closed
11/1/2011	7:23:07 PM	Bypass valve opened
11/1/2011	7:23:07 PM	Helium MFC set to  0.000000
11/1/2011	7:23:07 PM	H2 MFC set to  0.000000
11/1/2011	7:23:07 PM	BCl3 MFC set to  0.000000
11/1/2011	7:23:07 PM	PHl3 MFC set to  0.000000
11/1/2011	7:23:07 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:23:07 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:23:07 PM	Tube furnace set to 0
11/1/2011	7:24:08 PM	Helium valve closed
11/1/2011	7:24:08 PM	H2 valve closed
11/1/2011	7:24:08 PM	BCl3 valve closed
11/1/2011	7:24:08 PM	PH3 valve closed
11/1/2011	7:24:08 PM	SiCl4 pre valve closed
11/1/2011	7:24:08 PM	SiCl4 post valve closed
11/1/2011	7:24:08 PM	Main Vac valve closed
11/1/2011	7:24:08 PM	Bubbler valve closed
11/1/2011	7:24:08 PM	Bypass valve opened
11/1/2011	7:24:08 PM	Helium MFC set to  0.000000
11/1/2011	7:24:08 PM	H2 MFC set to  0.000000
11/1/2011	7:24:08 PM	BCl3 MFC set to  0.000000
11/1/2011	7:24:08 PM	PHl3 MFC set to  0.000000
11/1/2011	7:24:08 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:24:08 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:24:08 PM	Tube furnace set to 0
11/1/2011	7:24:40 PM	Helium valve closed
11/1/2011	7:24:40 PM	H2 valve closed
11/1/2011	7:24:40 PM	BCl3 valve closed
11/1/2011	7:24:40 PM	PH3 valve closed
11/1/2011	7:24:40 PM	SiCl4 pre valve closed
11/1/2011	7:24:40 PM	SiCl4 post valve closed
11/1/2011	7:24:40 PM	Bypass valve closed
11/1/2011	7:24:40 PM	Bubbler valve closed
11/1/2011	7:24:40 PM	Main Vac valve opened
11/1/2011	7:24:40 PM	Helium MFC set to  0.000000
11/1/2011	7:24:40 PM	H2 MFC set to  0.000000
11/1/2011	7:24:40 PM	BCl3 MFC set to  0.000000
11/1/2011	7:24:40 PM	PHl3 MFC set to  0.000000
11/1/2011	7:24:40 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:24:40 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:24:40 PM	Tube furnace set to 0
11/1/2011	7:24:41 PM	Run finished at 7:24 PM
11/1/2011	7:24:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	7:25:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	7:25:51 PM	Recipe started at 7:25 PM
11/1/2011	7:25:51 PM	Helium valve closed
11/1/2011	7:25:51 PM	H2 valve closed
11/1/2011	7:25:51 PM	BCl3 valve closed
11/1/2011	7:25:51 PM	PH3 valve closed
11/1/2011	7:25:51 PM	SiCl4 pre valve closed
11/1/2011	7:25:51 PM	SiCl4 post valve closed
11/1/2011	7:25:51 PM	Main Vac valve closed
11/1/2011	7:25:51 PM	Bypass valve closed
11/1/2011	7:25:51 PM	Bubbler valve closed
11/1/2011	7:25:51 PM	Helium MFC set to  0.000000
11/1/2011	7:25:51 PM	H2 MFC set to  0.000000
11/1/2011	7:25:51 PM	BCl3 MFC set to  0.000000
11/1/2011	7:25:51 PM	PHl3 MFC set to  0.000000
11/1/2011	7:25:51 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:25:51 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:25:51 PM	Tube furnace set to 0
11/1/2011	7:25:54 PM	H2 valve closed
11/1/2011	7:25:54 PM	BCl3 valve closed
11/1/2011	7:25:54 PM	PH3 valve closed
11/1/2011	7:25:54 PM	SiCl4 pre valve closed
11/1/2011	7:25:54 PM	SiCl4 post valve closed
11/1/2011	7:25:54 PM	Main Vac valve closed
11/1/2011	7:25:54 PM	Bypass valve closed
11/1/2011	7:25:54 PM	Bubbler valve closed
11/1/2011	7:25:54 PM	Helium valve opened
11/1/2011	7:25:54 PM	Helium MFC set to  500.000000
11/1/2011	7:25:54 PM	H2 MFC set to  0.000000
11/1/2011	7:25:54 PM	BCl3 MFC set to  0.000000
11/1/2011	7:25:54 PM	PHl3 MFC set to  0.000000
11/1/2011	7:25:54 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:25:54 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:25:54 PM	Tube furnace set to 0
11/1/2011	7:26:46 PM	Helium valve closed
11/1/2011	7:26:46 PM	H2 valve closed
11/1/2011	7:26:46 PM	BCl3 valve closed
11/1/2011	7:26:46 PM	PH3 valve closed
11/1/2011	7:26:46 PM	SiCl4 pre valve closed
11/1/2011	7:26:46 PM	SiCl4 post valve closed
11/1/2011	7:26:46 PM	Main Vac valve closed
11/1/2011	7:26:46 PM	Bypass valve closed
11/1/2011	7:26:46 PM	Bubbler valve closed
11/1/2011	7:26:46 PM	Helium MFC set to  0.000000
11/1/2011	7:26:46 PM	H2 MFC set to  0.000000
11/1/2011	7:26:46 PM	BCl3 MFC set to  0.000000
11/1/2011	7:26:46 PM	PHl3 MFC set to  0.000000
11/1/2011	7:26:46 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:26:46 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:26:46 PM	Tube furnace set to 0
11/1/2011	7:26:47 PM	Run finished at 7:26 PM
11/1/2011	7:26:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	7:26:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	7:26:49 PM	Recipe started at 7:26 PM
11/1/2011	7:26:49 PM	Helium valve closed
11/1/2011	7:26:49 PM	H2 valve closed
11/1/2011	7:26:49 PM	BCl3 valve closed
11/1/2011	7:26:49 PM	PH3 valve closed
11/1/2011	7:26:49 PM	SiCl4 pre valve closed
11/1/2011	7:26:49 PM	SiCl4 post valve closed
11/1/2011	7:26:49 PM	Main Vac valve closed
11/1/2011	7:26:49 PM	Bypass valve closed
11/1/2011	7:26:49 PM	Bubbler valve closed
11/1/2011	7:26:49 PM	Helium MFC set to  0.000000
11/1/2011	7:26:49 PM	H2 MFC set to  0.000000
11/1/2011	7:26:49 PM	BCl3 MFC set to  0.000000
11/1/2011	7:26:49 PM	PHl3 MFC set to  0.000000
11/1/2011	7:26:49 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:26:49 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:26:49 PM	Tube furnace set to 0
11/1/2011	7:26:51 PM	Run aborted at 7:26 PM
11/1/2011	7:26:51 PM	Helium valve closed
11/1/2011	7:26:51 PM	H2 valve closed
11/1/2011	7:26:51 PM	BCl3 valve closed
11/1/2011	7:26:51 PM	PH3 valve closed
11/1/2011	7:26:51 PM	SiCl4 pre valve closed
11/1/2011	7:26:51 PM	SiCl4 post valve closed
11/1/2011	7:26:51 PM	Bypass valve closed
11/1/2011	7:26:51 PM	Main Vac valve closed
11/1/2011	7:26:51 PM	Bubbler valve closed
11/1/2011	7:26:51 PM	Helium MFC set to  0.000000
11/1/2011	7:26:51 PM	H2 MFC set to  0.000000
11/1/2011	7:26:51 PM	BCl3 MFC set to  0.000000
11/1/2011	7:26:51 PM	PHl3 MFC set to  0.000000
11/1/2011	7:26:51 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:26:51 PM	Tube furnace set to 0
11/1/2011	7:26:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2011	7:26:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	7:26:56 PM	Recipe started at 7:26 PM
11/1/2011	7:26:56 PM	Helium valve closed
11/1/2011	7:26:56 PM	H2 valve closed
11/1/2011	7:26:56 PM	BCl3 valve closed
11/1/2011	7:26:56 PM	PH3 valve closed
11/1/2011	7:26:56 PM	SiCl4 pre valve closed
11/1/2011	7:26:56 PM	SiCl4 post valve closed
11/1/2011	7:26:56 PM	Main Vac valve closed
11/1/2011	7:26:56 PM	Bubbler valve closed
11/1/2011	7:26:56 PM	Bypass valve opened
11/1/2011	7:26:56 PM	Helium MFC set to  0.000000
11/1/2011	7:26:56 PM	H2 MFC set to  0.000000
11/1/2011	7:26:56 PM	BCl3 MFC set to  0.000000
11/1/2011	7:26:56 PM	PHl3 MFC set to  0.000000
11/1/2011	7:26:56 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:26:56 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:26:56 PM	Tube furnace set to 0
11/1/2011	7:27:47 PM	Helium valve closed
11/1/2011	7:27:47 PM	H2 valve closed
11/1/2011	7:27:47 PM	BCl3 valve closed
11/1/2011	7:27:47 PM	PH3 valve closed
11/1/2011	7:27:47 PM	SiCl4 pre valve closed
11/1/2011	7:27:47 PM	SiCl4 post valve closed
11/1/2011	7:27:47 PM	Main Vac valve closed
11/1/2011	7:27:47 PM	Bubbler valve closed
11/1/2011	7:27:47 PM	Bypass valve opened
11/1/2011	7:27:47 PM	Helium MFC set to  0.000000
11/1/2011	7:27:47 PM	H2 MFC set to  0.000000
11/1/2011	7:27:47 PM	BCl3 MFC set to  0.000000
11/1/2011	7:27:47 PM	PHl3 MFC set to  0.000000
11/1/2011	7:27:47 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:27:47 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:27:47 PM	Tube furnace set to 0
11/1/2011	7:28:02 PM	Helium valve closed
11/1/2011	7:28:02 PM	H2 valve closed
11/1/2011	7:28:02 PM	BCl3 valve closed
11/1/2011	7:28:02 PM	PH3 valve closed
11/1/2011	7:28:02 PM	SiCl4 pre valve closed
11/1/2011	7:28:02 PM	SiCl4 post valve closed
11/1/2011	7:28:02 PM	Bypass valve closed
11/1/2011	7:28:02 PM	Bubbler valve closed
11/1/2011	7:28:02 PM	Main Vac valve opened
11/1/2011	7:28:02 PM	Helium MFC set to  0.000000
11/1/2011	7:28:02 PM	H2 MFC set to  0.000000
11/1/2011	7:28:02 PM	BCl3 MFC set to  0.000000
11/1/2011	7:28:02 PM	PHl3 MFC set to  0.000000
11/1/2011	7:28:02 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:28:02 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:28:02 PM	Tube furnace set to 0
11/1/2011	7:28:03 PM	Run finished at 7:28 PM
11/1/2011	7:28:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	7:29:11 PM	Recipe started at 7:29 PM
11/1/2011	7:29:11 PM	Helium valve closed
11/1/2011	7:29:11 PM	H2 valve closed
11/1/2011	7:29:11 PM	BCl3 valve closed
11/1/2011	7:29:11 PM	PH3 valve closed
11/1/2011	7:29:11 PM	SiCl4 pre valve closed
11/1/2011	7:29:11 PM	SiCl4 post valve closed
11/1/2011	7:29:11 PM	Bypass valve closed
11/1/2011	7:29:11 PM	Bubbler valve closed
11/1/2011	7:29:11 PM	Main Vac valve opened
11/1/2011	7:29:11 PM	Helium MFC set to  0.000000
11/1/2011	7:29:11 PM	H2 MFC set to  0.000000
11/1/2011	7:29:11 PM	BCl3 MFC set to  0.000000
11/1/2011	7:29:11 PM	PHl3 MFC set to  0.000000
11/1/2011	7:29:11 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:29:11 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:29:11 PM	Tube furnace set to 150
11/1/2011	7:29:15 PM	H2 valve closed
11/1/2011	7:29:15 PM	BCl3 valve closed
11/1/2011	7:29:15 PM	PH3 valve closed
11/1/2011	7:29:15 PM	SiCl4 pre valve closed
11/1/2011	7:29:15 PM	SiCl4 post valve closed
11/1/2011	7:29:15 PM	Bypass valve closed
11/1/2011	7:29:15 PM	Bubbler valve closed
11/1/2011	7:29:15 PM	Helium valve opened
11/1/2011	7:29:15 PM	Main Vac valve opened
11/1/2011	7:29:15 PM	Helium MFC set to  20.000000
11/1/2011	7:29:15 PM	H2 MFC set to  0.000000
11/1/2011	7:29:15 PM	BCl3 MFC set to  0.000000
11/1/2011	7:29:15 PM	PHl3 MFC set to  0.000000
11/1/2011	7:29:15 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:29:15 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:29:15 PM	Tube furnace set to 150
11/1/2011	7:29:45 PM	Helium valve closed
11/1/2011	7:29:45 PM	H2 valve closed
11/1/2011	7:29:45 PM	BCl3 valve closed
11/1/2011	7:29:45 PM	PH3 valve closed
11/1/2011	7:29:45 PM	SiCl4 pre valve closed
11/1/2011	7:29:45 PM	SiCl4 post valve closed
11/1/2011	7:29:45 PM	Bypass valve closed
11/1/2011	7:29:45 PM	Bubbler valve closed
11/1/2011	7:29:45 PM	Main Vac valve opened
11/1/2011	7:29:45 PM	Helium MFC set to  0.000000
11/1/2011	7:29:45 PM	H2 MFC set to  0.000000
11/1/2011	7:29:45 PM	BCl3 MFC set to  0.000000
11/1/2011	7:29:45 PM	PHl3 MFC set to  0.000000
11/1/2011	7:29:45 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:29:45 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:29:45 PM	Tube furnace set to 150
11/1/2011	7:30:15 PM	H2 valve closed
11/1/2011	7:30:15 PM	BCl3 valve closed
11/1/2011	7:30:15 PM	PH3 valve closed
11/1/2011	7:30:15 PM	SiCl4 pre valve closed
11/1/2011	7:30:15 PM	SiCl4 post valve closed
11/1/2011	7:30:15 PM	Bypass valve closed
11/1/2011	7:30:15 PM	Bubbler valve closed
11/1/2011	7:30:15 PM	Helium valve opened
11/1/2011	7:30:15 PM	Main Vac valve opened
11/1/2011	7:30:15 PM	Helium MFC set to  20.000000
11/1/2011	7:30:15 PM	H2 MFC set to  0.000000
11/1/2011	7:30:15 PM	BCl3 MFC set to  0.000000
11/1/2011	7:30:15 PM	PHl3 MFC set to  0.000000
11/1/2011	7:30:15 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:30:15 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:30:15 PM	Tube furnace set to 150
11/1/2011	7:30:45 PM	Helium valve closed
11/1/2011	7:30:45 PM	H2 valve closed
11/1/2011	7:30:45 PM	BCl3 valve closed
11/1/2011	7:30:45 PM	PH3 valve closed
11/1/2011	7:30:45 PM	SiCl4 pre valve closed
11/1/2011	7:30:45 PM	SiCl4 post valve closed
11/1/2011	7:30:45 PM	Bypass valve closed
11/1/2011	7:30:45 PM	Bubbler valve closed
11/1/2011	7:30:45 PM	Main Vac valve opened
11/1/2011	7:30:45 PM	Helium MFC set to  0.000000
11/1/2011	7:30:45 PM	H2 MFC set to  0.000000
11/1/2011	7:30:45 PM	BCl3 MFC set to  0.000000
11/1/2011	7:30:45 PM	PHl3 MFC set to  0.000000
11/1/2011	7:30:45 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:30:45 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:30:46 PM	Tube furnace set to 150
11/1/2011	7:31:16 PM	H2 valve closed
11/1/2011	7:31:16 PM	BCl3 valve closed
11/1/2011	7:31:16 PM	PH3 valve closed
11/1/2011	7:31:16 PM	SiCl4 pre valve closed
11/1/2011	7:31:16 PM	SiCl4 post valve closed
11/1/2011	7:31:16 PM	Bypass valve closed
11/1/2011	7:31:16 PM	Bubbler valve closed
11/1/2011	7:31:16 PM	Helium valve opened
11/1/2011	7:31:16 PM	Main Vac valve opened
11/1/2011	7:31:16 PM	Helium MFC set to  20.000000
11/1/2011	7:31:16 PM	H2 MFC set to  0.000000
11/1/2011	7:31:16 PM	BCl3 MFC set to  0.000000
11/1/2011	7:31:16 PM	PHl3 MFC set to  0.000000
11/1/2011	7:31:16 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:31:16 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:31:16 PM	Tube furnace set to 150
11/1/2011	7:31:46 PM	Helium valve closed
11/1/2011	7:31:46 PM	H2 valve closed
11/1/2011	7:31:46 PM	BCl3 valve closed
11/1/2011	7:31:46 PM	PH3 valve closed
11/1/2011	7:31:46 PM	SiCl4 pre valve closed
11/1/2011	7:31:46 PM	SiCl4 post valve closed
11/1/2011	7:31:46 PM	Bypass valve closed
11/1/2011	7:31:46 PM	Bubbler valve closed
11/1/2011	7:31:46 PM	Main Vac valve opened
11/1/2011	7:31:46 PM	Helium MFC set to  0.000000
11/1/2011	7:31:46 PM	H2 MFC set to  0.000000
11/1/2011	7:31:46 PM	BCl3 MFC set to  0.000000
11/1/2011	7:31:46 PM	PHl3 MFC set to  0.000000
11/1/2011	7:31:46 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:31:46 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:31:46 PM	Tube furnace set to 150
11/1/2011	7:32:16 PM	H2 valve closed
11/1/2011	7:32:16 PM	BCl3 valve closed
11/1/2011	7:32:16 PM	PH3 valve closed
11/1/2011	7:32:16 PM	SiCl4 pre valve closed
11/1/2011	7:32:16 PM	SiCl4 post valve closed
11/1/2011	7:32:16 PM	Bypass valve closed
11/1/2011	7:32:16 PM	Bubbler valve closed
11/1/2011	7:32:16 PM	Helium valve opened
11/1/2011	7:32:16 PM	Main Vac valve opened
11/1/2011	7:32:16 PM	Helium MFC set to  20.000000
11/1/2011	7:32:16 PM	H2 MFC set to  0.000000
11/1/2011	7:32:16 PM	BCl3 MFC set to  0.000000
11/1/2011	7:32:16 PM	PHl3 MFC set to  0.000000
11/1/2011	7:32:16 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:32:16 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:32:16 PM	Tube furnace set to 150
11/1/2011	7:32:46 PM	Helium valve closed
11/1/2011	7:32:46 PM	H2 valve closed
11/1/2011	7:32:46 PM	BCl3 valve closed
11/1/2011	7:32:46 PM	PH3 valve closed
11/1/2011	7:32:46 PM	SiCl4 pre valve closed
11/1/2011	7:32:46 PM	SiCl4 post valve closed
11/1/2011	7:32:46 PM	Bypass valve closed
11/1/2011	7:32:46 PM	Bubbler valve closed
11/1/2011	7:32:46 PM	Main Vac valve opened
11/1/2011	7:32:46 PM	Helium MFC set to  0.000000
11/1/2011	7:32:46 PM	H2 MFC set to  0.000000
11/1/2011	7:32:46 PM	BCl3 MFC set to  0.000000
11/1/2011	7:32:46 PM	PHl3 MFC set to  0.000000
11/1/2011	7:32:46 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:32:46 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:32:46 PM	Tube furnace set to 150
11/1/2011	7:33:16 PM	H2 valve closed
11/1/2011	7:33:16 PM	BCl3 valve closed
11/1/2011	7:33:16 PM	PH3 valve closed
11/1/2011	7:33:16 PM	SiCl4 pre valve closed
11/1/2011	7:33:16 PM	SiCl4 post valve closed
11/1/2011	7:33:16 PM	Bypass valve closed
11/1/2011	7:33:16 PM	Bubbler valve closed
11/1/2011	7:33:16 PM	Helium valve opened
11/1/2011	7:33:16 PM	Main Vac valve opened
11/1/2011	7:33:16 PM	Helium MFC set to  20.000000
11/1/2011	7:33:16 PM	H2 MFC set to  0.000000
11/1/2011	7:33:16 PM	BCl3 MFC set to  0.000000
11/1/2011	7:33:16 PM	PHl3 MFC set to  0.000000
11/1/2011	7:33:16 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:33:16 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:33:16 PM	Tube furnace set to 150
11/1/2011	7:33:47 PM	Helium valve closed
11/1/2011	7:33:47 PM	H2 valve closed
11/1/2011	7:33:47 PM	BCl3 valve closed
11/1/2011	7:33:47 PM	PH3 valve closed
11/1/2011	7:33:47 PM	SiCl4 pre valve closed
11/1/2011	7:33:47 PM	SiCl4 post valve closed
11/1/2011	7:33:47 PM	Bypass valve closed
11/1/2011	7:33:47 PM	Bubbler valve closed
11/1/2011	7:33:47 PM	Main Vac valve opened
11/1/2011	7:33:47 PM	Helium MFC set to  0.000000
11/1/2011	7:33:47 PM	H2 MFC set to  0.000000
11/1/2011	7:33:47 PM	BCl3 MFC set to  0.000000
11/1/2011	7:33:47 PM	PHl3 MFC set to  0.000000
11/1/2011	7:33:47 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:33:47 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:33:47 PM	Tube furnace set to 150
11/1/2011	7:34:17 PM	H2 valve closed
11/1/2011	7:34:17 PM	BCl3 valve closed
11/1/2011	7:34:17 PM	PH3 valve closed
11/1/2011	7:34:17 PM	SiCl4 pre valve closed
11/1/2011	7:34:17 PM	SiCl4 post valve closed
11/1/2011	7:34:17 PM	Bypass valve closed
11/1/2011	7:34:17 PM	Bubbler valve closed
11/1/2011	7:34:17 PM	Helium valve opened
11/1/2011	7:34:17 PM	Main Vac valve opened
11/1/2011	7:34:17 PM	Helium MFC set to  20.000000
11/1/2011	7:34:17 PM	H2 MFC set to  0.000000
11/1/2011	7:34:17 PM	BCl3 MFC set to  0.000000
11/1/2011	7:34:17 PM	PHl3 MFC set to  0.000000
11/1/2011	7:34:17 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:34:17 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:34:17 PM	Tube furnace set to 150
11/1/2011	7:34:47 PM	Helium valve closed
11/1/2011	7:34:47 PM	H2 valve closed
11/1/2011	7:34:47 PM	BCl3 valve closed
11/1/2011	7:34:47 PM	PH3 valve closed
11/1/2011	7:34:47 PM	SiCl4 pre valve closed
11/1/2011	7:34:47 PM	SiCl4 post valve closed
11/1/2011	7:34:47 PM	Bypass valve closed
11/1/2011	7:34:47 PM	Bubbler valve closed
11/1/2011	7:34:47 PM	Main Vac valve opened
11/1/2011	7:34:47 PM	Helium MFC set to  0.000000
11/1/2011	7:34:47 PM	H2 MFC set to  0.000000
11/1/2011	7:34:47 PM	BCl3 MFC set to  0.000000
11/1/2011	7:34:47 PM	PHl3 MFC set to  0.000000
11/1/2011	7:34:47 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:34:47 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:34:47 PM	Tube furnace set to 150
11/1/2011	7:35:17 PM	H2 valve closed
11/1/2011	7:35:17 PM	BCl3 valve closed
11/1/2011	7:35:17 PM	PH3 valve closed
11/1/2011	7:35:17 PM	SiCl4 pre valve closed
11/1/2011	7:35:17 PM	SiCl4 post valve closed
11/1/2011	7:35:17 PM	Bypass valve closed
11/1/2011	7:35:17 PM	Bubbler valve closed
11/1/2011	7:35:17 PM	Helium valve opened
11/1/2011	7:35:17 PM	Main Vac valve opened
11/1/2011	7:35:17 PM	Helium MFC set to  20.000000
11/1/2011	7:35:17 PM	H2 MFC set to  0.000000
11/1/2011	7:35:17 PM	BCl3 MFC set to  0.000000
11/1/2011	7:35:17 PM	PHl3 MFC set to  0.000000
11/1/2011	7:35:17 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:35:17 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:35:17 PM	Tube furnace set to 150
11/1/2011	7:35:47 PM	Helium valve closed
11/1/2011	7:35:47 PM	H2 valve closed
11/1/2011	7:35:47 PM	BCl3 valve closed
11/1/2011	7:35:47 PM	PH3 valve closed
11/1/2011	7:35:47 PM	SiCl4 pre valve closed
11/1/2011	7:35:47 PM	SiCl4 post valve closed
11/1/2011	7:35:47 PM	Bypass valve closed
11/1/2011	7:35:47 PM	Bubbler valve closed
11/1/2011	7:35:47 PM	Main Vac valve opened
11/1/2011	7:35:47 PM	Helium MFC set to  0.000000
11/1/2011	7:35:47 PM	H2 MFC set to  0.000000
11/1/2011	7:35:47 PM	BCl3 MFC set to  0.000000
11/1/2011	7:35:47 PM	PHl3 MFC set to  0.000000
11/1/2011	7:35:47 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:35:47 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:35:47 PM	Tube furnace set to 150
11/1/2011	7:36:18 PM	H2 valve closed
11/1/2011	7:36:18 PM	BCl3 valve closed
11/1/2011	7:36:18 PM	PH3 valve closed
11/1/2011	7:36:18 PM	SiCl4 pre valve closed
11/1/2011	7:36:18 PM	SiCl4 post valve closed
11/1/2011	7:36:18 PM	Bypass valve closed
11/1/2011	7:36:18 PM	Bubbler valve closed
11/1/2011	7:36:18 PM	Helium valve opened
11/1/2011	7:36:18 PM	Main Vac valve opened
11/1/2011	7:36:18 PM	Helium MFC set to  20.000000
11/1/2011	7:36:18 PM	H2 MFC set to  0.000000
11/1/2011	7:36:18 PM	BCl3 MFC set to  0.000000
11/1/2011	7:36:18 PM	PHl3 MFC set to  0.000000
11/1/2011	7:36:18 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:36:18 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:36:18 PM	Tube furnace set to 150
11/1/2011	7:36:48 PM	Helium valve closed
11/1/2011	7:36:48 PM	H2 valve closed
11/1/2011	7:36:48 PM	BCl3 valve closed
11/1/2011	7:36:48 PM	PH3 valve closed
11/1/2011	7:36:48 PM	SiCl4 pre valve closed
11/1/2011	7:36:48 PM	SiCl4 post valve closed
11/1/2011	7:36:48 PM	Bypass valve closed
11/1/2011	7:36:48 PM	Bubbler valve closed
11/1/2011	7:36:48 PM	Main Vac valve opened
11/1/2011	7:36:48 PM	Helium MFC set to  0.000000
11/1/2011	7:36:48 PM	H2 MFC set to  0.000000
11/1/2011	7:36:48 PM	BCl3 MFC set to  0.000000
11/1/2011	7:36:48 PM	PHl3 MFC set to  0.000000
11/1/2011	7:36:48 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:36:48 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:36:48 PM	Tube furnace set to 150
11/1/2011	7:37:18 PM	H2 valve closed
11/1/2011	7:37:18 PM	BCl3 valve closed
11/1/2011	7:37:18 PM	PH3 valve closed
11/1/2011	7:37:18 PM	SiCl4 pre valve closed
11/1/2011	7:37:18 PM	SiCl4 post valve closed
11/1/2011	7:37:18 PM	Bypass valve closed
11/1/2011	7:37:18 PM	Bubbler valve closed
11/1/2011	7:37:18 PM	Helium valve opened
11/1/2011	7:37:18 PM	Main Vac valve opened
11/1/2011	7:37:18 PM	Helium MFC set to  20.000000
11/1/2011	7:37:18 PM	H2 MFC set to  0.000000
11/1/2011	7:37:18 PM	BCl3 MFC set to  0.000000
11/1/2011	7:37:18 PM	PHl3 MFC set to  0.000000
11/1/2011	7:37:18 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:37:18 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:37:18 PM	Tube furnace set to 150
11/1/2011	7:37:48 PM	Helium valve closed
11/1/2011	7:37:48 PM	H2 valve closed
11/1/2011	7:37:48 PM	BCl3 valve closed
11/1/2011	7:37:48 PM	PH3 valve closed
11/1/2011	7:37:48 PM	SiCl4 pre valve closed
11/1/2011	7:37:48 PM	SiCl4 post valve closed
11/1/2011	7:37:48 PM	Bypass valve closed
11/1/2011	7:37:48 PM	Bubbler valve closed
11/1/2011	7:37:48 PM	Main Vac valve opened
11/1/2011	7:37:48 PM	Helium MFC set to  0.000000
11/1/2011	7:37:48 PM	H2 MFC set to  0.000000
11/1/2011	7:37:48 PM	BCl3 MFC set to  0.000000
11/1/2011	7:37:48 PM	PHl3 MFC set to  0.000000
11/1/2011	7:37:48 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:37:48 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:37:48 PM	Tube furnace set to 150
11/1/2011	7:38:18 PM	H2 valve closed
11/1/2011	7:38:18 PM	BCl3 valve closed
11/1/2011	7:38:18 PM	PH3 valve closed
11/1/2011	7:38:18 PM	SiCl4 pre valve closed
11/1/2011	7:38:18 PM	SiCl4 post valve closed
11/1/2011	7:38:18 PM	Bypass valve closed
11/1/2011	7:38:18 PM	Bubbler valve closed
11/1/2011	7:38:18 PM	Helium valve opened
11/1/2011	7:38:18 PM	Main Vac valve opened
11/1/2011	7:38:18 PM	Helium MFC set to  20.000000
11/1/2011	7:38:18 PM	H2 MFC set to  0.000000
11/1/2011	7:38:18 PM	BCl3 MFC set to  0.000000
11/1/2011	7:38:18 PM	PHl3 MFC set to  0.000000
11/1/2011	7:38:18 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:38:18 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:38:19 PM	Tube furnace set to 150
11/1/2011	7:38:49 PM	Helium valve closed
11/1/2011	7:38:49 PM	H2 valve closed
11/1/2011	7:38:49 PM	BCl3 valve closed
11/1/2011	7:38:49 PM	PH3 valve closed
11/1/2011	7:38:49 PM	SiCl4 pre valve closed
11/1/2011	7:38:49 PM	SiCl4 post valve closed
11/1/2011	7:38:49 PM	Bypass valve closed
11/1/2011	7:38:49 PM	Bubbler valve closed
11/1/2011	7:38:49 PM	Main Vac valve opened
11/1/2011	7:38:49 PM	Helium MFC set to  0.000000
11/1/2011	7:38:49 PM	H2 MFC set to  0.000000
11/1/2011	7:38:49 PM	BCl3 MFC set to  0.000000
11/1/2011	7:38:49 PM	PHl3 MFC set to  0.000000
11/1/2011	7:38:49 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:38:49 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:38:49 PM	Tube furnace set to 150
11/1/2011	7:38:50 PM	Run finished at 7:38 PM
11/1/2011	7:49:21 PM	Program exited cleanly
11/1/2011	7:53:58 PM	Helium valve closed
11/1/2011	7:53:58 PM	H2 valve closed
11/1/2011	7:53:58 PM	BCl3 valve closed
11/1/2011	7:53:58 PM	PH3 valve closed
11/1/2011	7:53:58 PM	SiCl4 pre valve closed
11/1/2011	7:53:58 PM	SiCl4 post valve closed
11/1/2011	7:53:58 PM	Main Vac valve closed
11/1/2011	7:53:58 PM	Bypass valve closed
11/1/2011	7:53:58 PM	Bubbler valve closed
11/1/2011	7:53:58 PM	Helium MFC set to  0.000000
11/1/2011	7:53:58 PM	H2 MFC set to  0.000000
11/1/2011	7:53:58 PM	BCl3 MFC set to  0.000000
11/1/2011	7:53:58 PM	PHl3 MFC set to  0.000000
11/1/2011	7:53:58 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:53:58 PM	Bypass solenoid MFC set to  760.000000
11/1/2011	7:53:58 PM	Tube furnace set to 0
11/1/2011	7:54:07 PM	Main Vac valve opened
11/1/2011	7:56:09 PM	Recipe started at 7:56 PM
11/1/2011	7:56:09 PM	Helium valve closed
11/1/2011	7:56:09 PM	H2 valve closed
11/1/2011	7:56:09 PM	BCl3 valve closed
11/1/2011	7:56:09 PM	PH3 valve closed
11/1/2011	7:56:09 PM	SiCl4 pre valve closed
11/1/2011	7:56:09 PM	SiCl4 post valve closed
11/1/2011	7:56:09 PM	Main Vac valve closed
11/1/2011	7:56:09 PM	Bypass valve closed
11/1/2011	7:56:09 PM	Bubbler valve closed
11/1/2011	7:56:09 PM	Helium MFC set to  0.000000
11/1/2011	7:56:09 PM	H2 MFC set to  0.000000
11/1/2011	7:56:09 PM	BCl3 MFC set to  0.000000
11/1/2011	7:56:09 PM	PHl3 MFC set to  0.000000
11/1/2011	7:56:09 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:56:09 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:56:09 PM	Tube furnace set to 0
11/1/2011	7:56:12 PM	Helium valve closed
11/1/2011	7:56:13 PM	BCl3 valve closed
11/1/2011	7:56:13 PM	PH3 valve closed
11/1/2011	7:56:13 PM	SiCl4 pre valve closed
11/1/2011	7:56:13 PM	SiCl4 post valve closed
11/1/2011	7:56:13 PM	Main Vac valve closed
11/1/2011	7:56:13 PM	Bypass valve closed
11/1/2011	7:56:13 PM	Bubbler valve closed
11/1/2011	7:56:13 PM	H2 valve opened
11/1/2011	7:56:13 PM	Helium MFC set to  0.000000
11/1/2011	7:56:13 PM	H2 MFC set to  500.000000
11/1/2011	7:56:13 PM	BCl3 MFC set to  0.000000
11/1/2011	7:56:13 PM	PHl3 MFC set to  0.000000
11/1/2011	7:56:13 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:56:13 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:56:13 PM	Tube furnace set to 0
11/1/2011	7:57:14 PM	Helium valve closed
11/1/2011	7:57:14 PM	BCl3 valve closed
11/1/2011	7:57:14 PM	PH3 valve closed
11/1/2011	7:57:14 PM	SiCl4 pre valve closed
11/1/2011	7:57:14 PM	SiCl4 post valve closed
11/1/2011	7:57:14 PM	Main Vac valve closed
11/1/2011	7:57:14 PM	Bypass valve closed
11/1/2011	7:57:14 PM	H2 valve opened
11/1/2011	7:57:14 PM	Bubbler valve opened
11/1/2011	7:57:14 PM	Helium MFC set to  0.000000
11/1/2011	7:57:14 PM	H2 MFC set to  500.000000
11/1/2011	7:57:14 PM	BCl3 MFC set to  0.000000
11/1/2011	7:57:14 PM	PHl3 MFC set to  0.000000
11/1/2011	7:57:14 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:57:14 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:57:14 PM	Tube furnace set to 0
11/1/2011	7:57:15 PM	Helium valve closed
11/1/2011	7:57:15 PM	BCl3 valve closed
11/1/2011	7:57:15 PM	PH3 valve closed
11/1/2011	7:57:15 PM	SiCl4 pre valve closed
11/1/2011	7:57:15 PM	SiCl4 post valve closed
11/1/2011	7:57:15 PM	Main Vac valve closed
11/1/2011	7:57:15 PM	Bypass valve closed
11/1/2011	7:57:15 PM	H2 valve opened
11/1/2011	7:57:15 PM	Bubbler valve opened
11/1/2011	7:57:15 PM	Helium MFC set to  0.000000
11/1/2011	7:57:15 PM	H2 MFC set to  500.000000
11/1/2011	7:57:15 PM	BCl3 MFC set to  0.000000
11/1/2011	7:57:15 PM	PHl3 MFC set to  0.000000
11/1/2011	7:57:15 PM	SiCl4 MFC set to  0.000000
11/1/2011	7:57:15 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	7:57:15 PM	Tube furnace set to 1025
11/1/2011	8:17:10 PM	Helium valve closed
11/1/2011	8:17:10 PM	BCl3 valve closed
11/1/2011	8:17:10 PM	PH3 valve closed
11/1/2011	8:17:10 PM	Main Vac valve closed
11/1/2011	8:17:10 PM	Bypass valve closed
11/1/2011	8:17:10 PM	H2 valve opened
11/1/2011	8:17:10 PM	SiCl4 pre valve opened
11/1/2011	8:17:10 PM	SiCl4 post valve opened
11/1/2011	8:17:10 PM	Bubbler valve opened
11/1/2011	8:17:10 PM	Helium MFC set to  0.000000
11/1/2011	8:17:10 PM	H2 MFC set to  500.000000
11/1/2011	8:17:10 PM	BCl3 MFC set to  0.000000
11/1/2011	8:17:10 PM	PHl3 MFC set to  0.000000
11/1/2011	8:17:10 PM	SiCl4 MFC set to  50.000000
11/1/2011	8:17:10 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:17:10 PM	Tube furnace set to 1025
11/1/2011	8:37:10 PM	Helium valve closed
11/1/2011	8:37:10 PM	BCl3 valve closed
11/1/2011	8:37:10 PM	PH3 valve closed
11/1/2011	8:37:10 PM	SiCl4 pre valve closed
11/1/2011	8:37:10 PM	SiCl4 post valve closed
11/1/2011	8:37:10 PM	Main Vac valve closed
11/1/2011	8:37:10 PM	Bypass valve closed
11/1/2011	8:37:10 PM	H2 valve opened
11/1/2011	8:37:10 PM	Bubbler valve opened
11/1/2011	8:37:10 PM	Helium MFC set to  0.000000
11/1/2011	8:37:10 PM	H2 MFC set to  500.000000
11/1/2011	8:37:10 PM	BCl3 MFC set to  0.000000
11/1/2011	8:37:10 PM	PHl3 MFC set to  0.000000
11/1/2011	8:37:10 PM	SiCl4 MFC set to  0.000000
11/1/2011	8:37:10 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:37:10 PM	Tube furnace set to 950
11/1/2011	8:40:10 PM	H2 valve closed
11/1/2011	8:40:10 PM	BCl3 valve closed
11/1/2011	8:40:10 PM	PH3 valve closed
11/1/2011	8:40:10 PM	SiCl4 pre valve closed
11/1/2011	8:40:10 PM	SiCl4 post valve closed
11/1/2011	8:40:10 PM	Main Vac valve closed
11/1/2011	8:40:10 PM	Bypass valve closed
11/1/2011	8:40:10 PM	Helium valve opened
11/1/2011	8:40:10 PM	Bubbler valve opened
11/1/2011	8:40:10 PM	Helium MFC set to  500.000000
11/1/2011	8:40:10 PM	H2 MFC set to  0.000000
11/1/2011	8:40:10 PM	BCl3 MFC set to  0.000000
11/1/2011	8:40:10 PM	PHl3 MFC set to  0.000000
11/1/2011	8:40:10 PM	SiCl4 MFC set to  0.000000
11/1/2011	8:40:10 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:40:11 PM	Tube furnace set to 900
11/1/2011	8:43:11 PM	H2 valve closed
11/1/2011	8:43:11 PM	BCl3 valve closed
11/1/2011	8:43:11 PM	PH3 valve closed
11/1/2011	8:43:11 PM	SiCl4 pre valve closed
11/1/2011	8:43:11 PM	SiCl4 post valve closed
11/1/2011	8:43:11 PM	Main Vac valve closed
11/1/2011	8:43:11 PM	Bypass valve closed
11/1/2011	8:43:11 PM	Helium valve opened
11/1/2011	8:43:11 PM	Bubbler valve opened
11/1/2011	8:43:11 PM	Helium MFC set to  500.000000
11/1/2011	8:43:11 PM	H2 MFC set to  0.000000
11/1/2011	8:43:11 PM	BCl3 MFC set to  0.000000
11/1/2011	8:43:11 PM	PHl3 MFC set to  0.000000
11/1/2011	8:43:11 PM	SiCl4 MFC set to  0.000000
11/1/2011	8:43:11 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:43:11 PM	Tube furnace set to 850
11/1/2011	8:46:11 PM	H2 valve closed
11/1/2011	8:46:11 PM	BCl3 valve closed
11/1/2011	8:46:11 PM	PH3 valve closed
11/1/2011	8:46:11 PM	SiCl4 pre valve closed
11/1/2011	8:46:11 PM	SiCl4 post valve closed
11/1/2011	8:46:11 PM	Main Vac valve closed
11/1/2011	8:46:11 PM	Bypass valve closed
11/1/2011	8:46:11 PM	Helium valve opened
11/1/2011	8:46:11 PM	Bubbler valve opened
11/1/2011	8:46:11 PM	Helium MFC set to  500.000000
11/1/2011	8:46:11 PM	H2 MFC set to  0.000000
11/1/2011	8:46:11 PM	BCl3 MFC set to  0.000000
11/1/2011	8:46:11 PM	PHl3 MFC set to  0.000000
11/1/2011	8:46:11 PM	SiCl4 MFC set to  0.000000
11/1/2011	8:46:11 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:46:11 PM	Tube furnace set to 800
11/1/2011	8:49:11 PM	H2 valve closed
11/1/2011	8:49:11 PM	BCl3 valve closed
11/1/2011	8:49:11 PM	PH3 valve closed
11/1/2011	8:49:11 PM	SiCl4 pre valve closed
11/1/2011	8:49:11 PM	SiCl4 post valve closed
11/1/2011	8:49:11 PM	Main Vac valve closed
11/1/2011	8:49:11 PM	Bypass valve closed
11/1/2011	8:49:11 PM	Helium valve opened
11/1/2011	8:49:11 PM	Bubbler valve opened
11/1/2011	8:49:11 PM	Helium MFC set to  500.000000
11/1/2011	8:49:11 PM	H2 MFC set to  0.000000
11/1/2011	8:49:11 PM	BCl3 MFC set to  0.000000
11/1/2011	8:49:11 PM	PHl3 MFC set to  0.000000
11/1/2011	8:49:11 PM	SiCl4 MFC set to  0.000000
11/1/2011	8:49:11 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:49:11 PM	Tube furnace set to 750
11/1/2011	8:52:11 PM	H2 valve closed
11/1/2011	8:52:11 PM	BCl3 valve closed
11/1/2011	8:52:11 PM	PH3 valve closed
11/1/2011	8:52:11 PM	SiCl4 pre valve closed
11/1/2011	8:52:11 PM	SiCl4 post valve closed
11/1/2011	8:52:11 PM	Main Vac valve closed
11/1/2011	8:52:11 PM	Bypass valve closed
11/1/2011	8:52:11 PM	Helium valve opened
11/1/2011	8:52:11 PM	Bubbler valve opened
11/1/2011	8:52:11 PM	Helium MFC set to  500.000000
11/1/2011	8:52:11 PM	H2 MFC set to  0.000000
11/1/2011	8:52:11 PM	BCl3 MFC set to  0.000000
11/1/2011	8:52:11 PM	PHl3 MFC set to  0.000000
11/1/2011	8:52:11 PM	SiCl4 MFC set to  0.000000
11/1/2011	8:52:11 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	8:52:11 PM	Tube furnace set to 0
11/1/2011	9:12:11 PM	Helium valve closed
11/1/2011	9:12:11 PM	H2 valve closed
11/1/2011	9:12:11 PM	BCl3 valve closed
11/1/2011	9:12:11 PM	PH3 valve closed
11/1/2011	9:12:11 PM	SiCl4 pre valve closed
11/1/2011	9:12:11 PM	SiCl4 post valve closed
11/1/2011	9:12:11 PM	Main Vac valve closed
11/1/2011	9:12:11 PM	Bypass valve closed
11/1/2011	9:12:11 PM	Bubbler valve closed
11/1/2011	9:12:11 PM	Helium MFC set to  0.000000
11/1/2011	9:12:11 PM	H2 MFC set to  0.000000
11/1/2011	9:12:11 PM	BCl3 MFC set to  0.000000
11/1/2011	9:12:11 PM	PHl3 MFC set to  0.000000
11/1/2011	9:12:11 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:12:11 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:12:11 PM	Tube furnace set to 0
11/1/2011	9:12:12 PM	Run finished at 9:12 PM
11/1/2011	9:35:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	9:35:31 PM	Recipe started at 9:35 PM
11/1/2011	9:35:31 PM	Helium valve closed
11/1/2011	9:35:31 PM	H2 valve closed
11/1/2011	9:35:31 PM	BCl3 valve closed
11/1/2011	9:35:31 PM	PH3 valve closed
11/1/2011	9:35:31 PM	SiCl4 pre valve closed
11/1/2011	9:35:31 PM	SiCl4 post valve closed
11/1/2011	9:35:31 PM	Main Vac valve closed
11/1/2011	9:35:31 PM	Bubbler valve closed
11/1/2011	9:35:31 PM	Bypass valve opened
11/1/2011	9:35:31 PM	Helium MFC set to  0.000000
11/1/2011	9:35:31 PM	H2 MFC set to  0.000000
11/1/2011	9:35:31 PM	BCl3 MFC set to  0.000000
11/1/2011	9:35:31 PM	PHl3 MFC set to  0.000000
11/1/2011	9:35:31 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:35:31 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:35:31 PM	Tube furnace set to 0
11/1/2011	9:36:31 PM	Helium valve closed
11/1/2011	9:36:31 PM	H2 valve closed
11/1/2011	9:36:31 PM	BCl3 valve closed
11/1/2011	9:36:31 PM	PH3 valve closed
11/1/2011	9:36:31 PM	SiCl4 pre valve closed
11/1/2011	9:36:31 PM	SiCl4 post valve closed
11/1/2011	9:36:31 PM	Main Vac valve closed
11/1/2011	9:36:31 PM	Bubbler valve closed
11/1/2011	9:36:31 PM	Bypass valve opened
11/1/2011	9:36:31 PM	Helium MFC set to  0.000000
11/1/2011	9:36:31 PM	H2 MFC set to  0.000000
11/1/2011	9:36:31 PM	BCl3 MFC set to  0.000000
11/1/2011	9:36:31 PM	PHl3 MFC set to  0.000000
11/1/2011	9:36:31 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:36:31 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:36:31 PM	Tube furnace set to 0
11/1/2011	9:37:31 PM	Helium valve closed
11/1/2011	9:37:31 PM	H2 valve closed
11/1/2011	9:37:31 PM	BCl3 valve closed
11/1/2011	9:37:31 PM	PH3 valve closed
11/1/2011	9:37:31 PM	SiCl4 pre valve closed
11/1/2011	9:37:31 PM	SiCl4 post valve closed
11/1/2011	9:37:31 PM	Bypass valve closed
11/1/2011	9:37:31 PM	Bubbler valve closed
11/1/2011	9:37:31 PM	Main Vac valve opened
11/1/2011	9:37:31 PM	Helium MFC set to  0.000000
11/1/2011	9:37:31 PM	H2 MFC set to  0.000000
11/1/2011	9:37:31 PM	BCl3 MFC set to  0.000000
11/1/2011	9:37:31 PM	PHl3 MFC set to  0.000000
11/1/2011	9:37:31 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:37:31 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:37:31 PM	Tube furnace set to 0
11/1/2011	9:37:32 PM	Run finished at 9:37 PM
11/1/2011	9:37:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	9:39:19 PM	Recipe started at 9:39 PM
11/1/2011	9:39:19 PM	Helium valve closed
11/1/2011	9:39:19 PM	H2 valve closed
11/1/2011	9:39:19 PM	BCl3 valve closed
11/1/2011	9:39:19 PM	PH3 valve closed
11/1/2011	9:39:19 PM	SiCl4 pre valve closed
11/1/2011	9:39:19 PM	SiCl4 post valve closed
11/1/2011	9:39:19 PM	Bypass valve closed
11/1/2011	9:39:19 PM	Bubbler valve closed
11/1/2011	9:39:19 PM	Main Vac valve opened
11/1/2011	9:39:19 PM	Helium MFC set to  0.000000
11/1/2011	9:39:19 PM	H2 MFC set to  0.000000
11/1/2011	9:39:19 PM	BCl3 MFC set to  0.000000
11/1/2011	9:39:19 PM	PHl3 MFC set to  0.000000
11/1/2011	9:39:19 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:39:19 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:39:20 PM	Tube furnace set to 150
11/1/2011	9:39:21 PM	H2 valve closed
11/1/2011	9:39:21 PM	BCl3 valve closed
11/1/2011	9:39:21 PM	PH3 valve closed
11/1/2011	9:39:21 PM	SiCl4 pre valve closed
11/1/2011	9:39:21 PM	SiCl4 post valve closed
11/1/2011	9:39:21 PM	Bypass valve closed
11/1/2011	9:39:21 PM	Bubbler valve closed
11/1/2011	9:39:21 PM	Helium valve opened
11/1/2011	9:39:21 PM	Main Vac valve opened
11/1/2011	9:39:21 PM	Helium MFC set to  20.000000
11/1/2011	9:39:21 PM	H2 MFC set to  0.000000
11/1/2011	9:39:21 PM	BCl3 MFC set to  0.000000
11/1/2011	9:39:21 PM	PHl3 MFC set to  0.000000
11/1/2011	9:39:21 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:39:21 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:39:22 PM	Tube furnace set to 150
11/1/2011	9:39:52 PM	Helium valve closed
11/1/2011	9:39:52 PM	H2 valve closed
11/1/2011	9:39:52 PM	BCl3 valve closed
11/1/2011	9:39:52 PM	PH3 valve closed
11/1/2011	9:39:52 PM	SiCl4 pre valve closed
11/1/2011	9:39:52 PM	SiCl4 post valve closed
11/1/2011	9:39:52 PM	Bypass valve closed
11/1/2011	9:39:52 PM	Bubbler valve closed
11/1/2011	9:39:52 PM	Main Vac valve opened
11/1/2011	9:39:52 PM	Helium MFC set to  0.000000
11/1/2011	9:39:52 PM	H2 MFC set to  0.000000
11/1/2011	9:39:52 PM	BCl3 MFC set to  0.000000
11/1/2011	9:39:52 PM	PHl3 MFC set to  0.000000
11/1/2011	9:39:52 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:39:52 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:39:52 PM	Tube furnace set to 150
11/1/2011	9:40:22 PM	H2 valve closed
11/1/2011	9:40:22 PM	BCl3 valve closed
11/1/2011	9:40:22 PM	PH3 valve closed
11/1/2011	9:40:22 PM	SiCl4 pre valve closed
11/1/2011	9:40:22 PM	SiCl4 post valve closed
11/1/2011	9:40:22 PM	Bypass valve closed
11/1/2011	9:40:22 PM	Bubbler valve closed
11/1/2011	9:40:22 PM	Helium valve opened
11/1/2011	9:40:22 PM	Main Vac valve opened
11/1/2011	9:40:22 PM	Helium MFC set to  20.000000
11/1/2011	9:40:22 PM	H2 MFC set to  0.000000
11/1/2011	9:40:22 PM	BCl3 MFC set to  0.000000
11/1/2011	9:40:22 PM	PHl3 MFC set to  0.000000
11/1/2011	9:40:22 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:40:22 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:40:22 PM	Tube furnace set to 150
11/1/2011	9:40:52 PM	Helium valve closed
11/1/2011	9:40:52 PM	H2 valve closed
11/1/2011	9:40:52 PM	BCl3 valve closed
11/1/2011	9:40:52 PM	PH3 valve closed
11/1/2011	9:40:52 PM	SiCl4 pre valve closed
11/1/2011	9:40:52 PM	SiCl4 post valve closed
11/1/2011	9:40:52 PM	Bypass valve closed
11/1/2011	9:40:52 PM	Bubbler valve closed
11/1/2011	9:40:52 PM	Main Vac valve opened
11/1/2011	9:40:52 PM	Helium MFC set to  0.000000
11/1/2011	9:40:52 PM	H2 MFC set to  0.000000
11/1/2011	9:40:52 PM	BCl3 MFC set to  0.000000
11/1/2011	9:40:52 PM	PHl3 MFC set to  0.000000
11/1/2011	9:40:52 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:40:52 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:40:52 PM	Tube furnace set to 150
11/1/2011	9:41:22 PM	H2 valve closed
11/1/2011	9:41:22 PM	BCl3 valve closed
11/1/2011	9:41:22 PM	PH3 valve closed
11/1/2011	9:41:22 PM	SiCl4 pre valve closed
11/1/2011	9:41:22 PM	SiCl4 post valve closed
11/1/2011	9:41:22 PM	Bypass valve closed
11/1/2011	9:41:22 PM	Bubbler valve closed
11/1/2011	9:41:22 PM	Helium valve opened
11/1/2011	9:41:22 PM	Main Vac valve opened
11/1/2011	9:41:22 PM	Helium MFC set to  20.000000
11/1/2011	9:41:22 PM	H2 MFC set to  0.000000
11/1/2011	9:41:22 PM	BCl3 MFC set to  0.000000
11/1/2011	9:41:22 PM	PHl3 MFC set to  0.000000
11/1/2011	9:41:22 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:41:22 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:41:22 PM	Tube furnace set to 150
11/1/2011	9:41:52 PM	Helium valve closed
11/1/2011	9:41:52 PM	H2 valve closed
11/1/2011	9:41:52 PM	BCl3 valve closed
11/1/2011	9:41:52 PM	PH3 valve closed
11/1/2011	9:41:52 PM	SiCl4 pre valve closed
11/1/2011	9:41:52 PM	SiCl4 post valve closed
11/1/2011	9:41:52 PM	Bypass valve closed
11/1/2011	9:41:52 PM	Bubbler valve closed
11/1/2011	9:41:52 PM	Main Vac valve opened
11/1/2011	9:41:52 PM	Helium MFC set to  0.000000
11/1/2011	9:41:52 PM	H2 MFC set to  0.000000
11/1/2011	9:41:52 PM	BCl3 MFC set to  0.000000
11/1/2011	9:41:52 PM	PHl3 MFC set to  0.000000
11/1/2011	9:41:52 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:41:52 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:41:53 PM	Tube furnace set to 150
11/1/2011	9:42:23 PM	H2 valve closed
11/1/2011	9:42:23 PM	BCl3 valve closed
11/1/2011	9:42:23 PM	PH3 valve closed
11/1/2011	9:42:23 PM	SiCl4 pre valve closed
11/1/2011	9:42:23 PM	SiCl4 post valve closed
11/1/2011	9:42:23 PM	Bypass valve closed
11/1/2011	9:42:23 PM	Bubbler valve closed
11/1/2011	9:42:23 PM	Helium valve opened
11/1/2011	9:42:23 PM	Main Vac valve opened
11/1/2011	9:42:23 PM	Helium MFC set to  20.000000
11/1/2011	9:42:23 PM	H2 MFC set to  0.000000
11/1/2011	9:42:23 PM	BCl3 MFC set to  0.000000
11/1/2011	9:42:23 PM	PHl3 MFC set to  0.000000
11/1/2011	9:42:23 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:42:23 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:42:23 PM	Tube furnace set to 150
11/1/2011	9:42:53 PM	Helium valve closed
11/1/2011	9:42:53 PM	H2 valve closed
11/1/2011	9:42:53 PM	BCl3 valve closed
11/1/2011	9:42:53 PM	PH3 valve closed
11/1/2011	9:42:53 PM	SiCl4 pre valve closed
11/1/2011	9:42:53 PM	SiCl4 post valve closed
11/1/2011	9:42:53 PM	Bypass valve closed
11/1/2011	9:42:53 PM	Bubbler valve closed
11/1/2011	9:42:53 PM	Main Vac valve opened
11/1/2011	9:42:53 PM	Helium MFC set to  0.000000
11/1/2011	9:42:53 PM	H2 MFC set to  0.000000
11/1/2011	9:42:53 PM	BCl3 MFC set to  0.000000
11/1/2011	9:42:53 PM	PHl3 MFC set to  0.000000
11/1/2011	9:42:53 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:42:53 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:42:53 PM	Tube furnace set to 150
11/1/2011	9:43:23 PM	H2 valve closed
11/1/2011	9:43:23 PM	BCl3 valve closed
11/1/2011	9:43:23 PM	PH3 valve closed
11/1/2011	9:43:23 PM	SiCl4 pre valve closed
11/1/2011	9:43:23 PM	SiCl4 post valve closed
11/1/2011	9:43:23 PM	Bypass valve closed
11/1/2011	9:43:23 PM	Bubbler valve closed
11/1/2011	9:43:23 PM	Helium valve opened
11/1/2011	9:43:23 PM	Main Vac valve opened
11/1/2011	9:43:23 PM	Helium MFC set to  20.000000
11/1/2011	9:43:23 PM	H2 MFC set to  0.000000
11/1/2011	9:43:23 PM	BCl3 MFC set to  0.000000
11/1/2011	9:43:23 PM	PHl3 MFC set to  0.000000
11/1/2011	9:43:23 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:43:23 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:43:23 PM	Tube furnace set to 150
11/1/2011	9:43:53 PM	Helium valve closed
11/1/2011	9:43:53 PM	H2 valve closed
11/1/2011	9:43:53 PM	BCl3 valve closed
11/1/2011	9:43:53 PM	PH3 valve closed
11/1/2011	9:43:53 PM	SiCl4 pre valve closed
11/1/2011	9:43:53 PM	SiCl4 post valve closed
11/1/2011	9:43:53 PM	Bypass valve closed
11/1/2011	9:43:53 PM	Bubbler valve closed
11/1/2011	9:43:53 PM	Main Vac valve opened
11/1/2011	9:43:53 PM	Helium MFC set to  0.000000
11/1/2011	9:43:53 PM	H2 MFC set to  0.000000
11/1/2011	9:43:53 PM	BCl3 MFC set to  0.000000
11/1/2011	9:43:53 PM	PHl3 MFC set to  0.000000
11/1/2011	9:43:53 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:43:53 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:43:53 PM	Tube furnace set to 150
11/1/2011	9:44:23 PM	H2 valve closed
11/1/2011	9:44:23 PM	BCl3 valve closed
11/1/2011	9:44:23 PM	PH3 valve closed
11/1/2011	9:44:23 PM	SiCl4 pre valve closed
11/1/2011	9:44:23 PM	SiCl4 post valve closed
11/1/2011	9:44:23 PM	Bypass valve closed
11/1/2011	9:44:23 PM	Bubbler valve closed
11/1/2011	9:44:23 PM	Helium valve opened
11/1/2011	9:44:23 PM	Main Vac valve opened
11/1/2011	9:44:23 PM	Helium MFC set to  20.000000
11/1/2011	9:44:23 PM	H2 MFC set to  0.000000
11/1/2011	9:44:23 PM	BCl3 MFC set to  0.000000
11/1/2011	9:44:23 PM	PHl3 MFC set to  0.000000
11/1/2011	9:44:23 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:44:23 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:44:24 PM	Tube furnace set to 150
11/1/2011	9:44:54 PM	Helium valve closed
11/1/2011	9:44:54 PM	H2 valve closed
11/1/2011	9:44:54 PM	BCl3 valve closed
11/1/2011	9:44:54 PM	PH3 valve closed
11/1/2011	9:44:54 PM	SiCl4 pre valve closed
11/1/2011	9:44:54 PM	SiCl4 post valve closed
11/1/2011	9:44:54 PM	Bypass valve closed
11/1/2011	9:44:54 PM	Bubbler valve closed
11/1/2011	9:44:54 PM	Main Vac valve opened
11/1/2011	9:44:54 PM	Helium MFC set to  0.000000
11/1/2011	9:44:54 PM	H2 MFC set to  0.000000
11/1/2011	9:44:54 PM	BCl3 MFC set to  0.000000
11/1/2011	9:44:54 PM	PHl3 MFC set to  0.000000
11/1/2011	9:44:54 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:44:54 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:44:54 PM	Tube furnace set to 150
11/1/2011	9:45:24 PM	H2 valve closed
11/1/2011	9:45:24 PM	BCl3 valve closed
11/1/2011	9:45:24 PM	PH3 valve closed
11/1/2011	9:45:24 PM	SiCl4 pre valve closed
11/1/2011	9:45:24 PM	SiCl4 post valve closed
11/1/2011	9:45:24 PM	Bypass valve closed
11/1/2011	9:45:24 PM	Bubbler valve closed
11/1/2011	9:45:24 PM	Helium valve opened
11/1/2011	9:45:24 PM	Main Vac valve opened
11/1/2011	9:45:24 PM	Helium MFC set to  20.000000
11/1/2011	9:45:24 PM	H2 MFC set to  0.000000
11/1/2011	9:45:24 PM	BCl3 MFC set to  0.000000
11/1/2011	9:45:24 PM	PHl3 MFC set to  0.000000
11/1/2011	9:45:24 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:45:24 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:45:24 PM	Tube furnace set to 150
11/1/2011	9:45:54 PM	Helium valve closed
11/1/2011	9:45:54 PM	H2 valve closed
11/1/2011	9:45:54 PM	BCl3 valve closed
11/1/2011	9:45:54 PM	PH3 valve closed
11/1/2011	9:45:54 PM	SiCl4 pre valve closed
11/1/2011	9:45:54 PM	SiCl4 post valve closed
11/1/2011	9:45:54 PM	Bypass valve closed
11/1/2011	9:45:54 PM	Bubbler valve closed
11/1/2011	9:45:54 PM	Main Vac valve opened
11/1/2011	9:45:54 PM	Helium MFC set to  0.000000
11/1/2011	9:45:54 PM	H2 MFC set to  0.000000
11/1/2011	9:45:54 PM	BCl3 MFC set to  0.000000
11/1/2011	9:45:54 PM	PHl3 MFC set to  0.000000
11/1/2011	9:45:54 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:45:54 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:45:54 PM	Tube furnace set to 150
11/1/2011	9:46:24 PM	H2 valve closed
11/1/2011	9:46:24 PM	BCl3 valve closed
11/1/2011	9:46:24 PM	PH3 valve closed
11/1/2011	9:46:24 PM	SiCl4 pre valve closed
11/1/2011	9:46:24 PM	SiCl4 post valve closed
11/1/2011	9:46:24 PM	Bypass valve closed
11/1/2011	9:46:24 PM	Bubbler valve closed
11/1/2011	9:46:24 PM	Helium valve opened
11/1/2011	9:46:24 PM	Main Vac valve opened
11/1/2011	9:46:24 PM	Helium MFC set to  20.000000
11/1/2011	9:46:24 PM	H2 MFC set to  0.000000
11/1/2011	9:46:24 PM	BCl3 MFC set to  0.000000
11/1/2011	9:46:24 PM	PHl3 MFC set to  0.000000
11/1/2011	9:46:24 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:46:24 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:46:24 PM	Tube furnace set to 150
11/1/2011	9:46:54 PM	Helium valve closed
11/1/2011	9:46:54 PM	H2 valve closed
11/1/2011	9:46:54 PM	BCl3 valve closed
11/1/2011	9:46:54 PM	PH3 valve closed
11/1/2011	9:46:54 PM	SiCl4 pre valve closed
11/1/2011	9:46:54 PM	SiCl4 post valve closed
11/1/2011	9:46:54 PM	Bypass valve closed
11/1/2011	9:46:54 PM	Bubbler valve closed
11/1/2011	9:46:54 PM	Main Vac valve opened
11/1/2011	9:46:54 PM	Helium MFC set to  0.000000
11/1/2011	9:46:54 PM	H2 MFC set to  0.000000
11/1/2011	9:46:54 PM	BCl3 MFC set to  0.000000
11/1/2011	9:46:54 PM	PHl3 MFC set to  0.000000
11/1/2011	9:46:54 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:46:54 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:46:55 PM	Tube furnace set to 150
11/1/2011	9:46:55 PM	H2 valve closed
11/1/2011	9:46:55 PM	BCl3 valve closed
11/1/2011	9:46:55 PM	PH3 valve closed
11/1/2011	9:46:55 PM	SiCl4 pre valve closed
11/1/2011	9:46:55 PM	SiCl4 post valve closed
11/1/2011	9:46:55 PM	Bypass valve closed
11/1/2011	9:46:55 PM	Bubbler valve closed
11/1/2011	9:46:55 PM	Helium valve opened
11/1/2011	9:46:55 PM	Main Vac valve opened
11/1/2011	9:46:55 PM	Helium MFC set to  20.000000
11/1/2011	9:46:55 PM	H2 MFC set to  0.000000
11/1/2011	9:46:55 PM	BCl3 MFC set to  0.000000
11/1/2011	9:46:55 PM	PHl3 MFC set to  0.000000
11/1/2011	9:46:55 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:46:55 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:46:55 PM	Tube furnace set to 150
11/1/2011	9:46:57 PM	Helium valve closed
11/1/2011	9:46:57 PM	H2 valve closed
11/1/2011	9:46:57 PM	BCl3 valve closed
11/1/2011	9:46:57 PM	PH3 valve closed
11/1/2011	9:46:57 PM	SiCl4 pre valve closed
11/1/2011	9:46:57 PM	SiCl4 post valve closed
11/1/2011	9:46:57 PM	Bypass valve closed
11/1/2011	9:46:57 PM	Bubbler valve closed
11/1/2011	9:46:57 PM	Main Vac valve opened
11/1/2011	9:46:57 PM	Helium MFC set to  0.000000
11/1/2011	9:46:57 PM	H2 MFC set to  0.000000
11/1/2011	9:46:57 PM	BCl3 MFC set to  0.000000
11/1/2011	9:46:57 PM	PHl3 MFC set to  0.000000
11/1/2011	9:46:57 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:46:57 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:46:57 PM	Tube furnace set to 150
11/1/2011	9:47:09 PM	Run aborted at 9:47 PM
11/1/2011	9:47:09 PM	Helium valve closed
11/1/2011	9:47:09 PM	H2 valve closed
11/1/2011	9:47:09 PM	BCl3 valve closed
11/1/2011	9:47:09 PM	PH3 valve closed
11/1/2011	9:47:09 PM	SiCl4 pre valve closed
11/1/2011	9:47:09 PM	SiCl4 post valve closed
11/1/2011	9:47:09 PM	Bypass valve closed
11/1/2011	9:47:09 PM	Main Vac valve closed
11/1/2011	9:47:09 PM	Bubbler valve closed
11/1/2011	9:47:09 PM	Helium MFC set to  0.000000
11/1/2011	9:47:09 PM	H2 MFC set to  0.000000
11/1/2011	9:47:09 PM	BCl3 MFC set to  0.000000
11/1/2011	9:47:09 PM	PHl3 MFC set to  0.000000
11/1/2011	9:47:09 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:47:09 PM	Tube furnace set to 0
11/1/2011	9:47:15 PM	Main Vac valve opened
11/1/2011	9:47:34 PM	Recipe started at 9:47 PM
11/1/2011	9:47:34 PM	Helium valve closed
11/1/2011	9:47:34 PM	H2 valve closed
11/1/2011	9:47:34 PM	BCl3 valve closed
11/1/2011	9:47:34 PM	PH3 valve closed
11/1/2011	9:47:34 PM	SiCl4 pre valve closed
11/1/2011	9:47:34 PM	SiCl4 post valve closed
11/1/2011	9:47:34 PM	Bypass valve closed
11/1/2011	9:47:34 PM	Bubbler valve closed
11/1/2011	9:47:34 PM	Main Vac valve opened
11/1/2011	9:47:34 PM	Helium MFC set to  0.000000
11/1/2011	9:47:34 PM	H2 MFC set to  0.000000
11/1/2011	9:47:34 PM	BCl3 MFC set to  0.000000
11/1/2011	9:47:34 PM	PHl3 MFC set to  0.000000
11/1/2011	9:47:34 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:47:34 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:47:34 PM	Tube furnace set to 150
11/1/2011	9:48:04 PM	H2 valve closed
11/1/2011	9:48:04 PM	BCl3 valve closed
11/1/2011	9:48:04 PM	PH3 valve closed
11/1/2011	9:48:04 PM	SiCl4 pre valve closed
11/1/2011	9:48:04 PM	SiCl4 post valve closed
11/1/2011	9:48:04 PM	Bypass valve closed
11/1/2011	9:48:04 PM	Bubbler valve closed
11/1/2011	9:48:04 PM	Helium valve opened
11/1/2011	9:48:04 PM	Main Vac valve opened
11/1/2011	9:48:04 PM	Helium MFC set to  20.000000
11/1/2011	9:48:04 PM	H2 MFC set to  0.000000
11/1/2011	9:48:04 PM	BCl3 MFC set to  0.000000
11/1/2011	9:48:04 PM	PHl3 MFC set to  0.000000
11/1/2011	9:48:04 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:48:04 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:48:04 PM	Tube furnace set to 150
11/1/2011	9:48:34 PM	Helium valve closed
11/1/2011	9:48:34 PM	H2 valve closed
11/1/2011	9:48:34 PM	BCl3 valve closed
11/1/2011	9:48:34 PM	PH3 valve closed
11/1/2011	9:48:34 PM	SiCl4 pre valve closed
11/1/2011	9:48:34 PM	SiCl4 post valve closed
11/1/2011	9:48:34 PM	Bypass valve closed
11/1/2011	9:48:34 PM	Bubbler valve closed
11/1/2011	9:48:34 PM	Main Vac valve opened
11/1/2011	9:48:34 PM	Helium MFC set to  0.000000
11/1/2011	9:48:34 PM	H2 MFC set to  0.000000
11/1/2011	9:48:34 PM	BCl3 MFC set to  0.000000
11/1/2011	9:48:34 PM	PHl3 MFC set to  0.000000
11/1/2011	9:48:34 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:48:34 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:48:34 PM	Tube furnace set to 150
11/1/2011	9:49:04 PM	H2 valve closed
11/1/2011	9:49:04 PM	BCl3 valve closed
11/1/2011	9:49:04 PM	PH3 valve closed
11/1/2011	9:49:04 PM	SiCl4 pre valve closed
11/1/2011	9:49:04 PM	SiCl4 post valve closed
11/1/2011	9:49:04 PM	Bypass valve closed
11/1/2011	9:49:04 PM	Bubbler valve closed
11/1/2011	9:49:04 PM	Helium valve opened
11/1/2011	9:49:04 PM	Main Vac valve opened
11/1/2011	9:49:04 PM	Helium MFC set to  20.000000
11/1/2011	9:49:04 PM	H2 MFC set to  0.000000
11/1/2011	9:49:04 PM	BCl3 MFC set to  0.000000
11/1/2011	9:49:04 PM	PHl3 MFC set to  0.000000
11/1/2011	9:49:04 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:49:04 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:49:04 PM	Tube furnace set to 150
11/1/2011	9:49:34 PM	Helium valve closed
11/1/2011	9:49:34 PM	H2 valve closed
11/1/2011	9:49:34 PM	BCl3 valve closed
11/1/2011	9:49:34 PM	PH3 valve closed
11/1/2011	9:49:34 PM	SiCl4 pre valve closed
11/1/2011	9:49:34 PM	SiCl4 post valve closed
11/1/2011	9:49:34 PM	Bypass valve closed
11/1/2011	9:49:34 PM	Bubbler valve closed
11/1/2011	9:49:34 PM	Main Vac valve opened
11/1/2011	9:49:34 PM	Helium MFC set to  0.000000
11/1/2011	9:49:34 PM	H2 MFC set to  0.000000
11/1/2011	9:49:34 PM	BCl3 MFC set to  0.000000
11/1/2011	9:49:34 PM	PHl3 MFC set to  0.000000
11/1/2011	9:49:34 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:49:34 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:49:35 PM	Tube furnace set to 150
11/1/2011	9:50:05 PM	H2 valve closed
11/1/2011	9:50:05 PM	BCl3 valve closed
11/1/2011	9:50:05 PM	PH3 valve closed
11/1/2011	9:50:05 PM	SiCl4 pre valve closed
11/1/2011	9:50:05 PM	SiCl4 post valve closed
11/1/2011	9:50:05 PM	Bypass valve closed
11/1/2011	9:50:05 PM	Bubbler valve closed
11/1/2011	9:50:05 PM	Helium valve opened
11/1/2011	9:50:05 PM	Main Vac valve opened
11/1/2011	9:50:05 PM	Helium MFC set to  20.000000
11/1/2011	9:50:05 PM	H2 MFC set to  0.000000
11/1/2011	9:50:05 PM	BCl3 MFC set to  0.000000
11/1/2011	9:50:05 PM	PHl3 MFC set to  0.000000
11/1/2011	9:50:05 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:50:05 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:50:05 PM	Tube furnace set to 150
11/1/2011	9:50:35 PM	Helium valve closed
11/1/2011	9:50:35 PM	H2 valve closed
11/1/2011	9:50:35 PM	BCl3 valve closed
11/1/2011	9:50:35 PM	PH3 valve closed
11/1/2011	9:50:35 PM	SiCl4 pre valve closed
11/1/2011	9:50:35 PM	SiCl4 post valve closed
11/1/2011	9:50:35 PM	Bypass valve closed
11/1/2011	9:50:35 PM	Bubbler valve closed
11/1/2011	9:50:35 PM	Main Vac valve opened
11/1/2011	9:50:35 PM	Helium MFC set to  0.000000
11/1/2011	9:50:35 PM	H2 MFC set to  0.000000
11/1/2011	9:50:35 PM	BCl3 MFC set to  0.000000
11/1/2011	9:50:35 PM	PHl3 MFC set to  0.000000
11/1/2011	9:50:35 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:50:35 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:50:35 PM	Tube furnace set to 150
11/1/2011	9:51:05 PM	H2 valve closed
11/1/2011	9:51:05 PM	BCl3 valve closed
11/1/2011	9:51:05 PM	PH3 valve closed
11/1/2011	9:51:05 PM	SiCl4 pre valve closed
11/1/2011	9:51:05 PM	SiCl4 post valve closed
11/1/2011	9:51:05 PM	Bypass valve closed
11/1/2011	9:51:05 PM	Bubbler valve closed
11/1/2011	9:51:05 PM	Helium valve opened
11/1/2011	9:51:05 PM	Main Vac valve opened
11/1/2011	9:51:05 PM	Helium MFC set to  20.000000
11/1/2011	9:51:05 PM	H2 MFC set to  0.000000
11/1/2011	9:51:05 PM	BCl3 MFC set to  0.000000
11/1/2011	9:51:05 PM	PHl3 MFC set to  0.000000
11/1/2011	9:51:05 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:51:05 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:51:05 PM	Tube furnace set to 150
11/1/2011	9:51:35 PM	Helium valve closed
11/1/2011	9:51:35 PM	H2 valve closed
11/1/2011	9:51:35 PM	BCl3 valve closed
11/1/2011	9:51:35 PM	PH3 valve closed
11/1/2011	9:51:35 PM	SiCl4 pre valve closed
11/1/2011	9:51:35 PM	SiCl4 post valve closed
11/1/2011	9:51:35 PM	Bypass valve closed
11/1/2011	9:51:35 PM	Bubbler valve closed
11/1/2011	9:51:35 PM	Main Vac valve opened
11/1/2011	9:51:35 PM	Helium MFC set to  0.000000
11/1/2011	9:51:35 PM	H2 MFC set to  0.000000
11/1/2011	9:51:35 PM	BCl3 MFC set to  0.000000
11/1/2011	9:51:35 PM	PHl3 MFC set to  0.000000
11/1/2011	9:51:35 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:51:35 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:51:35 PM	Tube furnace set to 150
11/1/2011	9:52:05 PM	H2 valve closed
11/1/2011	9:52:05 PM	BCl3 valve closed
11/1/2011	9:52:05 PM	PH3 valve closed
11/1/2011	9:52:05 PM	SiCl4 pre valve closed
11/1/2011	9:52:05 PM	SiCl4 post valve closed
11/1/2011	9:52:05 PM	Bypass valve closed
11/1/2011	9:52:05 PM	Bubbler valve closed
11/1/2011	9:52:05 PM	Helium valve opened
11/1/2011	9:52:05 PM	Main Vac valve opened
11/1/2011	9:52:05 PM	Helium MFC set to  20.000000
11/1/2011	9:52:05 PM	H2 MFC set to  0.000000
11/1/2011	9:52:05 PM	BCl3 MFC set to  0.000000
11/1/2011	9:52:05 PM	PHl3 MFC set to  0.000000
11/1/2011	9:52:05 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:52:05 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:52:05 PM	Tube furnace set to 150
11/1/2011	9:52:36 PM	Helium valve closed
11/1/2011	9:52:36 PM	H2 valve closed
11/1/2011	9:52:36 PM	BCl3 valve closed
11/1/2011	9:52:36 PM	PH3 valve closed
11/1/2011	9:52:36 PM	SiCl4 pre valve closed
11/1/2011	9:52:36 PM	SiCl4 post valve closed
11/1/2011	9:52:36 PM	Bypass valve closed
11/1/2011	9:52:36 PM	Bubbler valve closed
11/1/2011	9:52:36 PM	Main Vac valve opened
11/1/2011	9:52:36 PM	Helium MFC set to  0.000000
11/1/2011	9:52:36 PM	H2 MFC set to  0.000000
11/1/2011	9:52:36 PM	BCl3 MFC set to  0.000000
11/1/2011	9:52:36 PM	PHl3 MFC set to  0.000000
11/1/2011	9:52:36 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:52:36 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:52:36 PM	Tube furnace set to 150
11/1/2011	9:53:06 PM	H2 valve closed
11/1/2011	9:53:06 PM	BCl3 valve closed
11/1/2011	9:53:06 PM	PH3 valve closed
11/1/2011	9:53:06 PM	SiCl4 pre valve closed
11/1/2011	9:53:06 PM	SiCl4 post valve closed
11/1/2011	9:53:06 PM	Bypass valve closed
11/1/2011	9:53:06 PM	Bubbler valve closed
11/1/2011	9:53:06 PM	Helium valve opened
11/1/2011	9:53:06 PM	Main Vac valve opened
11/1/2011	9:53:06 PM	Helium MFC set to  20.000000
11/1/2011	9:53:06 PM	H2 MFC set to  0.000000
11/1/2011	9:53:06 PM	BCl3 MFC set to  0.000000
11/1/2011	9:53:06 PM	PHl3 MFC set to  0.000000
11/1/2011	9:53:06 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:53:06 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:53:06 PM	Tube furnace set to 150
11/1/2011	9:53:36 PM	Helium valve closed
11/1/2011	9:53:36 PM	H2 valve closed
11/1/2011	9:53:36 PM	BCl3 valve closed
11/1/2011	9:53:36 PM	PH3 valve closed
11/1/2011	9:53:36 PM	SiCl4 pre valve closed
11/1/2011	9:53:36 PM	SiCl4 post valve closed
11/1/2011	9:53:36 PM	Bypass valve closed
11/1/2011	9:53:36 PM	Bubbler valve closed
11/1/2011	9:53:36 PM	Main Vac valve opened
11/1/2011	9:53:36 PM	Helium MFC set to  0.000000
11/1/2011	9:53:36 PM	H2 MFC set to  0.000000
11/1/2011	9:53:36 PM	BCl3 MFC set to  0.000000
11/1/2011	9:53:36 PM	PHl3 MFC set to  0.000000
11/1/2011	9:53:36 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:53:36 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:53:36 PM	Tube furnace set to 150
11/1/2011	9:54:06 PM	H2 valve closed
11/1/2011	9:54:06 PM	BCl3 valve closed
11/1/2011	9:54:06 PM	PH3 valve closed
11/1/2011	9:54:06 PM	SiCl4 pre valve closed
11/1/2011	9:54:06 PM	SiCl4 post valve closed
11/1/2011	9:54:06 PM	Bypass valve closed
11/1/2011	9:54:06 PM	Bubbler valve closed
11/1/2011	9:54:06 PM	Helium valve opened
11/1/2011	9:54:06 PM	Main Vac valve opened
11/1/2011	9:54:06 PM	Helium MFC set to  20.000000
11/1/2011	9:54:06 PM	H2 MFC set to  0.000000
11/1/2011	9:54:06 PM	BCl3 MFC set to  0.000000
11/1/2011	9:54:06 PM	PHl3 MFC set to  0.000000
11/1/2011	9:54:06 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:54:06 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:54:06 PM	Tube furnace set to 150
11/1/2011	9:54:36 PM	Helium valve closed
11/1/2011	9:54:36 PM	H2 valve closed
11/1/2011	9:54:36 PM	BCl3 valve closed
11/1/2011	9:54:36 PM	PH3 valve closed
11/1/2011	9:54:36 PM	SiCl4 pre valve closed
11/1/2011	9:54:36 PM	SiCl4 post valve closed
11/1/2011	9:54:36 PM	Bypass valve closed
11/1/2011	9:54:36 PM	Bubbler valve closed
11/1/2011	9:54:36 PM	Main Vac valve opened
11/1/2011	9:54:36 PM	Helium MFC set to  0.000000
11/1/2011	9:54:36 PM	H2 MFC set to  0.000000
11/1/2011	9:54:36 PM	BCl3 MFC set to  0.000000
11/1/2011	9:54:36 PM	PHl3 MFC set to  0.000000
11/1/2011	9:54:36 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:54:36 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:54:37 PM	Tube furnace set to 150
11/1/2011	9:55:07 PM	H2 valve closed
11/1/2011	9:55:07 PM	BCl3 valve closed
11/1/2011	9:55:07 PM	PH3 valve closed
11/1/2011	9:55:07 PM	SiCl4 pre valve closed
11/1/2011	9:55:07 PM	SiCl4 post valve closed
11/1/2011	9:55:07 PM	Bypass valve closed
11/1/2011	9:55:07 PM	Bubbler valve closed
11/1/2011	9:55:07 PM	Helium valve opened
11/1/2011	9:55:07 PM	Main Vac valve opened
11/1/2011	9:55:07 PM	Helium MFC set to  20.000000
11/1/2011	9:55:07 PM	H2 MFC set to  0.000000
11/1/2011	9:55:07 PM	BCl3 MFC set to  0.000000
11/1/2011	9:55:07 PM	PHl3 MFC set to  0.000000
11/1/2011	9:55:07 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:55:07 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:55:07 PM	Tube furnace set to 150
11/1/2011	9:55:37 PM	Helium valve closed
11/1/2011	9:55:37 PM	H2 valve closed
11/1/2011	9:55:37 PM	BCl3 valve closed
11/1/2011	9:55:37 PM	PH3 valve closed
11/1/2011	9:55:37 PM	SiCl4 pre valve closed
11/1/2011	9:55:37 PM	SiCl4 post valve closed
11/1/2011	9:55:37 PM	Bypass valve closed
11/1/2011	9:55:37 PM	Bubbler valve closed
11/1/2011	9:55:37 PM	Main Vac valve opened
11/1/2011	9:55:37 PM	Helium MFC set to  0.000000
11/1/2011	9:55:37 PM	H2 MFC set to  0.000000
11/1/2011	9:55:37 PM	BCl3 MFC set to  0.000000
11/1/2011	9:55:37 PM	PHl3 MFC set to  0.000000
11/1/2011	9:55:37 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:55:37 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:55:37 PM	Tube furnace set to 150
11/1/2011	9:56:07 PM	H2 valve closed
11/1/2011	9:56:07 PM	BCl3 valve closed
11/1/2011	9:56:07 PM	PH3 valve closed
11/1/2011	9:56:07 PM	SiCl4 pre valve closed
11/1/2011	9:56:07 PM	SiCl4 post valve closed
11/1/2011	9:56:07 PM	Bypass valve closed
11/1/2011	9:56:07 PM	Bubbler valve closed
11/1/2011	9:56:07 PM	Helium valve opened
11/1/2011	9:56:07 PM	Main Vac valve opened
11/1/2011	9:56:07 PM	Helium MFC set to  20.000000
11/1/2011	9:56:07 PM	H2 MFC set to  0.000000
11/1/2011	9:56:07 PM	BCl3 MFC set to  0.000000
11/1/2011	9:56:07 PM	PHl3 MFC set to  0.000000
11/1/2011	9:56:07 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:56:07 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:56:07 PM	Tube furnace set to 150
11/1/2011	9:56:37 PM	Helium valve closed
11/1/2011	9:56:37 PM	H2 valve closed
11/1/2011	9:56:37 PM	BCl3 valve closed
11/1/2011	9:56:37 PM	PH3 valve closed
11/1/2011	9:56:37 PM	SiCl4 pre valve closed
11/1/2011	9:56:37 PM	SiCl4 post valve closed
11/1/2011	9:56:37 PM	Bypass valve closed
11/1/2011	9:56:37 PM	Bubbler valve closed
11/1/2011	9:56:37 PM	Main Vac valve opened
11/1/2011	9:56:37 PM	Helium MFC set to  0.000000
11/1/2011	9:56:37 PM	H2 MFC set to  0.000000
11/1/2011	9:56:37 PM	BCl3 MFC set to  0.000000
11/1/2011	9:56:37 PM	PHl3 MFC set to  0.000000
11/1/2011	9:56:37 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:56:37 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:56:37 PM	Tube furnace set to 150
11/1/2011	9:57:07 PM	H2 valve closed
11/1/2011	9:57:07 PM	BCl3 valve closed
11/1/2011	9:57:07 PM	PH3 valve closed
11/1/2011	9:57:07 PM	SiCl4 pre valve closed
11/1/2011	9:57:07 PM	SiCl4 post valve closed
11/1/2011	9:57:07 PM	Bypass valve closed
11/1/2011	9:57:07 PM	Bubbler valve closed
11/1/2011	9:57:07 PM	Helium valve opened
11/1/2011	9:57:07 PM	Main Vac valve opened
11/1/2011	9:57:07 PM	Helium MFC set to  20.000000
11/1/2011	9:57:07 PM	H2 MFC set to  0.000000
11/1/2011	9:57:07 PM	BCl3 MFC set to  0.000000
11/1/2011	9:57:07 PM	PHl3 MFC set to  0.000000
11/1/2011	9:57:07 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:57:07 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:57:08 PM	Tube furnace set to 150
11/1/2011	9:57:38 PM	Helium valve closed
11/1/2011	9:57:38 PM	H2 valve closed
11/1/2011	9:57:38 PM	BCl3 valve closed
11/1/2011	9:57:38 PM	PH3 valve closed
11/1/2011	9:57:38 PM	SiCl4 pre valve closed
11/1/2011	9:57:38 PM	SiCl4 post valve closed
11/1/2011	9:57:38 PM	Bypass valve closed
11/1/2011	9:57:38 PM	Bubbler valve closed
11/1/2011	9:57:38 PM	Main Vac valve opened
11/1/2011	9:57:38 PM	Helium MFC set to  0.000000
11/1/2011	9:57:38 PM	H2 MFC set to  0.000000
11/1/2011	9:57:38 PM	BCl3 MFC set to  0.000000
11/1/2011	9:57:38 PM	PHl3 MFC set to  0.000000
11/1/2011	9:57:38 PM	SiCl4 MFC set to  0.000000
11/1/2011	9:57:38 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	9:57:38 PM	Tube furnace set to 150
11/1/2011	9:57:39 PM	Run finished at 9:57 PM
11/1/2011	10:07:10 PM	Main Vac valve closed
11/1/2011	10:07:17 PM	Main Vac valve opened
11/1/2011	10:07:49 PM	Recipe started at 10:07 PM
11/1/2011	10:07:49 PM	Helium valve closed
11/1/2011	10:07:49 PM	H2 valve closed
11/1/2011	10:07:49 PM	BCl3 valve closed
11/1/2011	10:07:49 PM	PH3 valve closed
11/1/2011	10:07:49 PM	SiCl4 pre valve closed
11/1/2011	10:07:49 PM	SiCl4 post valve closed
11/1/2011	10:07:49 PM	Main Vac valve closed
11/1/2011	10:07:49 PM	Bypass valve closed
11/1/2011	10:07:49 PM	Bubbler valve closed
11/1/2011	10:07:49 PM	Helium MFC set to  0.000000
11/1/2011	10:07:49 PM	H2 MFC set to  0.000000
11/1/2011	10:07:49 PM	BCl3 MFC set to  0.000000
11/1/2011	10:07:49 PM	PHl3 MFC set to  0.000000
11/1/2011	10:07:49 PM	SiCl4 MFC set to  0.000000
11/1/2011	10:07:49 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:07:49 PM	Tube furnace set to 0
11/1/2011	10:07:52 PM	Helium valve closed
11/1/2011	10:07:52 PM	BCl3 valve closed
11/1/2011	10:07:52 PM	PH3 valve closed
11/1/2011	10:07:52 PM	SiCl4 pre valve closed
11/1/2011	10:07:52 PM	SiCl4 post valve closed
11/1/2011	10:07:52 PM	Main Vac valve closed
11/1/2011	10:07:52 PM	Bypass valve closed
11/1/2011	10:07:52 PM	Bubbler valve closed
11/1/2011	10:07:52 PM	H2 valve opened
11/1/2011	10:07:52 PM	Helium MFC set to  0.000000
11/1/2011	10:07:52 PM	H2 MFC set to  500.000000
11/1/2011	10:07:52 PM	BCl3 MFC set to  0.000000
11/1/2011	10:07:52 PM	PHl3 MFC set to  0.000000
11/1/2011	10:07:52 PM	SiCl4 MFC set to  0.000000
11/1/2011	10:07:52 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:07:52 PM	Tube furnace set to 0
11/1/2011	10:08:55 PM	Helium valve closed
11/1/2011	10:08:55 PM	BCl3 valve closed
11/1/2011	10:08:55 PM	PH3 valve closed
11/1/2011	10:08:55 PM	SiCl4 pre valve closed
11/1/2011	10:08:55 PM	SiCl4 post valve closed
11/1/2011	10:08:55 PM	Main Vac valve closed
11/1/2011	10:08:55 PM	Bypass valve closed
11/1/2011	10:08:55 PM	H2 valve opened
11/1/2011	10:08:55 PM	Bubbler valve opened
11/1/2011	10:08:55 PM	Helium MFC set to  0.000000
11/1/2011	10:08:55 PM	H2 MFC set to  500.000000
11/1/2011	10:08:55 PM	BCl3 MFC set to  0.000000
11/1/2011	10:08:55 PM	PHl3 MFC set to  0.000000
11/1/2011	10:08:55 PM	SiCl4 MFC set to  0.000000
11/1/2011	10:08:55 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:08:55 PM	Tube furnace set to 0
11/1/2011	10:08:56 PM	Helium valve closed
11/1/2011	10:08:56 PM	BCl3 valve closed
11/1/2011	10:08:56 PM	PH3 valve closed
11/1/2011	10:08:56 PM	SiCl4 pre valve closed
11/1/2011	10:08:56 PM	SiCl4 post valve closed
11/1/2011	10:08:56 PM	Main Vac valve closed
11/1/2011	10:08:56 PM	Bypass valve closed
11/1/2011	10:08:56 PM	H2 valve opened
11/1/2011	10:08:56 PM	Bubbler valve opened
11/1/2011	10:08:56 PM	Helium MFC set to  0.000000
11/1/2011	10:08:56 PM	H2 MFC set to  500.000000
11/1/2011	10:08:56 PM	BCl3 MFC set to  0.000000
11/1/2011	10:08:56 PM	PHl3 MFC set to  0.000000
11/1/2011	10:08:56 PM	SiCl4 MFC set to  0.000000
11/1/2011	10:08:56 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:08:56 PM	Tube furnace set to 1025
11/1/2011	10:28:56 PM	Helium valve closed
11/1/2011	10:28:56 PM	BCl3 valve closed
11/1/2011	10:28:56 PM	PH3 valve closed
11/1/2011	10:28:56 PM	Main Vac valve closed
11/1/2011	10:28:56 PM	Bypass valve closed
11/1/2011	10:28:56 PM	H2 valve opened
11/1/2011	10:28:56 PM	SiCl4 pre valve opened
11/1/2011	10:28:56 PM	SiCl4 post valve opened
11/1/2011	10:28:56 PM	Bubbler valve opened
11/1/2011	10:28:56 PM	Helium MFC set to  0.000000
11/1/2011	10:28:56 PM	H2 MFC set to  500.000000
11/1/2011	10:28:56 PM	BCl3 MFC set to  0.000000
11/1/2011	10:28:56 PM	PHl3 MFC set to  0.000000
11/1/2011	10:28:56 PM	SiCl4 MFC set to  50.000000
11/1/2011	10:28:56 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:28:56 PM	Tube furnace set to 1025
11/1/2011	10:48:56 PM	Helium valve closed
11/1/2011	10:48:56 PM	BCl3 valve closed
11/1/2011	10:48:56 PM	PH3 valve closed
11/1/2011	10:48:56 PM	SiCl4 pre valve closed
11/1/2011	10:48:56 PM	SiCl4 post valve closed
11/1/2011	10:48:56 PM	Main Vac valve closed
11/1/2011	10:48:56 PM	Bypass valve closed
11/1/2011	10:48:56 PM	H2 valve opened
11/1/2011	10:48:56 PM	Bubbler valve opened
11/1/2011	10:48:56 PM	Helium MFC set to  0.000000
11/1/2011	10:48:56 PM	H2 MFC set to  500.000000
11/1/2011	10:48:56 PM	BCl3 MFC set to  0.000000
11/1/2011	10:48:56 PM	PHl3 MFC set to  0.000000
11/1/2011	10:48:56 PM	SiCl4 MFC set to  0.000000
11/1/2011	10:48:56 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:48:56 PM	Tube furnace set to 950
11/1/2011	10:51:56 PM	H2 valve closed
11/1/2011	10:51:56 PM	BCl3 valve closed
11/1/2011	10:51:56 PM	PH3 valve closed
11/1/2011	10:51:56 PM	SiCl4 pre valve closed
11/1/2011	10:51:56 PM	SiCl4 post valve closed
11/1/2011	10:51:56 PM	Main Vac valve closed
11/1/2011	10:51:56 PM	Bypass valve closed
11/1/2011	10:51:56 PM	Helium valve opened
11/1/2011	10:51:56 PM	Bubbler valve opened
11/1/2011	10:51:56 PM	Helium MFC set to  500.000000
11/1/2011	10:51:56 PM	H2 MFC set to  0.000000
11/1/2011	10:51:56 PM	BCl3 MFC set to  0.000000
11/1/2011	10:51:56 PM	PHl3 MFC set to  0.000000
11/1/2011	10:51:56 PM	SiCl4 MFC set to  0.000000
11/1/2011	10:51:56 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:51:57 PM	Tube furnace set to 900
11/1/2011	10:54:57 PM	H2 valve closed
11/1/2011	10:54:57 PM	BCl3 valve closed
11/1/2011	10:54:57 PM	PH3 valve closed
11/1/2011	10:54:57 PM	SiCl4 pre valve closed
11/1/2011	10:54:57 PM	SiCl4 post valve closed
11/1/2011	10:54:57 PM	Main Vac valve closed
11/1/2011	10:54:57 PM	Bypass valve closed
11/1/2011	10:54:57 PM	Helium valve opened
11/1/2011	10:54:57 PM	Bubbler valve opened
11/1/2011	10:54:57 PM	Helium MFC set to  500.000000
11/1/2011	10:54:57 PM	H2 MFC set to  0.000000
11/1/2011	10:54:57 PM	BCl3 MFC set to  0.000000
11/1/2011	10:54:57 PM	PHl3 MFC set to  0.000000
11/1/2011	10:54:57 PM	SiCl4 MFC set to  0.000000
11/1/2011	10:54:57 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:54:57 PM	Tube furnace set to 850
11/1/2011	10:57:57 PM	H2 valve closed
11/1/2011	10:57:57 PM	BCl3 valve closed
11/1/2011	10:57:57 PM	PH3 valve closed
11/1/2011	10:57:57 PM	SiCl4 pre valve closed
11/1/2011	10:57:57 PM	SiCl4 post valve closed
11/1/2011	10:57:57 PM	Main Vac valve closed
11/1/2011	10:57:57 PM	Bypass valve closed
11/1/2011	10:57:57 PM	Helium valve opened
11/1/2011	10:57:57 PM	Bubbler valve opened
11/1/2011	10:57:57 PM	Helium MFC set to  500.000000
11/1/2011	10:57:57 PM	H2 MFC set to  0.000000
11/1/2011	10:57:57 PM	BCl3 MFC set to  0.000000
11/1/2011	10:57:57 PM	PHl3 MFC set to  0.000000
11/1/2011	10:57:57 PM	SiCl4 MFC set to  0.000000
11/1/2011	10:57:57 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	10:57:57 PM	Tube furnace set to 800
11/1/2011	11:00:57 PM	H2 valve closed
11/1/2011	11:00:57 PM	BCl3 valve closed
11/1/2011	11:00:57 PM	PH3 valve closed
11/1/2011	11:00:57 PM	SiCl4 pre valve closed
11/1/2011	11:00:57 PM	SiCl4 post valve closed
11/1/2011	11:00:57 PM	Main Vac valve closed
11/1/2011	11:00:57 PM	Bypass valve closed
11/1/2011	11:00:57 PM	Helium valve opened
11/1/2011	11:00:57 PM	Bubbler valve opened
11/1/2011	11:00:57 PM	Helium MFC set to  500.000000
11/1/2011	11:00:57 PM	H2 MFC set to  0.000000
11/1/2011	11:00:57 PM	BCl3 MFC set to  0.000000
11/1/2011	11:00:57 PM	PHl3 MFC set to  0.000000
11/1/2011	11:00:57 PM	SiCl4 MFC set to  0.000000
11/1/2011	11:00:57 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	11:00:57 PM	Tube furnace set to 750
11/1/2011	11:03:57 PM	H2 valve closed
11/1/2011	11:03:57 PM	BCl3 valve closed
11/1/2011	11:03:57 PM	PH3 valve closed
11/1/2011	11:03:57 PM	SiCl4 pre valve closed
11/1/2011	11:03:57 PM	SiCl4 post valve closed
11/1/2011	11:03:57 PM	Main Vac valve closed
11/1/2011	11:03:57 PM	Bypass valve closed
11/1/2011	11:03:57 PM	Helium valve opened
11/1/2011	11:03:57 PM	Bubbler valve opened
11/1/2011	11:03:57 PM	Helium MFC set to  500.000000
11/1/2011	11:03:57 PM	H2 MFC set to  0.000000
11/1/2011	11:03:57 PM	BCl3 MFC set to  0.000000
11/1/2011	11:03:57 PM	PHl3 MFC set to  0.000000
11/1/2011	11:03:57 PM	SiCl4 MFC set to  0.000000
11/1/2011	11:03:57 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	11:03:57 PM	Tube furnace set to 0
11/1/2011	11:14:56 PM	Helium valve closed
11/1/2011	11:14:56 PM	H2 valve closed
11/1/2011	11:14:56 PM	BCl3 valve closed
11/1/2011	11:14:56 PM	PH3 valve closed
11/1/2011	11:14:56 PM	SiCl4 pre valve closed
11/1/2011	11:14:56 PM	SiCl4 post valve closed
11/1/2011	11:14:56 PM	Main Vac valve closed
11/1/2011	11:14:56 PM	Bubbler valve closed
11/1/2011	11:14:56 PM	Bypass valve closed
11/1/2011	11:14:56 PM	Helium MFC set to  0.000000
11/1/2011	11:14:56 PM	H2 MFC set to  0.000000
11/1/2011	11:14:56 PM	BCl3 MFC set to  0.000000
11/1/2011	11:14:56 PM	PHl3 MFC set to  0.000000
11/1/2011	11:14:56 PM	SiCl4 MFC set to  0.000000
11/1/2011	11:14:56 PM	Bypass solenoid MFC set to  760.000000
11/1/2011	11:14:56 PM	Tube furnace set to 0
11/1/2011	11:14:56 PM	Baratron reads 742.339149 Torr and NaOH valve is open.  Emergency exit.
11/1/2011	11:18:05 PM	Run aborted at 11:18 PM
11/1/2011	11:18:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	11:18:07 PM	Recipe started at 11:18 PM
11/1/2011	11:18:08 PM	Helium valve closed
11/1/2011	11:18:08 PM	H2 valve closed
11/1/2011	11:18:08 PM	BCl3 valve closed
11/1/2011	11:18:08 PM	PH3 valve closed
11/1/2011	11:18:08 PM	SiCl4 pre valve closed
11/1/2011	11:18:08 PM	SiCl4 post valve closed
11/1/2011	11:18:08 PM	Main Vac valve closed
11/1/2011	11:18:08 PM	Bubbler valve closed
11/1/2011	11:18:08 PM	Bypass valve opened
11/1/2011	11:18:08 PM	Helium MFC set to  0.000000
11/1/2011	11:18:08 PM	H2 MFC set to  0.000000
11/1/2011	11:18:08 PM	BCl3 MFC set to  0.000000
11/1/2011	11:18:08 PM	PHl3 MFC set to  0.000000
11/1/2011	11:18:08 PM	SiCl4 MFC set to  0.000000
11/1/2011	11:18:08 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	11:18:08 PM	Tube furnace set to 0
11/1/2011	11:19:08 PM	Helium valve closed
11/1/2011	11:19:08 PM	H2 valve closed
11/1/2011	11:19:08 PM	BCl3 valve closed
11/1/2011	11:19:08 PM	PH3 valve closed
11/1/2011	11:19:08 PM	SiCl4 pre valve closed
11/1/2011	11:19:08 PM	SiCl4 post valve closed
11/1/2011	11:19:08 PM	Main Vac valve closed
11/1/2011	11:19:08 PM	Bubbler valve closed
11/1/2011	11:19:08 PM	Bypass valve opened
11/1/2011	11:19:08 PM	Helium MFC set to  0.000000
11/1/2011	11:19:08 PM	H2 MFC set to  0.000000
11/1/2011	11:19:08 PM	BCl3 MFC set to  0.000000
11/1/2011	11:19:08 PM	PHl3 MFC set to  0.000000
11/1/2011	11:19:08 PM	SiCl4 MFC set to  0.000000
11/1/2011	11:19:08 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	11:19:09 PM	Tube furnace set to 0
11/1/2011	11:20:09 PM	Helium valve closed
11/1/2011	11:20:09 PM	H2 valve closed
11/1/2011	11:20:09 PM	BCl3 valve closed
11/1/2011	11:20:09 PM	PH3 valve closed
11/1/2011	11:20:09 PM	SiCl4 pre valve closed
11/1/2011	11:20:09 PM	SiCl4 post valve closed
11/1/2011	11:20:09 PM	Bypass valve closed
11/1/2011	11:20:09 PM	Bubbler valve closed
11/1/2011	11:20:09 PM	Main Vac valve opened
11/1/2011	11:20:09 PM	Helium MFC set to  0.000000
11/1/2011	11:20:09 PM	H2 MFC set to  0.000000
11/1/2011	11:20:09 PM	BCl3 MFC set to  0.000000
11/1/2011	11:20:09 PM	PHl3 MFC set to  0.000000
11/1/2011	11:20:09 PM	SiCl4 MFC set to  0.000000
11/1/2011	11:20:09 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	11:20:09 PM	Tube furnace set to 0
11/1/2011	11:20:10 PM	Run finished at 11:20 PM
11/1/2011	11:20:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2011	11:25:40 PM	Helium MFC set to  10.000000
11/1/2011	11:25:41 PM	Helium valve opened
11/1/2011	11:25:54 PM	Helium MFC set to  15.000000
11/1/2011	11:26:04 PM	Helium MFC set to  20.000000
11/1/2011	11:26:42 PM	Helium valve closed
11/1/2011	11:27:43 PM	Helium valve opened
11/1/2011	11:28:46 PM	Helium valve closed
11/1/2011	11:31:04 PM	Recipe started at 11:31 PM
11/1/2011	11:31:04 PM	Helium valve closed
11/1/2011	11:31:04 PM	H2 valve closed
11/1/2011	11:31:04 PM	BCl3 valve closed
11/1/2011	11:31:04 PM	PH3 valve closed
11/1/2011	11:31:04 PM	SiCl4 pre valve closed
11/1/2011	11:31:04 PM	SiCl4 post valve closed
11/1/2011	11:31:04 PM	Main Vac valve closed
11/1/2011	11:31:04 PM	Bypass valve closed
11/1/2011	11:31:04 PM	Bubbler valve closed
11/1/2011	11:31:04 PM	Helium MFC set to  0.000000
11/1/2011	11:31:04 PM	H2 MFC set to  0.000000
11/1/2011	11:31:04 PM	BCl3 MFC set to  0.000000
11/1/2011	11:31:04 PM	PHl3 MFC set to  0.000000
11/1/2011	11:31:04 PM	SiCl4 MFC set to  0.000000
11/1/2011	11:31:04 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	11:31:04 PM	Tube furnace set to 0
11/1/2011	11:31:13 PM	Run aborted at 11:31 PM
11/1/2011	11:31:13 PM	Helium valve closed
11/1/2011	11:31:13 PM	H2 valve closed
11/1/2011	11:31:13 PM	BCl3 valve closed
11/1/2011	11:31:13 PM	PH3 valve closed
11/1/2011	11:31:13 PM	SiCl4 pre valve closed
11/1/2011	11:31:13 PM	SiCl4 post valve closed
11/1/2011	11:31:13 PM	Bypass valve closed
11/1/2011	11:31:13 PM	Main Vac valve closed
11/1/2011	11:31:13 PM	Bubbler valve closed
11/1/2011	11:31:13 PM	Helium MFC set to  0.000000
11/1/2011	11:31:13 PM	H2 MFC set to  0.000000
11/1/2011	11:31:13 PM	BCl3 MFC set to  0.000000
11/1/2011	11:31:13 PM	PHl3 MFC set to  0.000000
11/1/2011	11:31:13 PM	SiCl4 MFC set to  0.000000
11/1/2011	11:31:13 PM	Tube furnace set to 0
11/1/2011	11:31:25 PM	Main Vac valve opened
11/1/2011	11:31:31 PM	Recipe started at 11:31 PM
11/1/2011	11:31:31 PM	Helium valve closed
11/1/2011	11:31:31 PM	H2 valve closed
11/1/2011	11:31:31 PM	BCl3 valve closed
11/1/2011	11:31:31 PM	PH3 valve closed
11/1/2011	11:31:31 PM	SiCl4 pre valve closed
11/1/2011	11:31:31 PM	SiCl4 post valve closed
11/1/2011	11:31:31 PM	Bypass valve closed
11/1/2011	11:31:31 PM	Bubbler valve closed
11/1/2011	11:31:31 PM	Main Vac valve opened
11/1/2011	11:31:31 PM	Helium MFC set to  0.000000
11/1/2011	11:31:31 PM	H2 MFC set to  0.000000
11/1/2011	11:31:31 PM	BCl3 MFC set to  0.000000
11/1/2011	11:31:31 PM	PHl3 MFC set to  0.000000
11/1/2011	11:31:31 PM	SiCl4 MFC set to  0.000000
11/1/2011	11:31:31 PM	Bypass solenoid MFC set to  0.000000
11/1/2011	11:31:31 PM	Tube furnace set to 0
11/1/2011	11:32:12 PM	Run aborted at 11:32 PM
11/1/2011	11:32:12 PM	Helium valve closed
11/1/2011	11:32:12 PM	H2 valve closed
11/1/2011	11:32:12 PM	BCl3 valve closed
11/1/2011	11:32:12 PM	PH3 valve closed
11/1/2011	11:32:12 PM	SiCl4 pre valve closed
11/1/2011	11:32:12 PM	SiCl4 post valve closed
11/1/2011	11:32:12 PM	Bypass valve closed
11/1/2011	11:32:12 PM	Main Vac valve closed
11/1/2011	11:32:12 PM	Bubbler valve closed
11/1/2011	11:32:12 PM	Helium MFC set to  0.000000
11/1/2011	11:32:12 PM	H2 MFC set to  0.000000
11/1/2011	11:32:12 PM	BCl3 MFC set to  0.000000
11/1/2011	11:32:12 PM	PHl3 MFC set to  0.000000
11/1/2011	11:32:12 PM	SiCl4 MFC set to  0.000000
11/1/2011	11:32:12 PM	Tube furnace set to 0
11/1/2011	11:32:16 PM	Main Vac valve opened
